영상 처리 기반 리소그래피 시스템 및 표적물 코팅 방법
    11.
    发明公开
    영상 처리 기반 리소그래피 시스템 및 표적물 코팅 방법 有权
    基于图像处理的图像系统和涂覆目标对象的方法

    公开(公告)号:KR1020110085349A

    公开(公告)日:2011-07-27

    申请号:KR1020100005094

    申请日:2010-01-20

    CPC classification number: G03F7/70383 G03F7/2051 G03F7/70391 G03F7/7055

    Abstract: PURPOSE: An image processing based lithography system and a method for coating a target object are provided to thermally harden a coating layer, thereby compensating for ununiform coating on a lateral wall. CONSTITUTION: One target object is arranged on a substrate. A processing device(140) makes the target object by an image to determine an optical pattern for a coating layer of the target object. A light exposure device(150) provides light with a light pattern determined by the processing device to the substrate. A first coating device supplies photoresist to partial areas of the surfaces of the substrate and the target object. The photoresist includes a fluorescent substance. A second coating device forms a conductive film or an insulating film on at least partial areas of the surfaces of the substrate and the target object.

    Abstract translation: 目的:提供基于图像处理的光刻系统和涂覆目标物体的方法以热涂覆涂层,从而补偿侧壁上的不均匀涂层。 构成:将一个目标物体排列在基板上。 处理装置(140)通过图像使目标物体确定目标物体的涂层的光学图案。 曝光装置(150)将由处理装置确定的光图案的光提供给基板。 第一涂层装置将光致抗蚀剂供应到基板和目标物体的表面的部分区域。 光致抗蚀剂包括荧光物质。 第二涂覆装置在基板和目标物体的表面的至少部分区域上形成导电膜或绝缘膜。

    발광장치에 사용되는 복합필름, 발광장치 및 그 제조방법
    12.
    发明公开
    발광장치에 사용되는 복합필름, 발광장치 및 그 제조방법 有权
    用于发光装置的复合膜,发光装置及其制造方法

    公开(公告)号:KR1020110034072A

    公开(公告)日:2011-04-05

    申请号:KR1020090091441

    申请日:2009-09-28

    Abstract: PURPOSE: A composite film for a light emitting device, the light emitting device, and a manufacturing method thereof are provided to improve energy efficiency by using a high brightness LED as a light source. CONSTITUTION: A composite film(1820) is used in a light emitting device(1800) including a light emitting element(1830). A fluorescent layer includes a fluorescent element. An optical plate is arranged on the fluorescent layer and diffuses, reduces, or mixes light radiated by the fluorescent layer and the mixture thereof.

    Abstract translation: 目的:提供一种用于发光器件的复合膜,发光器件及其制造方法,以通过使用高亮度LED作为光源来提高能量效率。 构成:在包括发光元件(1830)的发光器件(1800)中使用复合膜(1820)。 荧光层包括荧光元件。 在荧光层上设置光学板,并且扩散,减少或混合由荧光层辐射的光及其混合物。

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