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公开(公告)号：KR1020110033590A
公开(公告)日：2011-03-31
申请号：KR1020090091144
申请日：2009-09-25
Applicant: 삼성모바일디스플레이주식회사
IPC: H01L21/20 , H01L21/205
CPC classification number: C23C14/30 , C23C14/24 , C23C14/243 , C23C14/26 , H01L51/001 , H01L51/56
Abstract: PURPOSE: A deposition source is provided to prevent the splash phenomenon of a deposition material by including an accommodation member receiving a thermal transfer member to make it evenly distributed on a target material. CONSTITUTION: In a deposition source, a depositing material(120) is arranged inside a crucible(110). A thermal transfer member(150) is arranged in the upper part of the depositing material of the crucible inside. A receiving member(130) accepts the thermal transfer member. The receiving member comprises a bottom part(131), a lateral part(132), and a top part(133) which are comprised of a mesh plate smaller than the size of the particles of the thermal transfer member.
Abstract translation: 目的：提供沉积源以通过包括容纳构件来接收热转印构件以使其均匀分布在目标材料上来防止沉积材料的飞溅现象。 构成：在沉积源中，沉积材料（120）布置在坩埚（110）的内部。 热转印构件（150）设置在坩埚内部的沉积材料的上部。 接收构件（130）接受热传递构件。 接收构件包括底部（131），侧部（132）和顶部（133），其由比热传递构件的颗粒的尺寸小的网板组成。
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公开(公告)号：KR1020100120975A
公开(公告)日：2010-11-17
申请号：KR1020090039887
申请日：2009-05-07
Applicant: 삼성모바일디스플레이주식회사
CPC classification number: H01L51/0029 , H01J37/20 , H01J37/32091 , H01J37/32568 , H01J2237/024 , H01J2237/032 , H01J2237/038 , H01J2237/20235
Abstract: PURPOSE: An apparatus for processing plasma is provided to constantly etch the surface of a substrate by maintaining the uniformity of plasma in a chamber. CONSTITUTION: A substrate is arranged in a chamber. A first electrode(104) is arranged in the chamber and is spaced apart from the lower side of the substrate. A second electrode(105) is arranged in the chamber and is spaced apart from the upper side of the substrate. A gap regulating unit(102) regulates a gap between the first electrode and the substrate or a gap between the second electrode and the substrate.
Abstract translation: 目的：提供一种用于处理等离子体的装置，以通过维持室中的等离子体的均匀性来恒定地蚀刻基板的表面。 构成：衬底布置在腔室中。 第一电极（104）布置在腔室中并与衬底的下侧隔开。 第二电极（105）布置在腔室中并与衬底的上侧隔开。 间隙调节单元（102）调节第一电极和衬底之间的间隙或第二电极和衬底之间的间隙。
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公开(公告)号：KR1020060117021A
公开(公告)日：2006-11-16
申请号：KR1020050039724
申请日：2005-05-12
Applicant: 삼성모바일디스플레이주식회사
IPC: H05B33/04
CPC classification number: H01L51/5246 , H01L51/5243 , H01L51/5253 , H01L2251/30 , H01L2924/12044
Abstract: A flat panel display device is provided to prevent deterioration of an organic layer by preventing moisture or external air from penetrating the organic layer along an electrode terminal unit. In a flat panel display device, a display unit(50) is placed on a surface of a transparent substrate(40). A cap(100) is made of non-magnetic substance, and is attached to the transparent substrate(40) for sealing the display unit(50).
Abstract translation: 提供一种平板显示装置，通过防止水分或外部空气沿着电极端子单元穿透有机层来防止有机层的劣化。 在平板显示装置中，将显示单元（50）放置在透明基板（40）的表面上。 帽（100）由非磁性物质制成，并且附着到用于密封显示单元（50）的透明基板（40）上。
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公开(公告)号：KR1020100023483A
公开(公告)日：2010-03-04
申请号：KR1020080082266
申请日：2008-08-22
Applicant: 삼성모바일디스플레이주식회사
IPC: H01L21/20
CPC classification number: C23C14/243
Abstract: PURPOSE: An inner plate and a crucible assembly for deposition thereof are provided to multiply the internal pressure of the crucible assembly by changing the steam path of a depositing material from a linear form to a bypass curve form. CONSTITUTION: A main body(10) comprises an internal space and an opening(14) for storing a deposition material. An inner plate(30) covers the opening of the main body. A cap(50) includes a hole(52) in the top and covers the inner plate. An inner channel is included in order to emit the steam vapor of the deposition material through a hole to the outside. The inner plate comprises a first channel(35) and a second channel(37).
