THERMALLY ACTUATED RF MICROELECTROMECHANICAL SYSTEMS SWITCH
    181.
    发明申请
    THERMALLY ACTUATED RF MICROELECTROMECHANICAL SYSTEMS SWITCH 审中-公开
    热电激光微电子系统开关

    公开(公告)号:US20110063068A1

    公开(公告)日:2011-03-17

    申请号:US12828268

    申请日:2010-06-30

    Abstract: A radio frequency (RF) micro electromechanical system (MEMS) switch formed on a substrate (e.g., a CMOS substrate). The RF MEMS switch includes a micromechanical member including a flexible switch membrane configured to move between an on state and an off state of the RF MEMS switch. The flexible switch membrane includes a first set of fingers on a sidewall thereof to be vertically coupled with a second set of fingers formed at an output of the RF MEMS switch on the substrate, and an actuation member in operable communication with the micromechanical member and configured to thermally actuate the micromechanical member such that the first set of fingers electrically couple with the second set of fingers upon thermal actuation of the micromechanical member to enable transmission of an RF signal.

    Abstract translation: 形成在基板(例如CMOS基板)上的射频(RF)微机电系统(MEMS)开关。 RF MEMS开关包括微机械构件,其包括被配置为在RF MEMS开关的导通状态和断开状态之间移动的柔性开关膜。 柔性开关膜包括在其侧壁上的第一组指状物,以与形成在基板上的RF MEMS开关的输出端处的第二组指状件垂直耦合,以及与微机械构件可操作地连通的致动构件, 以热致动所述微机械构件,使得所述第一组指状件在所述微机械构件的热致动时与所述第二组指状物电耦合以使得能够传输RF信号。

    MICROMECHANICAL ACTUATOR
    182.
    发明申请
    MICROMECHANICAL ACTUATOR 审中-公开
    微电子执行器

    公开(公告)号:US20110006874A1

    公开(公告)日:2011-01-13

    申请号:US12919618

    申请日:2009-02-23

    Abstract: A micromechanical actuator includes a movable first spring element having metal and/or silicon. The first spring element is fitted at a first point and can move freely at a second point. A second spring element connected to the first spring element has silicon and is partially arranged on an electrically insulating material which is applied to a substrate. The second spring element is arranged at a distance from the substrate above the substrate on a first plane, and the first spring element is arranged above the second spring element on a second plane which is at a distance from the first plane such that the first and second spring elements can move with respect to the substrate. The actuator has a third spring element which is mechanically coupled to the first spring element. The elastic deformation of the second spring element can be induced by a length change of the third spring element.

    Abstract translation: 微机械致动器包括具有金属和/或硅的可移动的第一弹簧元件。 第一弹簧元件安装在第一点上,并可在第二点自由移动。 连接到第一弹簧元件的第二弹簧元件具有硅并且部分地布置在施加到基板的电绝缘材料上。 第二弹簧元件在第一平面上与衬底上方的基板一定距离设置,并且第一弹簧元件布置在第二平面上方的第二平面上,第二平面与第一平面成一定距离,使得第一和 第二弹簧元件可以相对于基底移动。 致动器具有机械地联接到第一弹簧元件的第三弹簧元件。 第二弹簧元件的弹性变形可以由第三弹簧元件的长度变化引起。

    RECONFIGURABLE LITHOGRAPHIC STRUCTURES
    183.
    发明申请
    RECONFIGURABLE LITHOGRAPHIC STRUCTURES 有权
    可重构光刻结构

    公开(公告)号:US20100326071A1

    公开(公告)日:2010-12-30

    申请号:US12864942

    申请日:2009-03-06

    Abstract: A lithographically structured device has an actuation layer and a control layer operatively connected to the actuation layer. The actuation layer includes a stress layer and a neutral layer that is constructed of materials and with a structure such that it stores torsional energy upon being constructed. The control layer is constructed to maintain the actuation layer substantially in a first configuration in a local environmental condition and is responsive to a change in the local environmental condition such that it permits a release of stored torsional energy to cause a change in a structural configuration of the lithographically structured device to a second configuration, the control layer thereby providing a trigger mechanism. The lithographically structured device has a maximum dimension that is less than about 10 mm when it is in the second configuration.

    Abstract translation: 光刻结构的器件具有可操作地连接到致动层的致动层和控制层。 致动层包括应力层和中性层,其由材料构成,并具有在构造时存储扭转能的结构。 控制层被构造成在局部环境条件下将致动层基本上保持在第一构型中并且响应于局部环境条件的改变,使得其允许释放存储的扭转能量以引起结构构造的变化 光刻结构的设备到第二配置,控制层由此提供触发机构。 光刻结构的装置在其处于第二构型时的最大尺寸小于约10mm。

    MEMS ACTUATOR
    184.
    发明申请
    MEMS ACTUATOR 有权
    MEMS执行器

    公开(公告)号:US20090085699A1

    公开(公告)日:2009-04-02

    申请号:US11904949

    申请日:2007-09-29

    Abstract: Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.

    Abstract translation: 包括靠近推进器组件的基底,推动器组件和屈肌组件的装置。 推动器组件包括冷热推杆。 冷热推杆的第一端锚固在基板上。 冷热推杆的第二端连接在一起并悬挂在基板上横向移位。 弯曲组件包括屈肌臂和具有致动器接触的导体。 屈肌臂的第一端锚固在基底上。 推动器组件被构造成使得屈肌臂的第二端和致动器接触的横向位移在基底上。 方法包括提供装置并使得推动器组件横向移动屈肌臂的第二端和致动器接触在基底上。

    THERMOMECHANICAL IN-PLANE MICROACTUATOR
    188.
    发明申请
    THERMOMECHANICAL IN-PLANE MICROACTUATOR 有权
    温度计平面微粉碎机

    公开(公告)号:US20040074234A1

    公开(公告)日:2004-04-22

    申请号:US10312172

    申请日:2002-12-18

    Abstract: A microactuator (10) providing an output force and displacement in response to an increase in thermal energy is disposed. The microactuator (10) may have a substantially straight expansion member (20, 22) with a first and a second end. The first end may be coupled to a base (12, 16) and a second end may be coupled to a shuttle (24). The expansion member is capable of elongating in a elongation direction. Elongation of the expansion member may urge the shuttle to translate in an output than the elongation direction. In certain embodiments, multiple expansion members are arrayed along one side of the shuttle to drive the shuttle against a surface. Alternatively, expansion members may be disposed on both sides of the shuttle to provide balanced output force. If desired, multiple microactuators may be linked together to multiply the output displacement and/or output force.

    Abstract translation: 设置提供输出力和响应于热能增加的位移的微致动器(10)。 微致动器(10)可以具有带有第一和第二端的基本直的膨胀构件(20,22)。 第一端可以联接到基座(12,16),并且第二端可以联接到梭子(24)。 膨胀构件能够在伸长方向上伸长。 膨胀构件的伸长可以促使梭在比伸长方向的输出中平移。 在某些实施例中,多个膨胀构件沿梭子的一侧排列以驱动穿梭件抵靠表面。 或者,扩展构件可以设置在梭子的两侧以提供平衡的输出力。 如果需要,多个微致动器可以连接在一起以乘以输出位移和/或输出力。

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