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    DIAMOND ELECTRON SOURCE AND METHOD FOR MANUFACTURING THE SAME
    5.
    发明公开
    DIAMOND ELECTRON SOURCE AND METHOD FOR MANUFACTURING THE SAME 审中-公开
    DIAMANTELEKTRONENQUELLE UND DEREN HERSTELLUNGSVERFAHREN

    公开(公告)号：EP2065915A1

    公开(公告)日：2009-06-03

    申请号：EP07807459.8

    申请日：2007-09-18

    Applicant: Sumitomo Electric Industries, Ltd.

    Inventor： UEDA, Akihiko ,  YAMAMOTO, Yoshiyuki ,  NISHIBAYASHI, Yoshiki ,  IMAI, Takahiro

    IPC: H01J9/02 ,  H01J1/304

    CPC classification number: H01J1/3044 ,  H01J9/025 ,  H01J37/065 ,  H01J37/073 ,  H01J2201/30407 ,  H01J2201/30411 ,  H01J2201/30419 ,  H01J2201/30457 ,  H01J2237/06341 ,  H01J2237/26 ,  H01J2237/3137 ,  H01J2237/3146 ,  H01J2237/31749 ,  H01J2237/3175

    Abstract: A diamond electron source in which a single sharpened tip is formed at one end of a pillar-shaped diamond monocrystal of a size for which resist application is difficult in a microfabrication process, as an electron emission point used in an electron microscope or other electron beam device, and a method for manufacturing the diamond electron source.
    One end of a pillar-shaped diamond monocrystal 10 is ground to form a smooth flat surface 11, and a ceramic layer 12 is formed on the smooth flat surface 11. A thin-film layer 14 having a prescribed shape is deposited on the ceramic layer 12 using a focused ion beam device, after which the ceramic layer 12 is patterned by etching using the thin-film layer 14 as a mask. A single sharpened tip is formed at one end of the pillar-shaped diamond monocrystal 10 by dry etching using the resultant ceramic mask.

    Abstract translation: 一种金刚石电子源，其中在微细加工过程中难以施加抗蚀剂尺寸的柱状金刚石单晶的一端形成单个锐化尖端作为电子显微镜或其他电子束中使用的电子发射点 器件，以及金刚石电子源的制造方法。 研磨柱状金刚石单晶10的一端，形成平坦的平坦面11，在平滑平坦面11上形成陶瓷层12.具有规定形状的薄膜层14沉积在陶瓷层上 12，使用聚焦离子束装置，之后通过使用薄膜层14作为掩模的蚀刻对陶瓷层12进行图案化。 通过使用所得到的陶瓷掩模的干蚀刻，在柱状金刚石单晶10的一端形成单个尖锐的尖端。

    SELF-REGENERATING NANOTIPS FOR LOW-POWER ELECTRIC PROPULSION (EP) CATHODES
    6.
    发明申请
    SELF-REGENERATING NANOTIPS FOR LOW-POWER ELECTRIC PROPULSION (EP) CATHODES 审中-公开
    用于低功率电动推进（EP）阴极的自我再生纳米粒子

    公开(公告)号：WO2008031058A2

    公开(公告)日：2008-03-13

    申请号：PCT/US2007/077920

    申请日：2007-09-07

    Applicant: MICHIGAN TECHNOLOGICAL UNIVERSITY ,  KING, Lyon, Bradley

    Inventor： KING, Lyon, Bradley

    IPC: H01L21/306

    CPC classification number: F03H1/00 ,  H01J2201/30407

    Abstract: Spindt-type field-emission cathodes for use in electric propulsion (EP) systems having self- assembling nanostructures that can repeatedly regenerate damaged cathode emitter nanotips. A nanotip is created by applying a negative potential near the surface of a liquefied base metal to create a Taylor cone converging to a nanotip, and solidifying the Taylor cone for use as a field- emission cathode. When the nanotip of the Taylor cone becomes sufficiently blunted or damaged to affect its utility, the base metal is re-liquefied by application of a heat source, a negative potential is reapplied to the surface of the base metal to recreate the Taylor cone, and a new nanotip is generated by solidifying the base metal.

    Abstract translation: Spindt型场致发射阴极，用于具有自组装纳米结构的电推进系统（EP）系统，可以反复再生损坏的阴极发射器纳米尖端。 通过在液化贱金属的表面附近施加负电位以产生会聚到纳米尖端的泰勒锥，并固化泰勒锥以用作场致发射阴极来产生纳米尖端。 当泰勒锥的纳米尖端变得足够钝或损坏以影响其效用时，通过施加热源来重新液化贱金属，将负电位重新施加到贱金属的表面以再生泰勒锥，以及 通过固化贱金属产生新的纳米尖端。

    Diamond electron source and its manufacturing method
    9.
    发明专利
    Diamond electron source and its manufacturing method 有权
    金刚石电子源及其制造方法

    公开(公告)号：JP2008210775A

    公开(公告)日：2008-09-11

    申请号：JP2007236851

    申请日：2007-09-12

    Applicant: Sumitomo Electric Ind Ltd ,  住友電気工業株式会社

    Inventor： UEDA AKIHIKO ,  YAMAMOTO YOSHIYUKI ,  NISHIBAYASHI YOSHIKI ,  IMAI TAKAHIRO

    IPC: H01J9/02 ,  H01J1/304 ,  H01J37/073

    CPC classification number: H01J1/3044 ,  H01J9/025 ,  H01J37/065 ,  H01J37/073 ,  H01J2201/30407 ,  H01J2201/30411 ,  H01J2201/30419 ,  H01J2201/30457 ,  H01J2237/06341 ,  H01J2237/26 ,  H01J2237/3137 ,  H01J2237/3146 ,  H01J2237/31749 ,  H01J2237/3175

    Abstract: PROBLEM TO BE SOLVED: To provide a diamond electron source and its manufacturing method wherein one sharp-pointed section as an electron emission point for use in an electron beam device such as an electron microscope is formed at one end of a columnar diamond single crystal having a size where resist coating is difficult in a microfabrication process. SOLUTION: One end of the columnar diamond single crystal 10 is polished to form a smooth flat surface 11, and a ceramic layer 12 is formed on the smooth flat surface 11. After a thin film layer 14 having a predetermined shape is deposited on the ceramic layer 12 by using a focused ion beam system, the ceramic layer 12 is patterned by etching using the thin film layer 14 as a mask. One sharp-pointed section is formed at the one end of the columnar diamond single crystal 10 by dry etching using the formed ceramic mask. COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种金刚石电子源及其制造方法，其中在柱状金刚石的一端形成作为用于诸如电子显微镜的电子束装置中的电子发射点的尖锐部分 具有在微细加工过程中难以进行抗蚀剂涂层的尺寸的单晶。

    解决方案：抛光柱状金刚石单晶10的一端以形成光滑的平坦表面11，并且在光滑的平坦表面11上形成陶瓷层12.在沉积具有预定形状的薄膜层14之后 通过使用聚焦离子束系统在陶瓷层12上，通过使用薄膜层14作为掩模的蚀刻来对陶瓷层12进行图案化。 通过使用形成的陶瓷掩模的干蚀刻，在柱状金刚石单晶10的一端形成一个尖锐部分。 版权所有（C）2008，JPO＆INPIT

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