公开(公告)号：US20140219883A1

公开(公告)日：2014-08-07

申请号：US14345807

申请日：2012-08-30

Applicant: Yoichiro Tabata ,  Shinichi Nishimura ,  Noriyuki Nakamura ,  Yujiro Okihara

Inventor： Yoichiro Tabata ,  Shinichi Nishimura ,  Noriyuki Nakamura ,  Yujiro Okihara

IPC: C01B13/11

CPC classification number: C01B13/11 ,  B01J35/004 ,  B01J35/02 ,  C01B2201/10 ,  C01B2201/20 ,  C01B2201/64 ,  C01B2201/70 ,  C01B2201/90

Abstract: In the present invention, a gas flow rate adjustment apparatus that outputs a raw material gas to an ozone generation apparatus is provided. The gas flow rate adjustment apparatus includes a plurality of flow rate adjustment parts, and outputs a second mixed gas serving as the raw material gas to the ozone generation apparatus. The second mixed gas includes an oxygen gas outputted from a first oxygen flow rate adjustment part and a first mixed gas outputted from a mixed gas flow rate adjustment part. The raw material gas generated by the gas flow rate adjustment apparatus, which includes an oxygen gas and a nitrogen gas, contains the nitrogen gas added to the oxygen gas with the rate of addition being in a range of more than 0 PPM and not more than 100 PPM.

Abstract translation: 在本发明中，提供将原料气体输出到臭氧发生装置的气体流量调节装置。 气体流量调节装置包括多个流量调节部，并将作为原料气体的第二混合气体输出到臭氧发生装置。 第二混合气体包括从第一氧气流量调节部分输出的氧气和从混合气体流量调节部分输出的第一混合气体。 由包含氧气和氮气的气体流量调节装置产生的原料气体含有添加到氧气中的氮气，加入量在大于0PPM且不大于 100 PPM。

公开(公告)号：US08778274B2

公开(公告)日：2014-07-15

申请号：US13505677

申请日：2010-09-06

Applicant: Noriyuki Nakamura ,  Yujiro Okihara ,  Tetsuya Saitsu ,  Hatsuo Yotsumoto ,  Yoichiro Tabata ,  Nobuyuki Itoh

Inventor： Noriyuki Nakamura ,  Yujiro Okihara ,  Tetsuya Saitsu ,  Hatsuo Yotsumoto ,  Yoichiro Tabata ,  Nobuyuki Itoh

IPC: B01J19/08

CPC classification number: C01B13/11 ,  C01B2201/90

Abstract: An ozone gas output flow rate management unit configured to receive a plurality of ozone gas outputs from a plurality of ozone generation units and capable of performing an ozone gas output flow rate control for selectively outputting one or a combination of two or more of the plurality of ozone gas outputs to any of a plurality of ozone treatment apparatuses by performing an opening/closing operation of a plurality of ozone gas control valves provided in the ozone gas output flow rate management unit.

Abstract translation: 一种臭氧气体输出流量管理单元，被配置为从多个臭氧发生单元接收多个臭氧气体输出，并且能够执行臭氧气体输出流量控制，以选择性地输出所述多个臭氧发生单元中的一个或多个的一个或多个 通过执行设置在臭氧气体输出流量管理单元中的多个臭氧气体控制阀的打开/关闭操作，臭氧气体输出到多个臭氧处理装置中的任一个。

公开(公告)号：US20140017133A1

公开(公告)日：2014-01-16

申请号：US14007048

申请日：2011-03-24

Applicant: Shinichi Nishimura ,  Yoichiro Tabata

Inventor： Shinichi Nishimura ,  Yoichiro Tabata

IPC: B01J12/00

CPC classification number: B01J12/00 ,  C01B13/11 ,  C01B2201/64 ,  C01B2201/90

Abstract: In the present invention, particularly, means for removing moisture contained in a raw material gas is provided in a raw material gas supply part so that the amount of moisture contained in the raw material gas that is supplied to an ozone gas supply system is reduced, and additionally an ozone gas output flow rate management unit is provided that is configured to receive a plurality of ozone gas outputs from a plurality of nitrogen-free ozone generation units and capable of performing an ozone gas output flow rate control for selectively outputting one or a combination of two or more of the plurality of ozone gas outputs to any of a plurality of ozone treatment apparatuses by performing an opening/closing operation on a plurality of ozone gas control valves provided in the ozone gas output flow rate management unit.

