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公开(公告)号：KR100759095B1
公开(公告)日：2007-09-19
申请号：KR1020070017681
申请日：2007-02-22
Applicant: 이화여자대학교 산학협력단
CPC classification number: G02B26/0858 , B81B7/02 , B81B2201/04 , G02B6/3584 , G02B26/105
Abstract: A two-axis driven MEMS(Micro-Electro-Mechanical System) mirror using piezoelectric force is provided to secure independent driving along the directions of first and second axes perpendicular to each other and to implement a two-axis drive MEMS mirror having an improved fill-factor by using piezoelectric power. A two-axis driven MEMS mirror(300) using piezoelectric force is composed of a substrate; a silicon layer(310) formed on the substrate; a piezoelectric driving unit layer(320) formed on the silicon layer to tilt the MEMS mirror in the directions of first and second axes crossing each other and composed of first and second symmetrical parts(322,323) separated from each other and piezoelectric materials; a pair of mirror pedestals(330) arranged on the silicon layer and positioned in the first and second symmetrical parts, respectively; and a mirror plate(340) disposed on a pair of mirror pedestals. The first and second symmetrical parts comprise a first piezoelectric driving unit(326) of a first inverse-staple form having a rotary shaft(324) crossing adjacently to the center of the mirror plate and a second piezoelectric driving unit(328) of a second inverse-staple form installed in the first inverse-staple form of the first piezoelectric driving unit to surround the mirror plate.
Abstract translation: 提供使用压电力的双轴驱动的MEMS（微电子机械系统）镜，以确保沿着彼此垂直的第一和第二轴的方向的独立驱动，并且实现具有改进的填充的双轴驱动MEMS镜 因子通过使用压电功率。 使用压电力的双轴驱动MEMS反射镜（300）由基板构成; 形成在所述基板上的硅层（310） 形成在硅层上的压电驱动单元层（320），用于使MEMS反射镜沿彼此交叉的第一和第二轴线的方向倾斜，并且由彼此分离的第一和第二对称部分（322,323）和压电材料组成; 布置在硅层上并分别位于第一和第二对称部分中的一对反射镜基座（330） 以及设置在一对镜座上的镜板（340）。 第一和第二对称部分包括具有与镜板中心相邻的旋转轴（324）的第一反相装置形式的第一压电驱动单元（326）和第二压电驱动单元（328），第二压电驱动单元 安装在第一压电驱动单元的第一反相装置中以包围镜板的反相装置。
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Patent Agency Ranking
公开(公告)号：KR100921433B1
公开(公告)日：2009-10-14
申请号：KR1020080127030
申请日：2008-12-15
Applicant: 이화여자대학교 산학협력단
CPC classification number: G02B26/0833 , B81B2201/042 , B81B2203/04 , G02B26/0841
Abstract: PURPOSE: A method for manufacturing a micromirror having an inclined electrode using electrolysis plating is provided to reduce a driving voltage and increase a driving angle which is available by forming electrode to be sloped by using electroplating. CONSTITUTION: A method for manufacturing a micromirror having a inclined electrode using electrolysis plating is comprised of the steps: forming an electroplating frame on a first substrate to determine separation between the bottom electrodes and the size of it(S130); forming the inclined bottom electrode on the first substrate using a electroplating(S140); and removing the electroplating frame from the first substrate(S150).
Abstract translation: 目的：提供一种使用电解电镀制造具有倾斜电极的微反射镜的方法，以减小驱动电压并增加通过使用电镀形成待倾斜的电极可获得的驱动角度。 构成：使用电解电镀制造具有倾斜电极的微反射镜的方法包括以下步骤：在第一基板上形成电镀框架以确定底部电极之间的间隔及其尺寸（S130）; 使用电镀在所述第一基板上形成所述倾斜底部电极（S140）; 以及从所述第一基板移除所述电镀框架（S150）。
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公开(公告)号：KR100759099B1
公开(公告)日：2007-09-19
申请号：KR1020070017685
申请日：2007-02-22
Applicant: 이화여자대학교 산학협력단
CPC classification number: G02B26/0841 , B81B7/02 , B81B2201/04 , G02B6/3584 , G02B26/105
Abstract: An independent two-axis driven MEMS(Micro-Electro-Mechanical System) mirror using electrostatic force is provided to independently drive in the directions of first and second axes crossing each other and to move at the specific angle correspondently to the input driving voltage by an analog control method. An independent two-axis driven MEMS mirror(300) using electrostatic force is composed of a substrate; a lower silicon layer(310) formed on the substrate; an interlayer insulating film disposed formed on the lower silicon layer; an upper silicon layer(350) arranged on the interlayer insulating film; and a mirror plate disposed on the upper silicon layer. One of the lower and upper silicon layers is a driving unit layer receiving driving voltage and the other is a ground layer receiving ground voltage.
