Abstract:
Display devices incorporating shutter-based light modulators are disclosed along with methods of manufacturing such devices. The methods are compatible with thin-film manufacturing processes known in the art and result in displays having lower power-consumption.
Abstract:
This disclosure provides systems, methods and apparatus for an electromechanical systems (EMS) assembly. The EMS assembly includes a substrate, an anchor disposed on the substrate, and a suspended planar body supported over the substrate by the anchor. The suspended planar body includes at least one depression extending out of a plane of the suspended planar body and protruding towards the substrate. The suspended planar body also includes a substantially horizontal portion corresponding to a gap in the at least one depression. An extent of the gap is up to 20% of a length of the suspended planar body.
Abstract:
The invention relates to MEMS-based display devices. In particular, the display devices may include actuators having two mechanically compliant electrodes. In addition, bi-stable shutter assemblies and means for supporting shutters in shutter assemblies are disclosed inclusion in the display devices.
Abstract:
The invention relates to MEMS-based display devices. In particular, the display devices may include actuators having two mechanically compliant electrodes. In addition, bi-stable shutter assemblies and means for supporting shutters in shutter assemblies are disclosed inclusion in the display devices.
Abstract:
Display devices incorporating shutter-based light modulators are disclosed along with methods of manufacturing such devices. The methods are compatible with thin-film manufacturing processes known in the art and result in displays having lower power-consumption.
Abstract:
A display apparatus includes a first substrate, a plurality of microelectromechanical systems (MEMS) light modulators formed from a structural material coupled to the first substrate and a second substrate separated from the first substrate. A plurality of spacers extend from the first substrate to keep the second substrate a minimum distance away from the plurality of light modulators. The spacers include a first polymer layer having a surface in contact with the first substrate, a second polymer layer encapsulating the first polymer layer and a layer of the structural material encapsulating the second polymer layer. The spacers can be used as fluid barriers and configured to surround more than one but less than all of the MEMS light modulators in the display apparatus.
Abstract:
Systems and methods for a display having an array of pixels, a substrate, and a control matrix formed on the substrate are described. The array of pixels includes mechanical light modulators that can be referred to as micro-electro-mechanical or MEMS light modulators. The MEMS light modulators may be shutter-based light modulators, and an array of apertures may be formed on the substrate corresponding spatially to the shutters in the array of shutter-based light modulators. Each modulator is configured to be driven from a-light-blocking state to a-light-transmissive state through a movement direction. The array of light modulators are arranged to reduce the correlations in movement directions of neighboring pixels, thereby reducing the amplitude of acoustic emissions from the display.
Abstract:
This methods and devices described herein relate to displays and methods of manufacturing cold seal fluid- filled displays, including MEMS. The fluid substantially surrounds the moving components of the MEMS display to reduce the effects of stiction and to improve the optical and electromechanical performance of the display. The invention relates to a method for sealing a MEMS display at a lower temperature such that a vapor bubble forms only at temperatures about 15°C to about 20°C below the seal temperature. In some embodiments, the MEMS display apparatus includes a first substrate, a second substrate separated from the first substrate by a gap and supporting an array of light modulators, a fluid substantially filling the gap, a plurality of spacers within the gap, and a sealing material joining the first substrate to the second substrate.
Abstract:
The invention relates to a spatial light modulator including a substrate having a surface and a modulation assembly coupled to the substrate including a modulation element and a compliant beam. The modulation assembly is configured to limit the bending of the compliant beam towards an opposing surface that would otherwise be caused by inherent stresses within the compliant beam. The invention also relates to a method of manufacturing a spatial light modulator including the steps of forming and releasing a modulation assembly that has a modulation element and a compliant beam formed in a pre-release position to have an intended inherent stress state. As a result of the stress state in the compliant beam, upon release of the compliant beam, the compliant beam bends into a rest position which is different than the pre-release position, where the rest position is based in part on the intended inherent stress state.
Abstract:
The invention relates to MEMS-based display devices. In particular, the display devices may include actuators having two mechanically compliant electrodes. In addition, bi-stable shutter assemblies and means for supporting shutters in shutter assemblies are disclosed inclusion in the display devices.