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Patent Agency Ranking
公开(公告)号：KR1020140147185A
公开(公告)日：2014-12-30
申请号：KR1020130069622
申请日：2013-06-18
Applicant: 삼성전기주식회사
CPC classification number: B81B3/0021 , B81B2201/0235 , B81B2201/025 , B81B2203/0127 , B81C1/00158 , B81C2201/013 , G01P15/09 , G01P2015/084
Abstract: An MEMS component according to the present invention comprises: a membrane; a weight body connected to the membrane; and a support part which is connected to the membrane and supports the weight body in a floating state to be displaced. The membrane has an insulating adhesion layer in the center. An upper electrode and an upper piezoelectric body are arranged on one side of the membrane, and a lower electrode and a lower piezoelectric body are arranged on the other side of the membrane.
Abstract translation: 根据本发明的MEMS部件包括：膜; 连接到膜的重量体; 以及支撑部，其连接到所述膜并且将所述配重体以浮动状态支撑以被移位。 该膜在中心具有绝缘粘合层。 上电极和上压电体设置在膜的一侧，下电极和下压电体设置在膜的另一侧。
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公开(公告)号：KR101474646B1
公开(公告)日：2014-12-17
申请号：KR1020130067307
申请日：2013-06-12
Applicant: 삼성전기주식회사
IPC: G01P15/09
CPC classification number: G01P15/0922 , G01P1/023 , G01P15/123 , H01H35/147
Abstract: 본 발명의 일실시예에 따른 가속도 센서는 질량체와, 압저항체 및 압전체가 일면에 형성되고, 상기 질량체가 결합된 가요성 빔과, 상기 가요성 빔이 결합되고, 상기 질량체가 부상되도록 가요성 빔을 지지하는 지지부를 포함한다.
Abstract translation: 本发明涉及加速度传感器。 根据本发明的一个实施例的加速度传感器包括质量块，柔性梁，其在其一侧上具有压电电阻器和压电元件并与该组合件组合;以及支撑单元，其与柔性梁和支撑件 柔性梁浮动质量。 根据本发明的实施例的加速度传感器在不浪费应变能的情况下被小型化并被最佳设计。
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公开(公告)号：KR1020140086529A
公开(公告)日：2014-07-08
申请号：KR1020120157159
申请日：2012-12-28
Applicant: 삼성전기주식회사
CPC classification number: G01P15/0802 , G01P3/4802 , G01P2015/0808
Abstract: An inertial sensor according to the present invention includes a sensor device which includes a mass, a flexible substrate part which supports the mass to be displaced, a support part which supports the flexible substrate part to freely move the mass in a floating condition, and a lower cap part which covers the lower part of the mass and is combined with the support part; a printed circuit board which is electrically connected to the sensor device; and a wire which electrically connects the sensor device and the printed circuit board and supports the sensor device to make the sensor device float on the printed circuit board.
Abstract translation: 根据本发明的惯性传感器包括传感器装置，其包括质量块，支撑要移动的质量块的柔性衬底部分，支撑柔性衬底部分以浮动状态自由移动的支撑部分，以及 下盖部分覆盖质量的下部并与支撑部分组合; 电连接到所述传感器装置的印刷电路板; 以及将传感器装置和印刷电路板电连接并支撑传感器装置以使传感器装置浮在印刷电路板上的导线。
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公开(公告)号：KR101321270B1
公开(公告)日：2013-11-04
申请号：KR1020110110904
申请日：2011-10-28
Applicant: 삼성전기주식회사
Abstract: 본 발명은 관성센서에 관한 것으로, 본 발명에 따른 관성센서(100)는 멤브레인(110), 멤브레인(110)의 중앙부분(113) 하부에 구비된 질량체(120), 멤브레인(110)의 테두리(115) 하부에 구비된 포스트(130) 및 질량체(120)의 하면에 포토레지스트(Photoresist)로 형성된 제1 충격흡수층(140)을 포함하는 구성이며, 제1 충격흡수층(140)의 재질인 포토레지스트는 저강성/고감쇠의 재료이므로, 질량체(120)가 하부캡(150)이나 제1 스토퍼(155)에 충돌하더라도 피크하중(Peak Load)을 낮출 수 있고, 그에 따라 질량체(120)를 지지하는 멤브레인(110)이 파손되는 것을 방지할 수 있다.
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公开(公告)号：KR1020130016607A
公开(公告)日：2013-02-18
申请号：KR1020110078638
申请日：2011-08-08
Applicant: 삼성전기주식회사
CPC classification number: G01C25/00 , B32B37/0076 , B32B37/02 , B32B37/12 , B32B37/18 , B32B38/10 , B32B2457/00 , C23F1/02 , G01C19/5755 , G01C19/5769 , G01P15/08 , G01P15/0802 , G01P15/135 , G01P2015/084 , Y10T156/1064
Abstract: PURPOSE: An inertia sensor and a method for manufacturing the same are provided to put an adhesive into a first cavity in the lower part of a lower cap when adhering a post and the lower cap, thereby preventing the adhesive from permeating into the post. CONSTITUTION: An inertia sensor(100) comprises a membrane(110), a mass(120), a post(130), and a lower cap(150). The membrane is formed into a plate shape. The mass is arranged in the lower part of a central portion(113) of the membrane. The post is arranged in the lower part of an edge(115) of the membrane in order to support the membrane. An edge of the lower cap is adhered to the downside of the post with an adhesive(140) in order to cover the mass and the post. A first cavity(155) where the adhesive is put into is formed on the edge of the lower cap.
Abstract translation: 目的：提供一种惯性传感器及其制造方法，当粘接柱和下盖时，将粘合剂放入下盖的下部的第一空腔中，从而防止粘合剂渗入柱中。 构成：惯性传感器（100）包括膜（110），质量块（120），柱（130）和下盖（150）。 膜形成为板状。 质量体布置在膜的中心部分（113）的下部。 柱被布置在膜的边缘（115）的下部，以便支撑膜。 下盖的边缘用粘合剂（140）粘附到柱的下侧以便覆盖质量块和柱。 在下盖的边缘上形成有粘合剂被放入的第一空腔（155）。
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