公开(公告)号：WO2013024650A1

公开(公告)日：2013-02-21

申请号：PCT/JP2012/067692

申请日：2012-07-11

Applicant: オリンパス株式会社 ,  田邊哲也 ,  山口光城

Inventor： 田邊哲也 ,  山口光城

IPC: G01N21/64

CPC classification number: G01N21/64 ,  G01N15/14 ,  G01N15/1429 ,  G01N15/1434 ,  G01N21/51 ,  G01N21/6408 ,  G01N21/645 ,  G01N21/6452 ,  G01N21/6458 ,  G01N21/6486 ,  G01N2021/6419 ,  G01N2021/6441 ,  G01N2201/103 ,  G01N2201/105 ,  G02B21/0032 ,  G02B21/0076 ,  G02B21/008

Abstract: 共焦点顕微鏡又は多光子顕微鏡を用いて試料溶液中の発光粒子の光を検出する走査分子計数法に於いて、できるだけ同一の発光粒子を別の粒子として検出する可能性を低く、且つ、光検出領域の寸法や形状ができるだけ変化しない態様にて、より広い領域又はより長い距離の経路に沿って光検出領域を移動して試料溶液内の走査を可能にする光分析技術が提供される。本発明による光分析技術では、試料溶液内に於いて第一の経路に沿って位置が移動する第二の経路に沿って光検出領域の位置が移動される間に光検出領域からの光の検出と時系列の光強度データの生成が為され、時系列の光強度データを用いて所定経路内に存在する各発光粒子からの光を表す信号が個別に検出される。

Abstract translation: 提供了在使用共聚焦显微镜或多光子显微镜检测样品溶液中的发光粒子的光的扫描分子计数法中，尽可能地减少检测出相同的发光粒子的可能性的光度分析技术 作为不同的粒子，并且在光检测区域的尺寸和形状尽可能地变化的实施例中，能够通过沿较宽的区域或具有较长距离的路径移动光检测区域来扫描样品溶液。 在这种光度分析技术中，在样品溶液中，当光检测区域的位置沿其第一路径移动的第二路径移动时，检测来自光检测区域的光并且测定时间序列光强度 生成数据，并且使用时间序列光强度数据，分别检测指示来自规定路径内的发光粒子的光的信号。

公开(公告)号：WO2005121724A3

公开(公告)日：2006-12-28

申请号：PCT/US2005001585

申请日：2005-01-20

Applicant: OPTICAL INSIGHTS LLC

Inventor： HOPKINS MARK F ,  SABHARWAL YASHVINDER ,  VERNOLD CYNTHIA

IPC: G01J3/42 ,  G01J1/58 ,  G01J3/04 ,  G01J3/10 ,  G01J3/18 ,  G01J3/28 ,  G01J3/30 ,  G01J3/36 ,  G01N21/64 ,  G02B21/26

CPC classification number: G01N21/6458 ,  G01J3/0202 ,  G01J3/0229 ,  G01J3/0235 ,  G01J3/0237 ,  G01J3/024 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/10 ,  G01J3/2823 ,  G01J3/2889 ,  G01J3/36 ,  G01N2021/6423 ,  G01N2021/6463 ,  G01N2021/6471 ,  G01N2201/024 ,  G01N2201/10 ,  G01N2201/103 ,  G02B21/26

Abstract: A method and apparatus is disclosed for multi-mode spectral imaging. In one embodiment, the present invention comprises the steps of illuminating an object with (101) with a modified illumination profile, producing a reflected, transmitted or fluorescence image, scanning the object (104), and re-imaging (105) the reflected, transmitted or fluorescence light after modifying the light's optical state. The present invention preferably works in conjunction with other imaging systems to provide both high-spectral resolution images with lower temporal resolution and multiple image acquisition with high temporal resolution.

Abstract translation: 公开了用于多模式光谱成像的方法和装置。 在一个实施例中，本发明包括以下步骤：用具有改进的照明轮廓的（101）照射物体，产生反射的，透射的或荧光的图像，扫描物体（104），并且重新成像（105） 改变光的光学状态后的透射或荧光。 本发明优选与其他成像系统结合使用，以提供具有较低时间分辨率的高光谱分辨率图像和具有高时间分辨率的多个图像采集。

公开(公告)号：WO2006051319A1

公开(公告)日：2006-05-18

申请号：PCT/GB2005/004368

申请日：2005-11-11

Applicant: SMCS LIMITED ,  HUNTER, Christopher

Inventor： HUNTER, Christopher

IPC: G01N21/25

CPC classification number: G01J3/50 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0235 ,  G01N21/25 ,  G01N2201/10 ,  G01N2201/103

Abstract: There is disclosed a colour assessment apparatus comprising a sample carrier, magnifying optics to capture light from defined locations of a sample located on the sample carrier, means for analyzing the light captured by the magnifying optics to measuring colour values of the defined locations of the sample, means for automatically displacing the optical means relative to the sample carrier in order to the apparatus to scan a succession of locations of the sample and to measure colour values of the sample for each location, memory means for storing a table of location information correlated with colour value information, means for inputting a colour value of a reference sample, and means for analyzing the table so as to determine locations of any colour values from the sample that match the colour value of the reference sample.

