플라즈마 발생 장치 및 플라즈마 발생 방법
    13.
    发明公开
    플라즈마 발생 장치 및 플라즈마 발생 방법 审中-实审
    等离子体发生系统和等离子体发生方法

    公开(公告)号:KR1020120103415A

    公开(公告)日:2012-09-19

    申请号:KR1020110109432

    申请日:2011-10-25

    Abstract: PURPOSE: A system and method for generating plasma are provided to stabilize plasma production by improving drying performance of a dielectric film. CONSTITUTION: A plasma electrode part(2) produces active species including ion or radical with micro gap plasma. A blowing device(3) forces to apply wind to a corresponding plasma electrode part. An explosion prevention device is installed outside the plasma electrode part. A power source(5) is provided to apply a high voltage to an electrode part. The plasma electrode part includes a pair of electrodes(21,22) having a dielectric film in an opposite side. An applying terminal applied with a voltage from the power source is formed in an edge part of the electrode in the electrode part. [Reference numerals] (AA) Wind; (BB,CC) Deodorization; (DD) Radical species(ion,radical); (EE) Attached virus sterilization

    Abstract translation: 目的:提供用于产生等离子体的系统和方法,以通过改善电介质膜的干燥性能来稳定等离子体生产。 构成:等离子体电极部分(2)产生包括离子或自由基与微隙等离子体的活性物质。 吹风装置(3)迫使风向相应的等离子体电极部分施加。 安装在等离子体电极部分外部的防爆装置。 提供电源(5)以向电极部件施加高电压。 等离子体电极部分包括在相对侧具有电介质膜的一对电极(21,22)。 在电极部分的电极的边缘部分中形成施加有来自电源的电压的施加端子。 (标号)(AA)风; (BB,CC)除臭; (DD)自由基(离子,自由基); (EE)附加病毒灭菌

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