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公开(公告)号：KR1020100066682A
公开(公告)日：2010-06-18
申请号：KR1020080125094
申请日：2008-12-10
Applicant: 삼성모바일디스플레이주식회사
CPC classification number: C23C14/243
Abstract: PURPOSE: An evaporator is provided to restrict heat transfer to a shadow mask or substrate and increase the capacity of accepting a deposition material. CONSTITUTION: An evaporator comprises a crucible(11), a mesh member(17), and thermo balls(20). A deposition material is accepted inside the crucible, and the crucible has an opening(22) through which the deposition material is put in. The mesh member having a plurality of holes is installed in the opening of the crucible. The thermo balls are spread on the mesh member.
Abstract translation: 目的：提供蒸发器以限制向荫罩或基底的传热，并增加接受沉积材料的能力。 构成：蒸发器包括坩埚（11），网状构件（17）和热球（20）。 在坩埚内部接受沉积材料，坩埚具有沉积材料通过的开口（22）。具有多个孔的网状构件安装在坩埚的开口中。 热球散布在网状构件上。
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公开(公告)号：KR1020110033590A
公开(公告)日：2011-03-31
申请号：KR1020090091144
申请日：2009-09-25
Applicant: 삼성모바일디스플레이주식회사
IPC: H01L21/20 , H01L21/205
CPC classification number: C23C14/30 , C23C14/24 , C23C14/243 , C23C14/26 , H01L51/001 , H01L51/56
Abstract: PURPOSE: A deposition source is provided to prevent the splash phenomenon of a deposition material by including an accommodation member receiving a thermal transfer member to make it evenly distributed on a target material. CONSTITUTION: In a deposition source, a depositing material(120) is arranged inside a crucible(110). A thermal transfer member(150) is arranged in the upper part of the depositing material of the crucible inside. A receiving member(130) accepts the thermal transfer member. The receiving member comprises a bottom part(131), a lateral part(132), and a top part(133) which are comprised of a mesh plate smaller than the size of the particles of the thermal transfer member.
Abstract translation: 目的：提供沉积源以通过包括容纳构件来接收热转印构件以使其均匀分布在目标材料上来防止沉积材料的飞溅现象。 构成：在沉积源中，沉积材料（120）布置在坩埚（110）的内部。 热转印构件（150）设置在坩埚内部的沉积材料的上部。 接收构件（130）接受热传递构件。 接收构件包括底部（131），侧部（132）和顶部（133），其由比热传递构件的颗粒的尺寸小的网板组成。
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公开(公告)号：KR101156433B1
公开(公告)日：2012-06-18
申请号：KR1020090125029
申请日：2009-12-15
Applicant: 삼성모바일디스플레이주식회사
CPC classification number: C23C14/042 , C23C14/50 , H01L51/56
Abstract: 본 발명의 일 실시예는 기판과 마스크 사이의 정전기를 제거할 수 있는 박막 증착 장치 및 이를 이용한 정전기 제거 방법을 제공한다.
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公开(公告)号：KR101030005B1
公开(公告)日：2011-04-20
申请号：KR1020090091144
申请日：2009-09-25
Applicant: 삼성모바일디스플레이주식회사
IPC: H01L21/20 , H01L21/205
CPC classification number: C23C14/30 , C23C14/24 , C23C14/243 , C23C14/26 , H01L51/001 , H01L51/56
Abstract: 균일한 증착 특성을 확보할 수 있도록, 본 발명은 증착 재료가 내부에 배치된 도가니, 상기 도가니 내부의 상기 증착 재료 상부에 배치되는 열전달 부재 및 상기 열전달 부재를 수용하고 메쉬판을 구비하는 수용 부재를 포함하는 증착 소스를 제공한다.
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Patent Agency Ranking
公开(公告)号：KR1020100130786A
公开(公告)日：2010-12-14
申请号：KR1020090049479
申请日：2009-06-04
Applicant: 삼성모바일디스플레이주식회사
Abstract: PURPOSE: A deposition apparatus and a manufacturing method of an organic light emitting diode using the same are provided to facilitate the deposition on a large substrate and enable simultaneous deposition of different materials. CONSTITUTION: A deposition apparatus comprises a deposition source unit including a first deposition source(11) and a second deposition source(12). The first deposition source has a first and a second side(13,14) which meet at the right angle, wherein the first side is shorter than the second side. The second deposition source has a third and a fourth side(15,16) which meet at the right angle, wherein the third side is shorter than the fourth side. The third side is arranged adjacent to the first side.