Abstract translation: 公开了一种颜色评估装置，其包括样品载体，放大光学器件，用于捕获来自位于样品载体上的样品的限定位置的光，用于分析由放大光学器件捕获的光以测量样品的限定位置的颜色值的装置 用于相对于样品载体自动移位光学装置的装置，以便装置扫描样品的一系列位置并测量每个位置的样品的颜色值，存储装置，用于存储与 颜色值信息，用于输入参考样本的颜色值的装置，以及用于分析该表的装置，以便确定来自样本的与参考样本的颜色值相匹配的任何颜色值的位置。

公开(公告)号：WO2006027406A1

公开(公告)日：2006-03-16

申请号：PCT/FI2004/000525

申请日：2004-09-10

Applicant: WALLAC OY ,  KIVELÄ, Petri

Inventor： KIVELÄ, Petri

IPC: G01N21/64

CPC classification number: G01N21/253 ,  G01N21/13 ,  G01N21/6428 ,  G01N21/6452 ,  G01N21/76 ,  G01N2021/6421 ,  G01N2021/6441 ,  G01N2021/6471 ,  G01N2021/6482 ,  G01N2021/6484 ,  G01N2201/0446 ,  G01N2201/0453 ,  G01N2201/0826 ,  G01N2201/103

Abstract: The present invention relates generally to the field of biochemical laboratory instrumentation for different applications of measuring properties of samples on e.g. microtitration plates and corresponding sample supports. The object of the invention is achieved by providing an optical measurement instrumentation wherein a sample (281-285) is activated (212AS, 218AS) and the emission is detected (291, 292), wherein between the activation and detection phases of measuring the sample, a shift is made in the relative position between the sample and means (218) directing the activation radiation to the sample as well as in the relative position between the sample and the means (293) receiving the emission radiation from the sample. This can be implemented e.g. by moving (299) the sample assay plate and/or a measuring head between the activation and emission phases of a sample. The invention allows a simultaneous activation of a first sample and detecting emission from a second sample thus enhancing efficiency of the measurement.

Abstract translation: 本发明一般涉及生物化学实验室仪器领域，用于不同应用样品的测量性质。 微量滴定板和相应的样品支架。 本发明的目的是通过提供一种光学测量仪器实现的，其中样品（281-285）被激活（212AS，218AS）并且检测到发射（291,292），其中在测量样品的激活和检测阶段之间 在样品和将激活辐射指向样品的装置（218）之间的相对位置以及样品和接收来自样品的发射辐射的装置（293）之间的相对位置进行位移。 这可以被实现。 通过在样品的活化和发射阶段之间移动（299）样品测定板和/或测量头。 本发明允许同时激活第一样品并检测来自第二样品的发射，从而提高测量的效率。

公开(公告)号：WO2004068087A3

公开(公告)日：2005-09-15

申请号：PCT/US2004002409

申请日：2004-01-27

Applicant: UNIV STATE SAN DIEGO ,  TONG WILLIAM G

Inventor： TONG WILLIAM G

IPC: G01J3/42 ,  G01N21/25 ,  G01N21/63 ,  G01N30/74 ,  C12Q1/68

CPC classification number: G01N21/636 ,  G01J3/42 ,  G01N21/253 ,  G01N30/74 ,  G01N2201/103 ,  G01N2201/12746

Abstract: Techniques and systems for using nonlinear four wave mixing to optically measure microarrays with sample cells of biological or chemical materials. Examples of suitable microarrays include but are not limited to DNA microchips and capillary electrophoresis microarrays.

Abstract translation: 使用非线性四波混合的光学测量微阵列与生物或化学材料样品池的技术和系统。 合适的微阵列的实例包括但不限于DNA微芯片和毛细管电泳微阵列。

公开(公告)号：US20240280500A1

公开(公告)日：2024-08-22

申请号：US18436083

申请日：2024-02-08

Applicant: NuFlare Technology, Inc.

Inventor： Ryoichi HIRANO ,  Yasuhiro YAMASHITA ,  Toshiaki OTAKI

IPC: G01N21/88 ,  G01N21/956 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/8851 ,  G01N21/95607 ,  G01N21/9501 ,  G01N2201/103

Abstract: A method for adjusting a focus position of an inspection apparatus includes measuring, while varying a height position of a pattern forming surface of an evaluation substrate with thereon plural types of figure patterns, for each type of figure pattern, light amounts at front and back focus positions of a light transmitted through or reflected from the evaluation substrate irradiated with an inspection light, calculating an autofocus signal, for each type of figure pattern and for each height position of the pattern forming surface, by using the light amounts measured at the front and back focus positions, and specifying a value of an inspection autofocus signal such that a difference between autofocus signal values of plural type figure patterns calculated at the same height position of the pattern forming surface is equal to or less than a threshold value.

