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公开(公告)号：US5808401A
公开(公告)日：1998-09-15
申请号：US548720
申请日：1995-10-26
Applicant: Sungho Jin , Gregory Peter Kochanski , Wei Zhu
Inventor： Sungho Jin , Gregory Peter Kochanski , Wei Zhu
CPC classification number: H01J9/025 , H01J1/304 , H01J2201/30403 , H01J2201/30457 , H01J2329/8625
Abstract: In accordance with the invention, a field emission device is made by disposing emitter material on an insulating substrate, applying masking particles to the emitter material, applying an insulating film and a gate conductor film over the masking particles and emitter material and removing the particles to reveal a random distribution of apertures to the emitter material. The result is a novel and economical field emission device having numerous randomly distributed emission apertures which can be used to make low cost flat panel displays.
Abstract translation: 根据本发明，通过将发射体材料设置在绝缘基板上，将掩模粒子施加到发射极材料，在掩模颗粒和发射体材料上施加绝缘膜和栅极导体膜，并将颗粒除去，制成场致发射器件 揭示孔径随机分布到发射体材料。 结果是一种新颖且经济的场致发射装置，其具有许多随机分布的发射孔，其可用于制造低成本的平板显示器。
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公开(公告)号：US5717278A
公开(公告)日：1998-02-10
申请号：US445241
申请日：1995-05-19
Applicant: Johann Bartha , Johann Greschner , Volkhard Wolf
Inventor： Johann Bartha , Johann Greschner , Volkhard Wolf
CPC classification number: B82Y10/00 , H01J1/3042 , H01J9/025 , H01J2201/30403 , H01J2201/30407
Abstract: The invention relates to the structure of a field emitter device, to the method of fabricating a field emitter device and to the use of the field emitter device in the technical field of flat panel displays. The field emission device comprises an array (1) of widely-spaced tips (2) for emitting electrons and a perforated extracting electrode (3) facing the array of tips. An individual series resistor is formed by each of said tips itself. The widely-spaced tips are not surrounded by a layer of electrically insulating material. The tips are not surrounded by an insulating layer and the tip end is not surrounded by a gate or extraction electrode. This avoids failures like shorts between the cathode electrode and the gate or extraction electrode which could occur due to inaccurate coating or etching processes, and enhances the reliability and the life-time of the array of tips. To fabricate the field emission device, a micromechanically manufactured array (1) of widely-spaced tips (2) and a micromechanically manufactured perforated extracting electrode (3) are provided. The outer sides of the perforated extracting electrode are bonded to the array in a way that the perforated extracting electrode is facing the array. With the array of widely-spaced tips and the perforated extracting electrode being fabricated separately and bonded together subsequently, both the number of process steps required for each of the two parts and the manufacturing process costs are reduced.
Abstract translation: 本发明涉及场致发射器件的结构，制造场发射极器件的方法以及在平板显示器的技术领域中使用场发射极器件。 场发射装置包括用于发射电子的广泛间隔的尖端（2）的阵列（1）和面向阵列阵列的穿孔提取电极（3）。 单个串联电阻器由每个所述尖端本身形成。 宽间隔的尖端不被一层电绝缘材料包围。 尖端不被绝缘层包围，并且尖端不被栅极或引出电极包围。 这避免了由于不准确的涂层或蚀刻工艺而可能发生的阴极电极和栅极或引出电极之间的短路故障，并且增强了尖端阵列的可靠性和寿命。 为了制造场发射器件，提供了一种微机械制造的宽间距尖端（2）的阵列（1）和微机械制造的穿孔提取电极（3）。 穿孔提取电极的外侧以穿孔提取电极面向阵列的方式结合到阵列。 利用广泛间隔的尖端阵列和穿孔提取电极单独制造并且随后结合在一起，减少了两个部件中的每一个所需的工艺步骤数量和制造工艺成本。
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公开(公告)号：US5681196A
公开(公告)日：1997-10-28
申请号：US560061
申请日：1995-11-17
Applicant: Sungho Jin , Gregory Peter Kochanski , John Thomson, Jr.
Inventor： Sungho Jin , Gregory Peter Kochanski , John Thomson, Jr.
