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公开(公告)号：KR1020140147163A
公开(公告)日：2014-12-30
申请号：KR1020130067308
申请日：2013-06-12
Applicant: 삼성전기주식회사
IPC: B81B3/00 , B81C1/00 , G01C19/56 , G01C19/5621
CPC classification number: B81B3/0035 , B81B3/0018 , B81B2201/03 , B81C1/00 , G01C19/5621
Abstract: An MEMS component according to the present invention comprises: a membrane; a weight body connected to the membrane; and a support part which is connected to the membrane and supports the weight body in a floating state to be displaced. The membrane has an insulating adhesion layer in the center. An upper electrode and an upper piezoelectric body are arranged on one side of the membrane, and a lower electrode and a lower piezoelectric body are arranged on the other side of the membrane.
Abstract translation: 根据本发明的MEMS部件包括：膜; 连接到所述膜的重量体; 以及支撑部分，该支撑部分连接到膜并且以浮动状态支撑重量体以被移位。 该膜在中心具有绝缘粘合层。 上部电极和上部压电体布置在膜的一侧上，下部电极和下部压电体布置在膜的另一侧上。
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公开(公告)号：KR1020130044391A
公开(公告)日：2013-05-03
申请号：KR1020110095788
申请日：2011-09-22
Applicant: 삼성전기주식회사
CPC classification number: G01P1/023 , G01C19/5783 , G01P15/09
Abstract: PURPOSE: An inertial sensor is provided to prevent bonding failure of a cap due to air expansion in the cap in advance. CONSTITUTION: An inertial sensor(100) includes a sensor part(110), an ASIC(120), a printed circuit board(130), and a cap(150). The sensor part includes a driver(111), a flexible substrate part(112), a support part, and a bottom cap. The flexible substrate part supports to displace the driver. The support part supports the flexible substrate part in order for the driver to move freely in a floated state. The bottom cap covers the bottom of the driver and is combined to the support part. The sensor part is stacked on the ASIC. The printed circuit board is stacked with the ASIC and is connected to the sensor part and the ASIC electrically. The cap covers the sensor part and the ASIC, and is combined to the printed circuit board. An air exhaustion hole(151) to exhaust internal air to the outside is formed in the cap.
Abstract translation: 目的：提供一种惯性传感器，用于防止由于盖子内的空气膨胀引起的盖子的接合故障。 构成：惯性传感器（100）包括传感器部分（110），ASIC（120），印刷电路板（130）和盖子（150）。 传感器部分包括驱动器（111），柔性基板部分（112），支撑部分和底盖。 柔性基板部分支撑以移动驱动器。 支撑部分支撑柔性基底部分，以便驾驶员以漂浮状态自由移动。 底盖覆盖驱动器的底部并与支撑部分组合。 传感器部分堆叠在ASIC上。 印刷电路板与ASIC堆叠并且电连接到传感器部分和ASIC。 盖覆盖传感器部分和ASIC，并且与印刷电路板组合。 在盖中形成有将内部空气排出到外部的排气孔（151）。
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公开(公告)号：KR1020120133524A
公开(公告)日：2012-12-11
申请号：KR1020110052208
申请日：2011-05-31
Applicant: 삼성전기주식회사
CPC classification number: G01P15/0802 , G01C19/5755 , G01P15/135
Abstract: PURPOSE: An inertia sensor is provided to secure a space in the lower part of a mass body without a separate bottom cap. CONSTITUTION: An inertia sensor(100) comprises a plate type membrane(110), a mass body(130), a post(140), and a bonding layer(160). The mass body is arranged at the lower center part of a plate type membrane. The post is arranged in the lower part of the circumference of the membrane and is thicker than the mass body and surrounds the mass body. The bonding layer is placed between the membrane and mass body and membrane and post.
Abstract translation: 目的：提供惯性传感器，用于固定质量体下部的空间，而无需单独的底盖。 构成：惯性传感器（100）包括板式膜（110），质量体（130），柱（140）和结合层（160）。 质量体布置在板状膜的下部中心部分。 该柱布置在膜的圆周的下部并且比质量体更厚并且围绕质量体。 粘合层位于膜和质量体之间，膜和柱之间。
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公开(公告)号：KR101506788B1
公开(公告)日：2015-03-27
申请号：KR1020130067308
申请日：2013-06-12
Applicant: 삼성전기주식회사
IPC: B81B3/00 , B81C1/00 , G01C19/56 , G01C19/5621
Abstract: 본 발명에 따른 MEMS 소자는 멤브레인과, 상기 멤브레인에 연결된 질량체와, 상기 멤브레인에 연결되고 상기 질량체를 변위가능하도록 부유상태로 지지하는 지지부를 포함하고, 상기 멤브레인은 전도성 접합층을 중심으로 일측에 상부전극 및 상부 압전체가 배치되고, 타측으로 하부전극 및 하부 압전체가 배치된다.
