ELECTROMECHANICAL SYSTEM STRUCTURES WITH RIBS HAVING GAPS
    12.
    发明申请
    ELECTROMECHANICAL SYSTEM STRUCTURES WITH RIBS HAVING GAPS 审中-公开
    具有GAPS的RIBS的电化学系统结构

    公开(公告)号:WO2013032865A1

    公开(公告)日:2013-03-07

    申请号:PCT/US2012/052103

    申请日:2012-08-23

    Abstract: This disclosure provides systems, methods and apparatus for an electromechanical systems (EMS) assembly. The EMS assembly includes a substrate, an anchor disposed on the substrate, and a suspended planar body supported over the substrate by the anchor. The suspended planar body includes at least one depression extending out of a plane of the suspended planar body and protruding towards the substrate. The suspended planar body also includes a substantially horizontal portion corresponding to a gap in the at least one depression. An extent of the gap is up to 20% of a length of the suspended planar body.

    Abstract translation: 本公开提供了用于机电系统(EMS)组件的系统,方法和装置。 EMS组件包括衬底,设置在衬底上的锚固体和通过锚固件支撑在衬底上的悬浮平面体。 悬挂的平面体包括至少一个从悬挂的平面体的平面延伸并朝向基底突出的凹陷。 悬挂的平面体还包括对应于至少一个凹部中的间隙的基本水平的部分。 间隙的程度高达悬挂平面体长度的20%。

    SYSTEMS AND METHODS FOR MEMS LIGHT MODULATOR ARRAYS WITH REDUCED ACOUSTIC EMISSION
    17.
    发明申请
    SYSTEMS AND METHODS FOR MEMS LIGHT MODULATOR ARRAYS WITH REDUCED ACOUSTIC EMISSION 审中-公开
    具有减少声发射的MEMS光调制器阵列的系统和方法

    公开(公告)号:WO2012088011A1

    公开(公告)日:2012-06-28

    申请号:PCT/US2011/065980

    申请日:2011-12-20

    Abstract: Systems and methods for a display having an array of pixels, a substrate, and a control matrix formed on the substrate are described. The array of pixels includes mechanical light modulators that can be referred to as micro-electro-mechanical or MEMS light modulators. The MEMS light modulators may be shutter-based light modulators, and an array of apertures may be formed on the substrate corresponding spatially to the shutters in the array of shutter-based light modulators. Each modulator is configured to be driven from a-light-blocking state to a-light-transmissive state through a movement direction. The array of light modulators are arranged to reduce the correlations in movement directions of neighboring pixels, thereby reducing the amplitude of acoustic emissions from the display.

    Abstract translation: 描述了具有形成在基板上的像素阵列,基板和控制矩阵的显示器的系统和方法。 像素阵列包括可被称为微机电或MEMS光调制器的机械光调制器。 MEMS光调制器可以是基于快门的光调制器,并且可以在基板上形成孔阵列,空间上对应于基于快门的光调制器阵列中的百叶窗。 每个调制器被配置为通过移动方向从遮光状态驱动到透光状态。 光调制器的阵列被布置为减少相邻像素的移动方向上的相关性,从而减少来自显示器的声发射的幅度。

    MECHANICAL LIGHT MODULATORS WITH STRESSED BEAMS
    19.
    发明申请
    MECHANICAL LIGHT MODULATORS WITH STRESSED BEAMS 审中-公开
    机械光调制器与受压梁

    公开(公告)号:WO2009102471A1

    公开(公告)日:2009-08-20

    申请号:PCT/US2009/000922

    申请日:2009-02-12

    CPC classification number: G02B26/02 G09G3/3413 G09G3/3433 G09G2300/08

    Abstract: The invention relates to a spatial light modulator including a substrate having a surface and a modulation assembly coupled to the substrate including a modulation element and a compliant beam. The modulation assembly is configured to limit the bending of the compliant beam towards an opposing surface that would otherwise be caused by inherent stresses within the compliant beam. The invention also relates to a method of manufacturing a spatial light modulator including the steps of forming and releasing a modulation assembly that has a modulation element and a compliant beam formed in a pre-release position to have an intended inherent stress state. As a result of the stress state in the compliant beam, upon release of the compliant beam, the compliant beam bends into a rest position which is different than the pre-release position, where the rest position is based in part on the intended inherent stress state.

    Abstract translation: 本发明涉及一种空间光调制器,其包括具有表面的基板和耦合到该基板的调制组件,该调制组件包括调制元件和柔性梁。 调制组件被配置为将柔性梁的弯曲限制在相反的表面,否则将由柔性梁内的固有应力引起。 本发明还涉及一种制造空间光调制器的方法,包括以下步骤:形成和释放调制组件,该调制组件具有形成在预释放位置中的调制元件和柔性梁,以具有预期的固有应力状态。 由于柔性梁中的应力状态,在释放柔性梁时,柔性梁弯曲到与预释放位置不同的静止位置,其中静止位置部分地基于预期的固有应力 州。

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