CPC classification number: H01J9/025 , H01J2201/30403 , H01J2201/30457 , H01J2329/00
Abstract: In accordance with the invention, a field emission device is made by disposing emitter material on an insulating substrate, applying a sacrificial film to the emitter material and forming over the sacrificial layer a conductive gate layer having a random distribution of apertures therein. In the preferred process, the gate is formed by applying masking particles to the sacrificial film, applying a conductive film over the masking particles and the sacrificial film and then removing the masking particles to reveal a random distribution of apertures. The sacrificial film is then removed. The apertures then extend to the emitter material. In a preferred embodiment, the sacrificial film contains dielectric spacer particles which remain after the film is removed to separate the emitter from the gate. The result is a novel and economical field emission device having numerous randomly distributed emission apertures which can be used to make low cost flat panel displays.
Abstract translation: 根据本发明，通过将发射极材料设置在绝缘衬底上，将牺牲膜施加到发射极材料并在牺牲层上形成具有其中孔径随机分布的导电栅极层而形成场致发射器件。 在优选的方法中，通过将掩模颗粒施加到牺牲膜，在掩模颗粒和牺牲膜上施加导电膜，然后去除掩模颗粒以显示孔的随机分布来形成栅极。 然后去除牺牲膜。 孔然后延伸到发射体材料。 在优选实施例中，牺牲膜包含介电间隔物颗粒，其在除去膜之后保留，以将发射极与栅极分离。 结果是一种新颖且经济的场致发射装置，其具有许多随机分布的发射孔，其可用于制造低成本的平板显示器。
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公开(公告)号：US5619093A
公开(公告)日：1997-04-08
申请号：US414838
申请日：1995-03-31
Applicant: John W. Glesener , Arthur A. Morrish
Inventor： John W. Glesener , Arthur A. Morrish
CPC classification number: H01J1/304 , H01J2201/30403 , H01J2201/30446
Abstract: In a system containing an electron field emitter array characterized by aying diamond powder to a substrate and affixing the powder thereto, the diamond powder being composed of particles having sharp tips which are adapted to emit electrons in a vacuum and in an electric field, which electrons impact a phosphor layer disposed on an anode spaced above the tips of the diamond powder particles.
Abstract translation: 在包含电子场发射器阵列的系统中，其特征在于将金刚石粉末施加到基底上并将粉末附着在其上，金刚石粉末由具有尖锐尖端的颗粒组成，其适于在真空和电场中发射电子，该电子 影响设置在间隔在金刚石粉末颗粒的尖端上的阳极上的荧光体层。
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公开(公告)号：US5449310A
公开(公告)日：1995-09-12
申请号：US222597
申请日：1994-04-04
Applicant: Reinhard Stengl , Wolfgang Hoenlein
Inventor： Reinhard Stengl , Wolfgang Hoenlein
CPC classification number: H01J1/3042 , H01J21/105 , H01J9/025 , H01J2201/30403 , H01J2201/30407
Abstract: Rod-shaped or cylindrical structures in the nm range on a substrate of silicon are manufactured. A first cylinder of silicon is selectively epitaxially deposited in the hole of a mask layer of oxide, and the mask layer is removed. The silicon is then oxidized to form an oxide layer having such a thickness that a thinner, second cylinder of silicon having practically the same height as the first cylinder remains. In a last step, this oxide layer is removed, so that the second cylinder forms a freestanding silicon rod on the surface of the substrate.
Abstract translation: 制造在硅衬底上的nm范围内的棒状或圆柱形结构。 硅的第一圆柱体被选择性地外延沉积在氧化物的掩模层的孔中，并且去除掩模层。 然后将硅氧化以形成具有这样厚度的氧化物层，使得具有与第一气缸几乎具有相同高度的较薄的第二硅柱体保持不变。 在最后一步中，去除该氧化物层，使得第二圆柱体在基底表面上形成独立的硅棒。
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Patent Agency Ranking186.发明授权
公开(公告)号：US5432407A
公开(公告)日：1995-07-11
申请号：US871604
申请日：1992-04-20
Applicant: Robert C. Kane
Inventor： Robert C. Kane
CPC classification number: H02J15/00 , H01J19/24 , H01J21/20 , H02J9/061 , H03K17/545 , H01J2201/30403
Abstract: An energy storage circuit employing an energy storage network and a field emission device charge transport switch is provided. Utilization of various configurations of FEDs in the energy storage circuit provides for performance enhancement of addressing of display devices including liquid crystal displays, electroluminescent displays, and cathodoluminescent displays employing FED electron sources.