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公开(公告)号：KR1020130071040A
公开(公告)日：2013-06-28
申请号：KR1020110138338
申请日：2011-12-20
Applicant: 삼성전기주식회사
CPC classification number: G01P15/105 , G01V7/04
Abstract: PURPOSE: An inertia sensor is provided to easily detect the direction of gravity by sensing the direction of gravity in case a driving mass moves in the direction of the gravity. CONSTITUTION: A substrate unit(112) comprises a sensing electrode(112a) and a driving electrode(112b). The driving electrode support a driving mass(111) in order to be displaceable and moves the driving mass. The sensing electrode senses the movement of the driving mass. A sensor unit(110) is equipped with a support(113) and supports the substrate unit in order to enable the free movement of the driving mass in a floating state. A position initialization member(131) reciprocates in order to initialize the position of the driving mass. A driving mass position initialization module(130) is equipped with a coil unit(132) and is comprised in order to surround the position initialization member. An initialization member accommodating groove(111a) is formed in a form which corresponds to the position initialization member.
Abstract translation: 目的：提供惯性传感器，以便在驱动质量沿重力方向移动时，通过感测重力方向来轻松检测重力方向。 构成：衬底单元（112）包括感测电极（112a）和驱动电极（112b）。 驱动电极支撑驱动质量块（111）以便移动并移动驱动质量块。 感测电极感测驱动质量块的运动。 传感器单元（110）配备有支撑件（113）并且支撑基板单元，以便能够使浮动状态下的驱动质量块自由移动。 位置初始化构件（131）往复运动以初始化驾驶体的位置。 驱动质量位置初始化模块（130）配备有线圈单元（132）并且被包括以包围位置初始化构件。 初始化构件容纳槽（111a）形成为对应于位置初始化构件的形式。
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Patent Agency Ranking
公开(公告)号：KR101506789B1
公开(公告)日：2015-03-27
申请号：KR1020130069622
申请日：2013-06-18
Applicant: 삼성전기주식회사
CPC classification number: B81B3/0021 , B81B2201/0235 , B81B2201/025 , B81B2203/0127 , B81C1/00158 , B81C2201/013 , G01P15/09 , G01P2015/084
Abstract: 본 발명에 따른 MEMS 소자는 멤브레인과, 상기 멤브레인에 연결된 질량체와, 상기 멤브레인에 연결되고 상기 질량체를 변위가능하도록 부유상태로 지지하는 지지부를 포함하고, 상기 멤브레인은 절연 접합층을 중심으로 일측에 상부전극 및 상부 압전체가 배치되고, 타측으로 하부전극 및 하부 압전체가 배치된다.
Abstract translation: 根据本发明的MEMS装置包括膜片，连接到膜片的质量块，以及连接到膜片并支撑处于浮动状态的质量块以便可移位的支撑件， 电极和上压电元件被设置，并且下电极和下压电元件被设置在另一侧。
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公开(公告)号：KR1020130054473A
公开(公告)日：2013-05-27
申请号：KR1020110099071
申请日：2011-09-29
Applicant: 삼성전기주식회사
IPC: G01P15/097 , G01P15/09 , G01C19/56
CPC classification number: G01P15/0802 , B81B3/0051 , B81B2201/0235 , G01C19/5783 , G01P2015/0871
Abstract: PURPOSE: An inertia sensor is provided to maintain the gap between a driving mass of a sensor part and a stopper of a bottom cap constantly and accurately, by combining the sensor part and the bottom cap using a DFR(Dry Film Resist) after forming the stopper in the bottom cap. CONSTITUTION: An inertia sensor(100) includes a sensor part(110), a bottom cap(120) and a DFR(Dry Film Resist)(130). The sensor part includes a driving mass(111),a flexible substrate part(112) and a supporting part(113). The flexible substrate part supports the driving mass to enable displacement of the driving mass. The supporting part supports the flexible substrate part to enable free movement as the driving mass is floated. The bottom cap covers the bottom of the driving mass and is combined to the supporting part, and has a stopper restricting the displacement of the driving mass. The DFR combines the sensor part and the cover, and provides the gap between the driving mass and the stopper.