Abstract translation: 目的：提供使用其的有机发光二极管的沉积设备和制造方法，以便于在大的衬底上沉积并且能够同时沉积不同的材料。 构成：沉积装置包括包括第一沉积源（11）和第二沉积源（12）的沉积源单元。 第一沉积源具有以直角相交的第一和第二侧（13,14），其中第一侧比第二侧短。 第二沉积源具有以直角相遇的第三和第四侧（15,16），其中第三侧比第四侧短。 第三侧被布置成与第一侧相邻。
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公开(公告)号：KR101152578B1
公开(公告)日：2012-06-01
申请号：KR1020100010837
申请日：2010-02-05
Applicant: 삼성모바일디스플레이주식회사
Abstract: 본발명은챔버내에서제 1기판에대한기판이송및 얼라인공정수행과동시에제 2기판에대한증착공정을수행할수 있도록함으로써, 기판이송및 얼라인공정시소모되는유기물질재료의손실을줄여재료효율을극대화하고, 공정 Tack time을최소화할 수있는유기물증착장치및 증착방법을제공한다. 본발명의실시예에의한유기물증착장치는, 내부가제 1기판증착영역및 제 2기판증착영역으로구분되는챔버와; 상기제 1 또는제 2기판증착영역내에서제 1방향으로이동하여제 1기판또는제 2기판상으로유기물입자를분사시키는유기물증착원과; 상기유기물증착원이각각제 1 또는제 2기판증착영역에위치되도록상기유기물증착원을제 2방향으로회전이동시키는제 2이동수단이포함되어구성된다.
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公开(公告)号：KR1020110068179A
公开(公告)日：2011-06-22
申请号：KR1020090125029
申请日：2009-12-15
Applicant: 삼성모바일디스플레이주식회사
CPC classification number: C23C14/042 , C23C14/50 , H01L51/56
Abstract: PURPOSE: An apparatus for a thin layer deposition and a method for manufacturing an organic light emitting display device thereof are provided to prevent the separation of a mask and a substrate by removing the static electricity between the mask and the substrate. CONSTITUTION: A holder(102) supports a substrate. A mask(103) is opposite to one side of the substrate. A static electricity removing unit(120) flows a current into a mask to remove the static electricity between the substrate and the mask. The static electricity removing unit comprises a power source, a resistor, and a wire The power source supplies current to the mask. The resistor controls the amount of current. The wire is connected to the power source, the resistor, and the mask to form a closed circuit.
Abstract translation: 目的：提供一种用于薄层沉积的装置及其有机发光显示装置的制造方法，以通过去除掩模和基板之间的静电来防止掩模和基板的分离。 构成：支架（102）支撑基板。 掩模（103）与基板的一侧相对。 静电去除单元（120）将电流流入掩模以去除衬底和掩模之间的静电。 静电除去单元包括电源，电阻器和电线。电源向掩模提供电流。 电阻控制电流量。 导线连接到电源，电阻和掩模，形成闭路。
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公开(公告)号：KR101015277B1
公开(公告)日：2011-02-15
申请号：KR1020080125094
申请日：2008-12-10
Applicant: 삼성모바일디스플레이주식회사
CPC classification number: C23C14/243
Abstract: 본 발명은 유기박이나 금속막 형성을 위한 진공 증착 장치에 사용되는 증발원에 관한 것이다. 본 발명의 증발원은 내부에 증착재료가 수용되고 증착재료가 통과하는 개구부가 구비된 도가니, 도가니의 개구부에 설치되며 복수의 구멍이 형성된 메쉬부재, 및 메쉬부재 상에 도포되는 써모볼을 포함한다. 여기서, 써모볼은 도가니 내에 채워지는 증착재료와 섞이지 않고 증착재료와 일정 간격을 두고 증착재료를 덮도록 구비된다.
증발원, 증착, 도가니, 증착재료, 튐, 막힘, 써모볼, 메쉬부재-
公开(公告)号：KR1020100120081A
公开(公告)日：2010-11-12
申请号：KR1020100010837
申请日：2010-02-05
Applicant: 삼성모바일디스플레이주식회사
Abstract: PURPOSE: An organic material deposition apparatus and method are provided to simultaneously perform a substrate transfer and alignment process for a first substrate and a deposition process for a second substrate within the same processing chamber. CONSTITUTION: An organic material deposition apparatus comprises a chamber(100), an organic material deposition source(300), a first transfer unit(510), and a second transfer unit(520). The inside of the chamber is divided into a first substrate deposition region and a second substrate deposition region. The organic material deposition source moves in the first or second substrate deposition region and sprays organic particles on a first or second substrate. The first transfer unit rotates the organic material deposition source in a first direction to be located in the first or second substrate deposition region. The second transfer unit reciprocates the organic material deposition source in a second direction within the first or second substrate deposition region.
Abstract translation: 目的：提供一种有机材料沉积装置和方法，以在同一处理室内同时对第一基板进行基板转移和取向处理以及第二基板的沉积工艺。 构成：有机材料沉积装置包括室（100），有机材料沉积源（300），第一转移单元（510）和第二转移单元（520）。 室的内部被分为第一衬底沉积区域和第二衬底沉积区域。 有机材料沉积源在第一或第二衬底沉积区域中移动并在第一或第二衬底上喷射有机颗粒。 第一传送单元使第一方向上的有机材料沉积源旋转以位于第一或第二基板沉积区域中。 第二传送单元使第一或第二基板沉积区域内的有机材料沉积源沿第二方向往复运动。
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