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    Monochromator comprising vibration resistant moveable optical elements
    171.
    发明授权
    Monochromator comprising vibration resistant moveable optical elements 有权
    单色器包括抗振可移动光学元件

    公开(公告)号：US09551615B2

    公开(公告)日：2017-01-24

    申请号：US14732170

    申请日：2015-06-05

    Applicant: TECAN Trading AG

    Inventor： Lutz Niggl ,  Andreas Steinbacher

    IPC: G01J3/12 ,  G01J3/18 ,  G01J3/06 ,  G01N21/25 ,  G01N21/64

    CPC classification number: G01J3/18 ,  G01J3/06 ,  G01J2003/062 ,  G01N21/255 ,  G01N21/64 ,  G01N2201/0635

    Abstract: A monochromator has at least one optical grating which is rotatable in relation to incident light of a source of light, a drive unit to rotate the optical grating by a connected drive rod around a longitudinal axis, and a control unit to control the drive unit and thereby the rotation of the optical grating. The drive unit further has a first damping element with at least one electrical conductive surface, and a second damping element which provides at least one magnetic field having a magnetic axis which penetrates the electrical conductive surface. One of the first and second damping elements is fixed to the drive rod and is rotatable along with the drive rod around the longitudinal axis thereof in relation to the other one of the second or first damping element.

    Abstract translation: 单色仪具有至少一个相对于光源的入射光可旋转的光栅;驱动单元，用于通过连接的驱动杆围绕纵轴旋转光栅;以及控制单元，用于控制驱动单元和 从而光栅的旋转。 驱动单元还具有带有至少一个导电表面的第一阻尼元件和提供至少一个具有穿过导电表面的磁轴的磁场的第二阻尼元件。 第一和第二阻尼元件中的一个被固定到驱动杆，并且可以与驱动杆一起围绕其纵向轴线相对于第二或第一阻尼元件中的另一个旋转。

    System and Method for Oblique Incidence Scanning with 2D Array of Spots
    172.
    发明申请
    System and Method for Oblique Incidence Scanning with 2D Array of Spots 有权
    用2D阵列进行倾斜扫描的系统和方法

    公开(公告)号：US20160327493A1

    公开(公告)日：2016-11-10

    申请号：US14982747

    申请日：2015-12-29

    Applicant: KLA-Tencor Corporation

    Inventor： Jamie M. Sullivan ,  Yevgeniy Churin

    IPC: G01N21/88 ,  G02B5/32 ,  G02B27/12 ,  G02F1/33 ,  G02B27/10 ,  G01N21/95 ,  G02B26/12

    CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N2201/0635 ,  G01N2201/104 ,  G01N2201/105 ,  G01N2201/106 ,  G02B26/101 ,  G02B27/1086 ,  G02B27/123 ,  G02F1/33

    Abstract: A system to generate multiple beam lines in an oblique angle multi-beam spot scanning wafer inspection system includes a beam scanning device configured to scan a beam of illumination, an objective lens oriented at an oblique angle relative to the surface of a sample and with an optical axis perpendicular to a first scanning direction on the sample, and one or more optical elements positioned between the objective lens and the beam scanning device. The one or more optical elements split the beam into two or more offset beams such that the two or more offset beams are separated in a least a second direction perpendicular to the first direction. The one or more optical elements further modify the phase characteristics of the two or more offset beams such that the two or more offset beams are simultaneously in focus on the sample during a scan.

    Abstract translation: 在斜角多光束点扫描晶片检查系统中产生多个光束线的系统包括：束扫描装置，被配置为扫描照射束;物镜相对于样品的表面以倾斜角度定向;以及 垂直于样品上的第一扫描方向的光轴和位于物镜和束扫描装置之间的一个或多个光学元件。 一个或多个光学元件将光束分成两个或更多个偏移光束，使得两个或更多个偏移光束在垂直于第一方向的至少第二方向上分离。 一个或多个光学元件进一步修改两个或多个偏移光束的相位特性，使得两个或更多个偏移光束在扫描期间同时聚焦在样本上。

    GLASS SHEET ACQUISITION AND POSITIONING MECHANISM FOR AN INLINE SYSTEM FOR MEASURING THE OPTICAL CHARACTERISTICS OF A GLASS SHEET
    174.
    发明申请
    GLASS SHEET ACQUISITION AND POSITIONING MECHANISM FOR AN INLINE SYSTEM FOR MEASURING THE OPTICAL CHARACTERISTICS OF A GLASS SHEET 有权
    用于测量玻璃板的光学特性的在线系统的玻璃板采集和定位机构

    公开(公告)号：US20150308943A1

    公开(公告)日：2015-10-29

    申请号：US14264231

    申请日：2014-04-29

    Applicant: GLASSTECH, INC.

    Inventor： Michael J. VILD ,  Stephen D. SNYDER, JR.