公开(公告)号：US20240167961A1

公开(公告)日：2024-05-23

申请号：US18393159

申请日：2023-12-21

Applicant: ENERSOFT INC.

Inventor： Grant I. SANDEN ,  Yannai Z.R. SEGAL ,  Mikhail KOSTOUSOV

IPC: G01N21/71 ,  G01N33/24

CPC classification number: G01N21/718 ,  G01N33/24 ,  G01N2201/06113 ,  G01N2201/0636 ,  G01N2201/08 ,  G01N2201/103

Abstract: Laser induced breakdown spectroscopy (LIBS) devices for analysis of geological and related samples, and related methods. In the method, a scanning table having a geological core is moved from a start position to an end position for each position in a plurality of positions of the scanning table corresponding to an e region of interest of the geological core. At each position, laser ablation is performed on the exposed surface of the geological core using an oscillating planar focus laser. Contemporaneously with performing laser ablation on the exposed surface of the geological core, spectroscopy is permitted on the emitted light received by a fiber optic receiver sharing an optical path with the oscillating planar focus laser.

公开(公告)号：US20240096667A1

公开(公告)日：2024-03-21

申请号：US18272859

申请日：2021-01-29

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Hiromichi YAMAKAWA ,  Toshifumi HONDA ,  Yuta URANO ,  Shunichi MATSUMOTO ,  Masaya YAMAMOTO ,  Eiji ARIMA

IPC: H01L21/67 ,  G01N21/95 ,  G06T7/60 ,  G06T7/70

CPC classification number: H01L21/67288 ,  G01N21/9501 ,  G06T7/60 ,  G06T7/70 ,  G01N2201/103 ,  G01N2201/1087 ,  G01N2201/121 ,  H04N23/67

Abstract: A defect inspection device in which an optical axis of a detection optical system is inclined with respect to a surface of a sample, and an imaging sensor is inclined with respect to the optical axis, a height variation amount of an illumination spot in a normal direction of the surface of the sample is calculated based on an output of a height measuring unit, a deviation amount of the focusing position with respect to the light receiving surface in an optical axis direction of the detection optical system is calculated based on the height variation amount of the illumination spot, the deviation amount of the focusing position being generated accompanying a height variation of the illumination spot, and the focus actuator is controlled based on the deviation amount of the focusing position, and scattered light intensities at the same coordinates of the sample are added.

公开(公告)号：US11781996B1

公开(公告)日：2023-10-10

申请号：US18142340

申请日：2023-05-02

Applicant: AUROS TECHNOLOGY, INC.

Inventor： Ji-Hoon Kang ,  Hyun-Tae Kim

IPC: G01N21/956 ,  G01N21/95 ,  G01N21/88

CPC classification number: G01N21/956 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2201/103

Abstract: There are provided an overlay measuring device and a method for controlling a focus and a program therefor. An overlay measuring device controlling a focus in one embodiment includes an objective lens; a memory; a lens focus actuator operating the objective lens to adjust a distance between the objective lens and a wafer; and a processor controlling operations of the memory and the lens focus actuator, wherein the processor is configured to obtain a first height value in relation to each site of the wafer, match the obtained first height value and a corresponding site and store the same, and as initial measurement in relation to each site of the wafer starts, control the lens focus actuator, based on the stored first height value of the site, to control a Z-axis movement of the objective lens.

公开(公告)号：US11720032B2

公开(公告)日：2023-08-08

申请号：US17273758

申请日：2019-08-30

Applicant: ASML NETHERLANDS B.V.

Inventor： Raphael Nico Johan Stegen ,  Erik Henricus Egidius Catharina Eummelen ,  Christianus Wilhelmus Johannes Berendsen ,  Theodorus Wilhelmus Polet ,  Giovanni Luca Gattobigio

IPC: G03F7/20 ,  G03F7/00 ,  G01N21/88

CPC classification number: G03F7/7065 ,  G01N21/88 ,  G03F7/70341 ,  G03F7/70716 ,  G01N2201/0636 ,  G01N2201/103

Abstract: A process tool for processing production substrates, the process tool including: a movable stage configured to perform long-stroke movements in an X-Y plane; an imaging device mounted to a fixed part of the tool and having an optical axis substantially parallel to the X-Y plane; and a mirror mounted on the movable stage and oriented at a predetermined angle of inclination to the X-Y plane so that by moving the movable stage to a predetermined position a part of a component to be inspected can be imaged by the imaging device.