Abstract:
A silica glass containing TiO2, which has a fictive temperature of at most 1,200° C., a F concentration of at least 100 ppm and a coefficient of thermal expansion of 0±200 ppb/° C. from 0 to 100° C.A process for producing a silica glass containing TiO2, which comprises a step of forming a porous glass body on a target quartz glass particles obtained by flame hydrolysis of glass-forming materials, a step of obtaining a fluorine-containing porous glass body, a step of obtaining a fluorine-containing vitrified glass body, a step of obtaining a fluorine-containing formed glass body and a step of carrying out annealing treatment.
Abstract:
In the nanoimprint lithography, a titania-doped quartz glass having a CTE of −300 to 300 ppb/° C. between 0° C. and 250° C. and a CTE distribution of up to 100 ppb/° C. at 25° C. is suited for use as nanoimprint molds.
Abstract:
Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements and extreme ultraviolet elements are also disclosed.
Abstract:
It is to provide a silica glass containing TiO2, having a wide temperature range wherein the coefficient of thermal expansion is substantially zero.A silica glass containing TiO2, which has a TiO2 concentration of from 3 to 10 mass %, a OH group concentration of at most 600 mass ppm and a Ti3+ concentration of at most 70 mass ppm, characterized by having a fictive temperature of at most 1,200° C., a coefficient of thermal expansion from 0 to 100° C. of 0±150 ppb/° C., and an internal transmittance T400-700 per 1 mm thickness in a wavelength range of from 400 to 700 nm of at least 80%. A process for producing a silica glass containing TiO2, which comprises porous glass body formation step, F-doping step, oxygen treatment step, densification step and vitrification step.
Abstract:
A silica glass containing TiO2, which has a fictive temperature of at most 1,200° C., an OH group concentration of at most 600 ppm and a coefficient of thermal expansion of 0±200 ppb/° C. from 0 to 100° C.
Abstract:
A silica glass containing from 3 to 10 mass % of TiO2, which has a coefficient of thermal expansion from 0 to 100° C., i.e. CTE0 to 100, of 0±300 ppb/° C. and an internal transmittance per mm in thickness within a wavelength region of from 200 to 700 nm, i.e. T200 to 700, of at most 80%.
Abstract:
The invention discloses an SiO2—TiO2 glass, which is preferably made by flame-hydrolysis and which distinguishes itself by increased resistance to radiation, especially in connection with EUV lithography. By purposefully reducing the hydrogen content, clearly improved resistance to radiation and reduced shrinking is achieved.
Abstract:
A fluorine-doped at least ternary silicate glass is disclosed which contains in particular TiO2. It can advantageously be used as a material having a low thermal expansion, wherein the slope of the coefficient of thermal expansion dCTE/T is ±2·109/K2 in the temperature range from −50° C. to 100° C. This material is particularly suited for micro-lithography, in particular for EUV-lithography.
Abstract translation:公开了一种掺氟的至少三元硅酸盐玻璃,其特别包含TiO 2。 它可以有利地用作具有低热膨胀性的材料,其中热膨胀系数dCTE / T的斜率在±2.10℃/ K 2℃的温度 范围为-50℃至100℃。该材料特别适用于微光刻,特别适用于EUV光刻。
Abstract:
This invention relates to production of high purity fused silica glass doped with titania using titanium chelates. Useful chelates include titanium acetylacetonate, and titanium ethyl acetoacetate among others.
Abstract:
The invention provides a process of obtaining a gradient index type of optical element with profiles of first and second metal component concentrations by the sol-gel method. The process of fabricating a gradient index type of optical element comprises steps of dipping a silicon component-containing wet gel prepared by the sol-gel method in a solution containing an alkoxide of at least one metal component selected from a first group consisting of Ti, Nb, Ta, and Zr or a derivative thereof to thereby impart to the wet gel a concentration gradient with a concentration of the first metal component decreasing from a periphery to a center of the wet gel, allowing at least one metal component selected from a second group consisting of Ba, La, Y, Gd, Sr, Ca, and Zn to be dissolved out of the wet gel to thereby impart to the wet gel a concentration gradient with a concentration of the second metal component increasing from the periphery to the center of the wet gel, and drying, and firing the wet gel.