Abstract translation: 在本发明中，特别地，在原料气体供给部设置有用于除去原料气体中含有的水分的装置，使得供给到臭氧气体供给系统的原料气体中所含的水分量减少， 并且还提供了一种臭氧气体输出流量管理单元，其被配置为从多个无氮臭氧产生单元接收多个臭氧气体输出并且能够执行臭氧气体输出流量控制，以选择性地输出一个或 通过对设置在臭氧气体输出流量管理单元中的多个臭氧气体控制阀进行打开/关闭操作，将多个臭氧气体输出中的两个或更多个输出组合到多个臭氧处理设备中的任一个。

公开(公告)号：US20140008211A1

公开(公告)日：2014-01-09

申请号：US13935353

申请日：2013-07-03

Applicant: PACIFIC OZONE TECHNOLOGY, INC.

Inventor： Philip Tinsley DEMPSTER

IPC: C01B13/11

CPC classification number: C01B13/115 ,  C01B13/11 ,  C01B2201/10 ,  C01B2201/30 ,  C01B2201/90

Abstract: The present invention generally includes an ozone generation system with a power supply that measures the rate of energy delivered to the ozone generation cell. While changing voltage, frequency or current will likely affect the rate of energy delivery, current, frequency and voltage provide a very poor and unreliable control for an ozone generation cell. It is only through control of the rate of energy delivery that consistent, reliable ozone generation is possible. Based upon the measurements of the rate of energy delivery as measured at the ozone generation cell, compared to the rate of energy delivery supplied, the rate of energy delivery supplied can be adjusted to improve ozone production and control.

Abstract translation: 本发明通常包括具有测量传送到臭氧发生单元的能量速率的电源的臭氧发生系统。 在改变电压，频率或电流的同时，可能会影响能量传递速率，电流，频率和电压对于臭氧发生单元来说是非常糟糕和不可靠的控制。 只有通过控制能量输送速率，才能实现一致可靠的臭氧发生。 基于在臭氧发生单元处测量的能量传递速率的测量值，与提供的能量传递速率相比，可以调节供应的能量传送速率以改善臭氧的产生和控制。

公开(公告)号：US08480862B2

公开(公告)日：2013-07-09

申请号：US13008641

申请日：2011-01-18

Applicant: Vitaly J. Berkman ,  Thomas J. Ryan

Inventor： Vitaly J. Berkman ,  Thomas J. Ryan

IPC: B01J19/08 ,  G01F15/04

CPC classification number: C01B13/11 ,  C01B2201/40 ,  C01B2201/64 ,  C01B2201/90 ,  G05D11/138 ,  Y10T137/0318

Abstract: An improved system and method for controlling ozone concentration in connection with a multi-chamber tool. The system and method involve a first and a second concentration controller in combination with an ozone generator. The first concentration controller detects an EVENT (i.e., one of the chambers in the multi-chamber tool coming on-line or off-line) and in response provides a power instruction to the ozone generator in accordance with a predictive control algorithm. The first concentration controller has a fast (i.e, about 1 second) response time. The second concentration controller is masked from the ozone generator during the EVENT, but otherwise controls the generator after an interval of time has lapsed after the EVENT. The second concentration controller has a slower response time than the first concentration controller, however the second concentration controller provides the system with long-term stability and can be used to provide updated data to the predictive control algorithm.

Abstract translation: 一种用于控制与多室工具相关的臭氧浓度的改进的系统和方法。 该系统和方法涉及与臭氧发生器组合的第一和第二浓度控制器。 第一集中控制器检测EVENT（即，多室工具中的一个室内进行在线或离线），并且响应于根据预测控制算法向臭氧发生器提供功率指令。 第一个浓度控制器具有快速（即约1秒）响应时间。 在EVENT期间，第二个浓度控制器被从臭氧发生器屏蔽，但是在EVENT之后经过了一段时间后才控制发电机。 第二浓度控制器具有比第一浓度控制器更慢的响应时间，然而第二浓度控制器为系统提供长期稳定性，并且可以用于向预测控制算法提供更新的数据。