Abstract translation: 目的：提供一种惯性传感器，通过在形成传感器部件和底盖之后，通过使用DFR（干膜抗蚀剂）组合传感器部分和底盖来恒定和准确地保持传感器部件的驱动质量和底盖的止动件之间的间隙 塞在底盖。 构成：惯性传感器（100）包括传感器部分（110），底盖（120）和DFR（干膜抗蚀剂）130。 传感器部分包括驱动块（111），柔性基板部分（112）和支撑部分（113）。 柔性基板部分支撑驱动质量块以使驱动质量块能够移位。 支撑部件支撑柔性基板部分，以在驱动质量浮起时实现自由运动。 底盖覆盖驱动块的底部，并组合到支撑部分，并具有限制驱动质量块位移的挡块。 DFR结合了传感器部分和盖子，并提供驱动质量块和止动器之间的间隙。
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公开(公告)号：KR101843185B1
公开(公告)日：2018-03-29
申请号：KR1020110059656
申请日：2011-06-20
Applicant: 삼성전기주식회사
CPC classification number: G01P15/09 , G01C19/56 , G01P15/097
Abstract: 본발명의관성센서에관한것으로, 본발명에따른관성센서(100)는판상의멤브레인(110), 멤브레인(110)의중앙부분(113) 하부에구비된질량체(120), 멤브레인(110)의테두리(115) 하부에구비되어질량체(120)를둘러싸는포스트(130), 멤브레인(110)의상부에형성되고, 두께방향으로캐비티(141)가형성된압전체(140), 캐비티(141) 내에구비된감지전극(150) 및캐비티(141) 외에구비된구동전극(160)을포함하는구성이며, 감지전극(150)이구비되는부분의압전체(140) 두께를얇게형성함으로써, 관성센서(100)의감도를향상시킬수 있는효과가있다.
Abstract translation: 根据本发明的惯性传感器100包括板110，设置在膜110的中心部分113下方的质量块120， 压电体140，其形成在膜110的上部并且具有沿厚度方向的空腔141和形成在空腔141中的压电体140 感测电极150和驱动电极160设置在空腔141的外部。感测电极150所暴露的压电体140的厚度减小， 可以提高液晶显示装置的灵敏度。
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公开(公告)号：KR1020130067327A
公开(公告)日：2013-06-24
申请号：KR1020110110904
申请日：2011-10-28
Applicant: 삼성전기주식회사
Abstract: PURPOSE: An inertia sensor is provided to utilize photo-resist utilized for forming a mass by etching as an impact-absorbing layer, thereby improving the shock resistance of the inertia sensor without additional processes. CONSTITUTION: An inertia sensor(100) comprises a membrane(110), a mass(120), a post(130), and a first impact-absorbing layer(140). The mass is arranged under the central portion(113) of the membrane. The post is arranged under edge portions(115) of the membrane. The first impact-absorbing layer is formed of photo-resist in the underside of the mass.
Abstract translation: 目的：提供惯性传感器以利用通过蚀刻形成质量的光致抗蚀剂作为冲击吸收层，从而在没有附加工艺的情况下提高惯性传感器的抗冲击性。 构造：惯性传感器（100）包括膜（110），质量块（120），柱（130）和第一冲击吸收层（140）。 质量体布置在膜的中心部分（113）的下方。 柱被布置在膜的边缘部分（115）下方。 第一冲击吸收层由质量下侧的光致抗蚀剂形成。
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公开(公告)号：KR1020130006751A
公开(公告)日：2013-01-18
申请号：KR1020110059656
申请日：2011-06-20
Applicant: 삼성전기주식회사
CPC classification number: G01P15/09 , G01C19/56 , G01P15/097
Abstract: PURPOSE: An inertia sensor is provided to form the thickness of a piezoelectric body of a portion where a sensing electrode is arranged, thereby improving the sensitivity of the inertia sensor. CONSTITUTION: An inertia sensor(100) comprises a plate-shaped membrane(110), a mass body(120), a post(130), a piezoelectric body(140), a sensing electrode(150), and a driving electrode(160). The mass body is arranged in the lower part of a central portion(113) of the membrane. The post is arranged in the lower part of an edge(115) of the membrane, thereby surrounding the mass body. The piezoelectric body is formed in the upper part of the membrane and a cavity(141) is formed in the piezoelectric body in a thickness direction. The sensing electrode is arranged in the inside of the cavity. The driving electrode is arranged in the outside of the cavity.
Abstract translation: 目的：提供惯性传感器以形成感测电极布置的部分的压电体的厚度，从而提高惯性传感器的灵敏度。 构造：惯性传感器（100）包括板状膜（110），质量体（120），柱（130），压电体（140），感测电极（150）和驱动电极 160）。 质量体布置在膜的中心部分（113）的下部。 该柱布置在膜的边缘（115）的下部，从而围绕质量体。 压电体形成在膜的上部，并且在压电体中沿厚度方向形成有空腔（141）。 传感电极设置在腔的内部。 驱动电极配置在空腔的外侧。
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