Abstract translation: 提供了采用能量存储网络和场发射装置电荷传输开关的能量存储电路。 在能量存储电路中利用各种配置的FED提供了使用FED电子源的显示装置的寻址性能增强，包括液晶显示器，电致发光显示器和阴极发光显示器。
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187.发明授权Plasma dry etch to produce atomically sharp asperities useful as cold cathodes 失效等离子体干蚀刻以产生用作冷阴极的原子锋利的凹凸
公开(公告)号：US5302238A
公开(公告)日：1994-04-12
申请号：US883074
申请日：1992-05-15
Applicant: Fred L. Roe , Kevin Tjaden
Inventor： Fred L. Roe , Kevin Tjaden
CPC classification number: H01J9/025 , H01J2201/30403
Abstract: An in situ plasma dry etching process for the formation of automatically sharp cold cathode emitter tips for use in field emission displays in which i) a mask layer is deposited on a substrate, ii) a photoresist layer is patterned superjacent the mask layer at the sites where the emitter tips are to be formed, iii) the mask is selectively removed by plasma etching, iv) after which the substrate is etched in the same plasma reacting chamber, thereby creating sharp electron emitter tips.
Abstract translation: 用于形成用于场发射显示器的自动尖锐冷阴极发射器尖端的原位等离子体干蚀刻工艺，其中i）掩模层沉积在衬底上，ii）将光致抗蚀剂层图案化在位于掩模层的位置 其中将形成发射极尖端，iii）通过等离子体蚀刻选择性地去除掩模，iv）然后在相同的等离子体反应室中蚀刻衬底，从而产生尖锐的电子发射器尖端。
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公开(公告)号：US5019003A
公开(公告)日：1991-05-28
申请号：US414505
申请日：1989-09-29
Applicant: Marc K. Chason
Inventor： Marc K. Chason
CPC classification number: H01J9/025 , H01J1/3042 , H01J2201/30403
Abstract: A field emitting device having a plurality of preformed emitter objects. The emitter objects include sharp geometric discontinuities, and a significant number of these geometric discontinuities are oriented in a way that supports desired field emission activity. Field emission devices built with such emitters can be utilized to provide a flat display screen.
Abstract translation: 一种场发射器件，具有多个预先形成的发射器物体。 发射器对象包括尖锐的几何不连续性，并且大量的这些几何不连续性以支持期望的场发射活动的方式定向。 用这种发射器构建的场发射装置可用于提供平面显示屏。
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公开(公告)号：US08298034B2
公开(公告)日：2012-10-30
申请号：US12809687
申请日：2008-12-19
Applicant: Lap-Tak Andrew Cheng
Inventor： Lap-Tak Andrew Cheng
IPC: H01J9/12
CPC classification number: H01J1/304 , H01J9/025 , H01J2201/30403 , H05K3/02 , H05K3/4053 , H05K2201/09827 , H05K2201/09981 , H05K2203/0508 , H05K2203/0783 , H05K2203/308 , Y10T428/24339 , Y10T428/24802
Abstract: This invention relates to a method for the fabrication of electrical and electronic devices using a photoresist deposited in pre-existing through holes in a device structure and a thick film paste, and to the devices made by such method. The method allows thick film paste deposits in the corners of the holes. This invention also relates to devices made with thick film pastes that are patterned using a diffusion layer made from residual photoresist deposits in a hole.
Abstract translation: 本发明涉及使用沉积在器件结构中的预先存在的通孔中的光致抗蚀剂和厚膜糊来制造电气和电子器件的方法以及由这种方法制造的器件。 该方法允许厚膜浆料沉积在孔的角部。 本发明还涉及使用由在孔中残留的光致抗蚀剂沉积物制成的扩散层进行图案化的厚膜糊制成的装置。
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公开(公告)号：US20100119825A1
公开(公告)日：2010-05-13
申请号：US12447836
申请日：2007-10-30
Applicant: Barry Chin Li Cheung , Joseph Reese Brewer , Nirmalendu Deo
Inventor： Barry Chin Li Cheung , Joseph Reese Brewer , Nirmalendu Deo
CPC classification number: H01J1/304 , B82Y30/00 , B82Y40/00 , C01B35/04 , H01J9/025 , H01J2201/30403 , Y10T428/2913 , Y10T428/2916 , Y10T428/2973 , Y10T428/2976 , Y10T428/298
Abstract: The present invention comprises nano obelisks and nanostructures and methods and processes for same. The nano obelisks of the present invention are advantageous structures for use as electron source emitters. For example, the ultra sharp obelisks can be used as an emitter source to generate highly coherent and high energy electrons with high current.
Abstract translation: 本发明包括纳米方尖碑和纳米结构及其方法和方法。 本发明的纳米方尖碑是用作电子源发射体的有利结构。 例如，超尖锐方尖碑可以用作发射源，以产生具有高电流的高度相干和高能量的电子。
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