Abstract:
A vapor deposition apparatus of semiconductor fabricating equipment is provided to exhaust waste gas while maintaining a vacuum state of the inside of a chamber by driving a switch valve in a manner that a main pump is stopped and a sub pump is automatically operated. Reaction gas is injected into a chamber(110). A main pipe(120) is connected to the chamber. A main pump(130) vacuums the inside of the chamber, connected to the main pipe in a manner that exhausts the waste gas in the chamber to the outside of the chamber. A sub pump(150) is installed in a detour pipe(140) connected to the main pipe. A switch valve(160) is installed in the detour pipe. A control part(170) controls the switch operation to the sub pump when the main pump operates abnormally. The sub pump can be installed in the case of the main pump.
Abstract:
본 발명은 자연산화막을 제거하기 위한 플라즈마 세정을 위한 공정 챔버 내부의 온도를 모니터링하는 반도체 제조 설비에 관한 것이다. 반도체 제조 설비는 PNC(Plasma Native Oxide Cleaning) 공정을 처리하는 플라즈마 세정 설비로, 공정 챔버 내부 일측에 내부 열전대를 구비하고, 공정 챔버 외부 일측에 외부 열전대를 구비한다. 내부 열전대는 공정 챔버 내벽과 배기부 사이의 일정 온도로 유지되도록 냉각되는 부위에 구비된다. 따라서 본 발명에 의하면, 내부 열전대를 이용하여 공정 진행 회수에 관계없이 실시간으로 공정 챔버 내부의 온도를 모니터링함으로써, 설비 관리가 용이하여 공정 불량 발생율을 낮출 수 있다. 반도체 제조 설비, 플라즈마, 자연산화막, 세정, 열전대, 온도 모니터링
Abstract:
PURPOSE: A method for manufacturing a light-emitting device is provided to omit the process for forming a wavelength converting part in each module by using a flip chip bonding method. CONSTITUTION: A bonding layer(100) is formed on a substrate(110). Light emitting devices(10) are formed on the bonding layer. A pressing member compresses the light emitting devices to form the same height. A wavelength converting part for covering the light emitting devices is formed on the bonding layer. The pressing member compresses the wavelength converters to planarize the upper surface of the wavelength converters. The bonding layer is separated from the light emitting devices.
Abstract:
PURPOSE: An LED module and a manufacturing method thereof are provided to reduce the cost for a package assembly by forming a lens on a substrate by COB(Chip On Board) method. CONSTITUTION: A substrate(100) is made of metal, silicon or ceramic. An electrode(200) is not overlapped with a groove(110) formed on the substrate. A light emitting device(300) is formed on the electrode by using a bump. A fluorescent material layer(400) includes a host material and an active material. A lens(500) is connected to the substrate through the groove.
Abstract translation:目的:提供一种LED模块及其制造方法,通过COB(Chip On Board)方法在基板上形成透镜来降低封装组件的成本。 构成:衬底(100)由金属,硅或陶瓷制成。 电极(200)不与形成在基板上的槽(110)重叠。 通过使用凸块在电极上形成发光器件(300)。 荧光材料层(400)包括主体材料和活性材料。 透镜(500)通过凹槽连接到基板。
Abstract:
PURPOSE: An apparatus for manufacturing a light emitting diode and a manufacturing method using the same are provided to control the thickness of fluorescent substance and to reduce the color deviation of the light emitting diode. CONSTITUTION: A light emitting device is installed on an adhesive film(20). The adhesive film is arranged on a lower plate mold(10). A medium plate mold(30) is arranged on the adhesive film. A separation mold is arranged in the upper or lower side of the adhesive film. A light emitting device acceptance mold is arranged to the opposite surface of the separation mold.
Abstract:
PURPOSE: A camera flash module is provided to improve productivity not by forming the gap between a lens and a light emitting device. CONSTITUTION: A cavity(110) is formed in a light emitting device package body(100). A light emitting device(200) is mounted on the cavity. A lens(400) is formed on the light emitting device package body. A refracting surface(421) of the lens is curved in the light emitting direction. A reflector(500) is connected to the light emitting device package body. The reflector controls the direction of the light emitted from the lens.
Abstract:
PURPOSE: A light emitting device lens, a light emitting device module including the same, and a manufacturing method of the light emitting device module using the same are provided to form a florescent substance layer and the lens in a lump by arranging the lens after dispensing the florescent substance layer. CONSTITUTION: A substrate(200) is made of metal, silicon or ceramic. A light emitting device chip(300) is mounted in a cavity(210) of the substrate. A lens is composed of an upper part(110) and a lower part(120). The lens includes a first depression part and a second depression part. A florescent substance layer is formed in the shape having the same radius of curvature as the upper part of the lens.