    IPC: G01N21/13 ,  G01N21/958 ,  G01N21/956

    CPC classification number: G01N21/958 ,  G01N21/896 ,  G01N2021/9586 ,  G01N2201/0635

    Abstract: A glass sheet acquisition and positioning mechanism and associated method are utilized in an in-line glass sheet optical inspection system. The mechanism includes an exterior support frame mounted in proximity to one of the glass sheet processing system conveyors, and an interior support frame operably connected to the exterior support frame such that the interior support frame may be selectively positioned from its first orientation to a second orientation whereby the retained glass sheet is positioned between the camera and the screen at a preselected position. The interior support frame is also operably connected to the exterior support frame to provide for positioning of the interior support frame to a third orientation in which the glass sheet is released from the interior support frame for continued movement on the conveyor. An in-line glass sheet optical inspection system incorporating the glass sheet acquisition and positioning mechanism is also disclosed.

    Abstract translation: 一种玻璃板采集和定位机构及相关方法用于直列玻璃板光学检测系统。 该机构包括安装在玻璃板处理系统输送机之一附近的外部支撑框架和可操作地连接到外部支撑框架的内部支撑框架，使得内部支撑框架可以从其第一取向选择性地定位到第二取向 从而保留的玻璃板在预选位置处定位在相机和屏幕之间。 内部支撑框架还可操作地连接到外部支撑框架以提供将内部支撑框架定位到第三取向，其中玻璃板从内部支撑框架释放以在输送机上继续移动。 还公开了一种并入玻璃板采集和定位机构的在线玻璃板光学检查系统。

    Device and method for acquiring information on objective substance to be detected by detecting a change of wavelength characteristics on the optical transmittance
    177.
    发明授权
    Device and method for acquiring information on objective substance to be detected by detecting a change of wavelength characteristics on the optical transmittance 有权
    通过检测光透射率上的波长特性的变化来获取关于要检测的物质的信息的装置和方法

    公开(公告)号：US07944564B2

    公开(公告)日：2011-05-17

    申请号：US12642446

    申请日：2009-12-18

    Applicant: Norihiko Utsunomiya ,  Mitsuro Sugita ,  Satoru Nishiuma ,  Takao Yonehara

    Inventor： Norihiko Utsunomiya ,  Mitsuro Sugita ,  Satoru Nishiuma ,  Takao Yonehara

    IPC: G01N22/00

    CPC classification number: G01N21/554 ,  G01N21/648 ,  G01N2021/258 ,  G01N2201/0635 ,  G01N2201/0636

    Abstract: An information-acquiring device for acquiring information on an objective substance to be detected, which is provided with a sensing element that has a surface capable of fixing the objective substance to be detected thereon, and makes applied light change its wavelength characteristics in response to the fixed state of the objective substance to be detected onto the surface, a light source, and light-receiving means for receiving light emitted from the light source through the sensing element, has the light-receiving means and the light source arranged on the same substrate so that the light which has been emitted from the light source and has been transmitted through the sensing element can be led to the light-receiving means, and has means for varying the wavelength regions of each light incident on each of a plurality of the light-receiving means installed in an optical path from the light source to the light-receiving means.

    Abstract translation: 一种信息获取装置，用于获取关于待检测的物质的信息，该信息获取装置设置有具有能够固定待检测的物体的表面的感测元件，并且使得施加的光响应于该检测元件的波长特性而改变其 要检测的目标物质的固定状态，光源和用于接收通过感测元件从光源发射的光的光接收装置，其中光接收装置和光源布置在同一基板上 使得已经从光源发射并已经透射通过感测元件的光可以被引导到光接收装置，并且具有用于改变入射到多个光中的每一个的每个光的波长区域的装置 - 接收装置安装在从光源到光接收装置的光路中。

    DEVICE AND METHOD FOR ACQUIRING INFORMATION ON OBJECTIVE SUBSTANCE TO BE DETECTED BY DETECTING A CHANGE OF WAVELENGTH CHARACTERISTICS ON THE OPTICAL TRANSMITTANCE
    178.
    发明申请
    DEVICE AND METHOD FOR ACQUIRING INFORMATION ON OBJECTIVE SUBSTANCE TO BE DETECTED BY DETECTING A CHANGE OF WAVELENGTH CHARACTERISTICS ON THE OPTICAL TRANSMITTANCE 有权
    通过检测光学传输波长特性的变化来获取有关物体的信息的设备和方法

    公开(公告)号：US20100097612A1

    公开(公告)日：2010-04-22

    申请号：US12642446

    申请日：2009-12-18

    Applicant: Norihiko Utsunomiya ,  Mitsuro Sugita ,  Satoru Nishiuma ,  Takao Yonehara

    Inventor： Norihiko Utsunomiya ,  Mitsuro Sugita ,  Satoru Nishiuma ,  Takao Yonehara

    IPC: G01N21/55

    CPC classification number: G01N21/554 ,  G01N21/648 ,  G01N2021/258 ,  G01N2201/0635 ,  G01N2201/0636

    Abstract: An information-acquiring device for acquiring information on an objective substance to be detected, which is provided with a sensing element that has a surface capable of fixing the objective substance to be detected thereon, and makes applied light change its wavelength characteristics in response to the fixed state of the objective substance to be detected onto the surface, a light source, and light-receiving means for receiving light emitted from the light source through the sensing element, has the light-receiving means and the light source arranged on the same substrate so that the light which has been emitted from the light source and has been transmitted through the sensing element can be led to the light-receiving means, and has means for varying the wavelength regions of each light incident on each of a plurality of the light-receiving means installed in an optical path from the light source to the light-receiving means.

