公开(公告)号：KR100919084B1

公开(公告)日：2009-09-28

申请号：KR1020030005726

申请日：2003-01-29

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 미야타아키라 ,  히가시마키오 ,  와다시게키

IPC: H01L21/027

CPC classification number: G03F7/7075 ,  G03D3/00 ,  Y10S414/135

Abstract: 레지스트도포/현상처리 시스템은 카세트 스테이션과, 처리 스테이션과 인터페이스 스테이션을 구비하고 있다. 인터페이스 스테이션에 설치된 고정밀도온도조절유니트로부터 노광장치의 인스테이지에 웨이퍼를 반송하는 제 2 웨이퍼 반송체는 인스테이지에 웨이퍼(W)를 반입할 수 있는 상태이므로, 고정밀도 온도조절유니트로부터 웨이퍼(W)를 반출하였지만, 그 후에 인스테이지로 웨이퍼(W)를 반입할 수 없게 된 경우에, 유지하고 있는 웨이퍼(W)를 임시로 되돌림유니트에 얹어 놓는다.

公开(公告)号：KR1020070009603A

公开(公告)日：2007-01-18

申请号：KR1020067020161

申请日：2005-02-02

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 히가시마키오 ,  미야타아키라

IPC: H01L21/68 ,  H01L21/677

CPC classification number: H01L21/67276 ,  G05B19/41815 ,  G05B2219/31002 ,  G05B2219/45031 ,  H01L21/67742 ,  H01L21/67745

Abstract: Substrate processing equipment is provided with a transportation schedule generating part, a transportation schedule storing part, a transportation control part and a waiting position control part. The transportation control part refers to a transportation schedule, controls a plurality of substrate transporting mechanisms so as to transport a substrate written in data of a transportation cycle composed of a plurality of transportation operations to a module which corresponds to the substrate, and permits a plurality of the substrate transporting mechanisms to execute a transportation cycle. The waiting position control part refers to the transportation schedule stored in the transportation schedule storing part, and after one substrate transporting mechanism completes transportation operation to be performed by itself in one transportation cycle, the waiting position control part moves the one substrate transporting mechanism, while the transportation operation to be performed by other substrate transporting mechanism in the one transportation cycle is being executed by other substrate transporting mechanism, and makes the one substrate transporting mechanism wait at a first module in the transportation operation among a group of modules which are to be handled by itself in the subsequent transportation cycle. ® KIPO & WIPO 2007

Abstract translation: 基板处理设备具有运输计划产生部分，运输计划存储部分，运输控制部分和等待位置控制部分。 运输控制部分是指运输计划，控制多个基板输送机构，以将由多个运输操作组成的运输周期的数据写入的基板运送到与基板相对应的模块，并允许多个 的基板传送机构来执行传送周期。 等待位置控制部分是指存储在运输计划存储部分中的运输计划，并且在一个基板运送机构完成在一个运输循环中自身执行的运输操作之后，等待位置控制部分移动一个基板运送机构，同时 在一个运输循环中由其他基材输送机构进行的运输操作正由其他基材输送机构进行，并使一个基板输送机构在运输作业中的第一模块等待一组模块 在随后的运输周期内自行处理。 ®KIPO＆WIPO 2007