Abstract translation: 目的：提供用于沉积的内板和坩埚组件，以通过将沉积材料的蒸汽路径从线性形式改变为旁路曲线形式来乘以坩埚组件的内部压力。 构成：主体（10）包括内部空间和用于存储沉积材料的开口（14）。 内板（30）覆盖主体的开口。 盖（50）在顶部包括孔（52）并覆盖内板。 包括内部通道以便通过孔向外部喷射沉积材料的蒸气蒸气。 内板包括第一通道（35）和第二通道（37）。
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公开(公告)号：KR1020060117821A
公开(公告)日：2006-11-17
申请号：KR1020050040377
申请日：2005-05-14
Applicant: 삼성모바일디스플레이주식회사
IPC: H05B33/10
CPC classification number: H01L51/0002 , H01L51/5012 , H01L51/5056 , H01L51/5072 , H01L51/5088 , H01L51/5096 , H01L51/5203 , H01L51/56 , H01L2924/12044
Abstract: An organic light emitting device and a method for fabricating the same are provided to prevent a short between a cathode and an anode by preventing the anode from being exposed. A method for fabricating an organic light emitting device includes the steps of: forming a first electrode(220) at a surface of a substrate(210); depositing an organic film layer(230) at the surface of the substrate(210); flattening a surface of the organic film layer(230) by performing a heating process; and forming a second electrode(240).
Abstract translation: 提供有机发光器件及其制造方法，以通过防止阳极暴露来防止阴极和阳极之间的短路。 一种制造有机发光器件的方法包括以下步骤：在衬底（210）的表面上形成第一电极（220）; 在所述基板（210）的表面上沉积有机薄膜层（230）; 通过进行加热处理使有机薄膜层（230）的表面变平; 和形成第二电极（240）。
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Patent Agency Ranking
公开(公告)号：KR101156433B1
公开(公告)日：2012-06-18
申请号：KR1020090125029
申请日：2009-12-15
Applicant: 삼성모바일디스플레이주식회사
CPC classification number: C23C14/042 , C23C14/50 , H01L51/56
Abstract: 본 발명의 일 실시예는 기판과 마스크 사이의 정전기를 제거할 수 있는 박막 증착 장치 및 이를 이용한 정전기 제거 방법을 제공한다.
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公开(公告)号：KR101050463B1
公开(公告)日：2011-07-20
申请号：KR1020090039887
申请日：2009-05-07
Applicant: 삼성모바일디스플레이주식회사
CPC classification number: H01L51/0029 , H01J37/20 , H01J37/32091 , H01J37/32568 , H01J2237/024 , H01J2237/032 , H01J2237/038 , H01J2237/20235
Abstract: A substrate plasma-processing apparatus for plasma-processing a surface of an electrode of an organic light emitting device. The substrate plasma-processing apparatus may adjust the distance between a first electrode and a substrate and adjust the distance between a second electrode and the substrate.
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公开(公告)号：KR101030005B1
公开(公告)日：2011-04-20
申请号：KR1020090091144
申请日：2009-09-25
Applicant: 삼성모바일디스플레이주식회사
IPC: H01L21/20 , H01L21/205
CPC classification number: C23C14/30 , C23C14/24 , C23C14/243 , C23C14/26 , H01L51/001 , H01L51/56
Abstract: 균일한 증착 특성을 확보할 수 있도록, 본 발명은 증착 재료가 내부에 배치된 도가니, 상기 도가니 내부의 상기 증착 재료 상부에 배치되는 열전달 부재 및 상기 열전달 부재를 수용하고 메쉬판을 구비하는 수용 부재를 포함하는 증착 소스를 제공한다.
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公开(公告)号：KR101015336B1
公开(公告)日：2011-02-16
申请号：KR1020080082266
申请日：2008-08-22
Applicant: 삼성모바일디스플레이주식회사
IPC: H01L21/20
CPC classification number: C23C14/243
Abstract: 본 발명은 증착용 도가니 장치 및 이 증착용 도가지 장치에 사용되는 내부 플레이트에 관한 것이다. 본 발명의 증착용 도가니 장치는 증착물질을 수용하기 위한 내부 공간과 그 상부에 개구부를 구비하는 본체와, 본체의 개구부를 덮는 내부 플레이트와, 상부에 홀을 구비하고 내부 플레이트를 게재하며 본체에 결합하는 캡과, 증착물질의 증기가 본체의 내부 공간에서 내부 플레이트의 외측면과 캡의 내측면 사이를 경유하여 캡의 홀을 통해 외부로 방출되도록 구비된 내부 채널을 포함한다.
증착, 도가니, 내부 플레이트, 내부 채널, 증착물질, 막힘, 튐-
公开(公告)号：KR1020100130786A
公开(公告)日：2010-12-14
申请号：KR1020090049479
申请日：2009-06-04
Applicant: 삼성모바일디스플레이주식회사
Abstract: PURPOSE: A deposition apparatus and a manufacturing method of an organic light emitting diode using the same are provided to facilitate the deposition on a large substrate and enable simultaneous deposition of different materials. CONSTITUTION: A deposition apparatus comprises a deposition source unit including a first deposition source(11) and a second deposition source(12). The first deposition source has a first and a second side(13,14) which meet at the right angle, wherein the first side is shorter than the second side. The second deposition source has a third and a fourth side(15,16) which meet at the right angle, wherein the third side is shorter than the fourth side. The third side is arranged adjacent to the first side.
Abstract translation: 目的：提供使用其的有机发光二极管的沉积设备和制造方法，以便于在大的衬底上沉积并且能够同时沉积不同的材料。 构成：沉积装置包括包括第一沉积源（11）和第二沉积源（12）的沉积源单元。 第一沉积源具有以直角相交的第一和第二侧（13,14），其中第一侧比第二侧短。 第二沉积源具有以直角相遇的第三和第四侧（15,16），其中第三侧比第四侧短。 第三侧被布置成与第一侧相邻。
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