    Abstract translation: 一种信息获取装置，用于获取关于待检测的物质的信息，该信息获取装置设置有具有能够固定待检测的物体的表面的感测元件，并且使得施加的光响应于该检测元件的波长特性而改变其 要检测的目标物质的固定状态，光源和用于接收通过感测元件从光源发射的光的光接收装置，其中光接收装置和光源布置在同一基板上 使得已经从光源发射并已经透射通过感测元件的光可以被引导到光接收装置，并且具有用于改变入射到多个光中的每一个的每个光的波长区域的装置 - 接收装置安装在从光源到光接收装置的光路中。

    Process and Devices for Optically Sensing a Specimen with a Large Depth of Field
    179.
    发明申请
    Process and Devices for Optically Sensing a Specimen with a Large Depth of Field 有权
    用于光学感测具有大景深的样本的工艺和设备

    公开(公告)号：US20090159800A1

    公开(公告)日：2009-06-25

    申请号：US12088610

    申请日：2006-09-14

    Applicant: Ralf Wolleschensky

    Inventor： Ralf Wolleschensky

    IPC: G01N21/64

    CPC classification number: G01N21/6458 ,  G01N2021/1782 ,  G01N2021/1787 ,  G01N2201/0635 ,  G02B21/008

    Abstract: A device for optically sensing a specimen with a large depth of field has a lighting module which illuminates a zone of the specimen during a predetermined measurement period with a pattern whose phase is modified in time during the measurement period, generating a specimen light to which a corresponding time-variable phase is imparted. The device also includes a detection module having a space-resolving detection zone which records the specimen zone and has multiple recording pixels, two analysis channels which can be connected to the recording pixels, and an analysis unit is connected to both analysis channels. A control unit is provided which, during the measurement period, connects each recording pixel in synchrony with the phase of the detected specimen light to the two analysis channels, alternatively, in such a way that the detected specimen light is divided into two portions phased in relation to one another, and the analysis unit calculates an optical split-image of the specimen zone on the basis of the two phased portions supplied to the analysis channels.

    Abstract translation: 用于光学感测具有大景深的样本的装置具有照明模块，其在预定测量周期期间以在测量周期内的相位被修改的图案照亮样本的区域，产生样本光，其中， 给予相应的时变相位。 该装置还包括具有记录样本区域并具有多个记录像素的空间分辨检测区域的检测模块，可连接到记录像素的两个分析通道，并且分析单元连接到两个分析通道。 提供了一种控制单元，其在测量期间将每个记录像素与检测到的样本光的相位同步地连接到两个分析通道，或者以这样一种方式将检测到的样本光分为两部分 并且分析单元基于提供给分析通道的两个相位部分来计算样本区域的光学分割图像。

    Optical Inspection Of Test Surfaces
    180.
    发明申请
    Optical Inspection Of Test Surfaces 有权
    测试表面的光学检测

    公开(公告)号：US20090116023A1

    公开(公告)日：2009-05-07

    申请号：US11576470

    申请日：2005-10-05

    Applicant: Sipke Wadman

    Inventor： Sipke Wadman

    IPC: G01N21/47 ,  G01B11/24

    CPC classification number: G01N21/8806 ,  G01N21/4738 ,  G01N2021/4735 ,  G01N2201/0635

    Abstract: In one aspect, the amount of data needed to store image intensity data obtained from a scatterometer (100) such as a Parousiameter is reduced by varying a resolution with which the intensity data is used in different regions of a grid according to determined variations in the intensity. In another aspect, a scatterometer is provided with an aspherical mirror (170, 900, 1000) for imaging a test sample (180) to correct for distortions introduced by the off center placement of the mirror relative to the test sample. In another aspect, an optical surface inspection apparatus uses an auxiliary lens (1440) between a test surface (1420) and an illuminated patterned grid (1410) to project the patterned grid (1610) on the test surface. A camera (1450) is focused on the grid on the test surface as a real image.

    Abstract translation: 在一个方面，存储从诸如Parousiameter之类的散射仪（100）获得的图像强度数据所需的数据量减少，通过改变在网格的不同区域中使用强度数据的分辨率 强度。 在另一方面，散射仪设置有非球面镜（170,900,1000），用于对测试样品（180）进行成像，以校正由反射镜相对于测试样品的离心放置引入的失真。 在另一方面，光学表面检查设备使用测试表面（1420）和照明图案格栅（1410）之间的辅助透镜（1440）将图案化网格（1610）投影在测试表面上。 相机（1450）作为真实图像聚焦在测试表面上的网格上。

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