公开(公告)号：US08400788B2

公开(公告)日：2013-03-19

申请号：US12520495

申请日：2007-12-17

Applicant: Mikael Hansson

Inventor： Mikael Hansson

IPC: H02M3/335

CPC classification number: C01B13/11 ,  C01B13/115 ,  C01B2201/64 ,  C01B2201/90 ,  H01F27/24 ,  H02M7/5381 ,  Y02B70/1441 ,  Y02P20/121

Abstract: The invention provides a power supply apparatus for supplying electric power to a capacitive load. The apparatus has a transformer, a positive half-period driver and a negative half-period driver supplying positive and negative half-periods of voltage to the first coil. The second coil forms an electric resonance circuit and supplies electric voltage to the load. Zero crossings of the voltage supplied to the first coil are determined from a third coil on the transformer, and alternation between positive and negative half-periods of voltage supplied to the first coil is done at the zero crossings of the voltage supplied to the first coil.

Abstract translation: 本发明提供了一种用于向电容性负载提供电力的电源装置。 该装置具有变压器，正半周期驱动器和负半周期驱动器，向第一线圈提供正半周期和负半周期的电压。 第二线圈形成电谐振电路并向负载提供电压。 提供给第一线圈的电压的零交叉由变压器上的第三线圈确定，并且在提供给第一线圈的电压的正和负半周期之间的交替在提供给第一线圈的电压的过零点处进行 。

公开(公告)号：US08372345B2

公开(公告)日：2013-02-12

申请号：US12806778

申请日：2010-08-20

Applicant: Wayne Wolf

Inventor： Wayne Wolf

IPC: B01J19/08

CPC classification number: B01J19/088 ,  B01J2219/0809 ,  B01J2219/083 ,  B01J2219/0849 ,  B01J2219/0875 ,  C01B13/11 ,  C01B2201/14 ,  C01B2201/62 ,  C01B2201/90

Abstract: An ozone generating apparatus includes a base container for holding water, and a head assembly connected to the upper edge of the base container, the head assembly containing a plurality of ozone generating cells each having a dielectric tube and an electrode assembly coaxially disposed within the associated dielectric tube. The dielectric tubes and electrode assemblies are disposed and connected such that the tube and/or electrode assembly of each ozone generating cell can be accessed independently of all other ozone generating cells, and such that the possibility of cascade failure of all remaining ozone generating cells upon failure of a single cell is substantially eliminated. The base container is provided with a process back flood prevention structure to protect the ozone generating cells.

Abstract translation: 臭氧发生装置包括用于保持水的基底容器和连接到基底容器的上边缘的头部组件，头部组件包含多个臭氧发生电池，每个臭氧发生电池均具有介电管和电极组件，电极组件同轴地设置在相关联的 电介质管。 电介质管和电极组件被布置和连接，使得每个臭氧发生电池的管和/或电极组件可以独立于所有其它臭氧发生电池进行访问，并且使得所有剩余的产生臭氧的电池的级联失效的可能性 基本上消除了单个电池的故障。 基础容器设置有防过程防洪结构，用于保护臭氧发生电池。

公开(公告)号：US20120219460A1

公开(公告)日：2012-08-30

申请号：US13508233

申请日：2010-09-06

Applicant: Yujiro Okihara ,  Yoichiro Tabata ,  Noriyuki Nakamura ,  Tetsuya Saitsu ,  Hatsuo Yotsumoto ,  Nobuyuki Itoh

Inventor： Yujiro Okihara ,  Yoichiro Tabata ,  Noriyuki Nakamura ,  Tetsuya Saitsu ,  Hatsuo Yotsumoto ,  Nobuyuki Itoh

IPC: B01J7/00

CPC classification number: B01J19/088 ,  B01J2219/0805 ,  C01B13/11 ,  C01B2201/64 ,  C01B2201/76 ,  C01B2201/90

Abstract: An object of the present invention is to provide a downsized ozone generation unit including control means having plurality of means for outputting an ozone gas, and the ozone generation unit. In the present invention, a gas pipe integrated block (30) has a plurality of internal pipe paths (R30a to R30f). The plurality of internal pipe paths are connected to an ozone generator (1), control means (an MFC (3), a gas filter (51), and an APC (4)), a raw gas supply port (14), an ozone gas output port (15), and cooling water inlet/outlet ports (13A, 13B), to thereby form a unit in which a raw gas input pipe path and an ozone gas output pipe path are integrated. The raw gas input pipe path extends from the raw gas supply port through the APC to the ozone gas generator. The ozone gas output pipe path extends from the ozone generator through the gas filter, the ozone concentration meter 5, and the MFC 3, to the ozone gas output port.

