公开(公告)号：KR1020110068179A

公开(公告)日：2011-06-22

申请号：KR1020090125029

申请日：2009-12-15

Applicant: 삼성모바일디스플레이주식회사

Inventor： 지창순 ,  김태승 ,  이종우 ,  안성국

IPC: H01L51/56 ,  C23C14/24

CPC classification number: C23C14/042 ,  C23C14/50 ,  H01L51/56

Abstract: PURPOSE: An apparatus for a thin layer deposition and a method for manufacturing an organic light emitting display device thereof are provided to prevent the separation of a mask and a substrate by removing the static electricity between the mask and the substrate. CONSTITUTION: A holder(102) supports a substrate. A mask(103) is opposite to one side of the substrate. A static electricity removing unit(120) flows a current into a mask to remove the static electricity between the substrate and the mask. The static electricity removing unit comprises a power source, a resistor, and a wire The power source supplies current to the mask. The resistor controls the amount of current. The wire is connected to the power source, the resistor, and the mask to form a closed circuit.

Abstract translation: 目的：提供一种用于薄层沉积的装置及其有机发光显示装置的制造方法，以通过去除掩模和基板之间的静电来防止掩模和基板的分离。 构成：支架（102）支撑基板。 掩模（103）与基板的一侧相对。 静电去除单元（120）将电流流入掩模以去除衬底和掩模之间的静电。 静电除去单元包括电源，电阻器和电线。电源向掩模提供电流。 电阻控制电流量。 导线连接到电源，电阻和掩模，形成闭路。