公开(公告)号：KR100696858B1

公开(公告)日：2007-03-20

申请号：KR1020050087508

申请日：2005-09-21

Applicant: 삼성전자주식회사

Inventor： 최정식 ,  이정호 ,  조준현 ,  조윤정 ,  김태성 ,  김미애 ,  조규철 ,  이동준

IPC: H01L21/28

CPC classification number: H01L21/28556 ,  C07F5/069 ,  C23C16/18 ,  H01L21/32051 ,  H01L21/76876 ,  H01L21/76877

Abstract: An organic aluminium precursor and a method for forming a metal line using the same are provided to acquire an improved step coverage characteristic and enhanced electrical conductivity from an aluminium line. An organic aluminium precursor forms an aluminium line(140,150). The organic aluminium precursor contains aluminium as a main metal. The organic aluminium precursor further contains boro-hydride and tri-methylamine as ligand. An aluminium boro-hydride trimethylamine is used as the organic aluminium precursor. The aluminium boro-hydride trimethylamine is represented by a predetermined structural formula.

Abstract translation: 提供有机铝前体和使用其的金属线的形成方法，以获得改进的台阶覆盖特性并提高铝线的导电性。 有机铝前体形成铝线（140,150）。 有机铝前体含有铝作为主要金属。 有机铝前体还含有硼氢化物和三甲胺作为配体。 铝硼氢化铝三甲胺用作有机铝前体。 硼氢化铝三甲胺由预定的结构式表示。

公开(公告)号：KR1020070080526A

公开(公告)日：2007-08-10

申请号：KR1020060011892

申请日：2006-02-07

Applicant: 삼성전자주식회사

Inventor： 신동식 ,  조현호 ,  정홍희 ,  김미애

IPC: H01L21/02

Abstract: A fan filter unit is provided to keep the cleanness degree of a predetermined portion in an aiming range by restraining contaminants from penetrating into the predetermined portion by using a duct. A fan filter unit includes a housing(110) with an inlet and an outlet, a fan, a filter, and a duct. The fan(120) is installed in the housing adjacent to the inlet. The fan is used for exhausting the external air of the housing to the outlet through an inner portion of the housing. The filter(130) is installed at a portion between the inlet and outlet. The filter is used for filtering contaminants from the external air of the housing. The duct(140) is prolonged from the outlet in an opposite direction to the inlet. The duct exhausts the filtered air in order to prevent the penetration of the contaminants into a cleanness requiring portion.

Abstract translation: 提供了一种风扇过滤器单元，其通过使用管道来限制污染物渗透到预定部分中，将预定部分的清洁度保持在目标范围内。 风扇过滤器单元包括具有入口和出口的壳体（110），风扇，过滤器和管道。 风扇（120）安装在与入口相邻的壳体中。 风扇用于通过壳体的内部将壳体的外部空气排出到出口。 过滤器（130）安装在入口和出口之间的部分。 过滤器用于从外壳的外部空气中过滤污染物。 管道（140）从与出口相反的方向从出口延伸。 管道排出经过滤的空气，以防止污染物渗入无清洁要求部分。

公开(公告)号：KR100659394B1

公开(公告)日：2006-12-19

申请号：KR1020050072119

申请日：2005-08-08

Applicant: 삼성전자주식회사

Inventor： 조준현 ,  김미애

IPC: H01L21/316