Abstract translation: 本发明的目的是提供一种具有多个输出臭氧气体的装置的控制装置和臭氧发生装置的小型臭氧发生装置。 在本发明中，气体管一体化块（30）具有多个内管路（R30a〜R30f）。 多个内部管路连接到臭氧发生器（1），控制装置（MFC（3），气体过滤器（51）和APC（4）），原料气体供给口（14）， 臭氧气体输出口（15）和冷却水入口/出口（13A，13B），从而形成原料气体输入管路和臭氧气体输出管路一体化的单元。 原料气体输入管道从原料气体供给口通过APC延伸到臭氧气体发生器。 臭氧气体输出管道从臭氧发生器通过气体过滤器，臭氧浓度计5和MFC 3延伸到臭氧气体输出口。

公开(公告)号：US20110268621A1

公开(公告)日：2011-11-03

申请号：US12806778

申请日：2010-08-20

Applicant: Wayne Wolf

Inventor： Wayne Wolf

IPC: B01J19/08

CPC classification number: B01J19/088 ,  B01J2219/0809 ,  B01J2219/083 ,  B01J2219/0849 ,  B01J2219/0875 ,  C01B13/11 ,  C01B2201/14 ,  C01B2201/62 ,  C01B2201/90

Abstract: An ozone generating apparatus includes a base container for holding water, and a head assembly connected to the upper edge of the base container, the head assembly containing a plurality of ozone generating cells each having a dielectric tube and an electrode assembly coaxially disposed within the associated dielectric tube. The dielectric tubes and electrode assemblies are disposed and connected such that the tube and/or electrode assembly of each ozone generating cell can be accessed independently of all other ozone generating cells, and such that the possibility of cascade failure of all remaining ozone generating cells upon failure of a single cell is substantially eliminated. The base container is provided with a process back flood prevention structure to protect the ozone generating cells.

Abstract translation: 臭氧发生装置包括用于保持水的基底容器和连接到基底容器的上边缘的头部组件，头部组件包含多个臭氧发生电池，每个臭氧发生电池均具有介电管和电极组件，电极组件同轴地设置在相关联的 电介质管。 电介质管和电极组件被布置和连接，使得每个臭氧发生电池的管和/或电极组件可以独立于所有其它臭氧发生电池进行访问，并且使得所有剩余的臭氧发生电池的级联失效的可能性 基本上消除了单个电池的故障。 基础容器设置有防过程防洪结构，用于保护臭氧发生电池。

公开(公告)号：US20100322844A1

公开(公告)日：2010-12-23

申请号：US12820413

申请日：2010-06-22

Applicant: Hiroshi SANUI ,  Yoshiki Nishiwaki

Inventor： Hiroshi SANUI ,  Yoshiki Nishiwaki

IPC: C01B13/10 ,  B01J19/00

CPC classification number: C01B13/11 ,  C01B2201/64 ,  C01B2201/80 ,  C01B2201/90

Abstract: An ozone supplier 11 of the present invention includes a mixer 1 which dissolves an oxygen-ozone mixed gas in a fluorine-based solvent to produce a mixed solution, an undissolved gas removing device 2 which removes an undissolved gas from the mixed solution, and a deaerator 3 which extracts an ozone-containing gas, which is dissolved in the mixed solution subjected to removal of the undissolved gas, from the mixed solution.

Abstract translation: 本发明的臭氧供给装置11具备将氟系溶剂中的氧 - 臭氧混合气体溶解而制成混合溶液的混合器1，从混合溶液中除去未溶解气体的未溶解气体除去装置2， 脱气器3从混合溶液中提取溶解在去除未溶解气体的混合溶液中的含臭氧气体。