Abstract translation: 提供了使用静电力的独立的双轴驱动MEMS（微电子机械系统）反射镜，以独立地驱动彼此交叉的第一和第二轴的方向，并以与输入驱动电压相对应的特定角度移动 模拟控制方法。 使用静电力的独立的双轴驱动的MEMS反射镜（300）由衬底组成; 形成在所述基板上的下硅层（310） 设置在所述下硅层上的层间绝缘膜; 布置在所述层间绝缘膜上的上硅层（350）; 以及设置在上硅层上的镜板。 下层硅层和上硅层中的一层是接收驱动电压的驱动单元层，另一层是接地电压的接地层。
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公开(公告)号：KR100904685B1
公开(公告)日：2009-06-24
申请号：KR1020080019609
申请日：2008-03-03
Applicant: 이화여자대학교 산학협력단
IPC: G01J3/02
Abstract: An optic module for observing multi-wavelength light is provided to analyze a signal from an object effectively by splitting the signal using a mirror capable of varying the reflection angle at high speed and an optical signal detector. An optic module for observing multi-wavelength light comprises a mirror(110) capable of varying the reflection angle at high speed, an aperture(115) formed beneath the mirror, a first optical signal detector(120) for detecting an optical signal(125) from the signal reflected by the mirror, second optical signal detectors(130,140) for detecting optical signal in a first wavelength range and optical signal in the other wavelength ranges from the signal reflected by the mirror, a controller controlling the mirror, and a body(150) providing an optical path from the mirror to the first or second optical signal detector.
Abstract translation: 提供了一种用于观察多波长光的光学模块，通过使用能够高速改变反射角的反射镜和光信号检测器分离信号，有效地分析来自对象的信号。 一种用于观察多波长光的光学模块，包括能够高速改变反射角的反射镜（110），形成在反射镜下方的孔（115），用于检测光信号的第一光信号检测器（125） ），用于检测第一波长范围的光信号的第二光信号检测器（130,140）和其他波长的光信号的范围从反射镜反射的信号，控制镜的控制器和主体 （150）提供从反射镜到第一或第二光信号检测器的光路。
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公开(公告)号：KR100888076B1
公开(公告)日：2009-03-11
申请号：KR1020080041189
申请日：2008-05-02
Applicant: 이화여자대학교 산학협력단
IPC: G02B26/08
CPC classification number: G02B26/0841 , B81C1/00134 , B81C1/00531 , G02B6/3584 , G02B26/105 , H01L2924/1461
Abstract: A method for manufacturing a micro-mirror using a self-aligned electrode is provided to etch a mirror and a bottom electrode after bonding a micromirror and the bottom electrode. A micromirror manufacturing method utilizing the self-aligned electrode is comprised of a forming a micromirror(S10), a forming the bottom electrode formation(S20), jointing(S30), etching at the same time(S40). A micromirror is formed on the first wafer, and while forming a support. The support is connection member in jointing, and the bottom electrode is formed on the second wafer. The first and the second wafer are jointed in the jointing step, and the mirror and the bottom electrode are etched at the same time.
Abstract translation: 提供了使用自对准电极制造微镜的方法，用于在结合微反射镜和底电极之后蚀刻反射镜和底电极。 利用自对准电极的微镜制造方法包括形成微镜（S10），形成底电极形成（S20），接合（S30），同时蚀刻（S40）。 在第一晶片上形成微镜，同时形成支撑体。 支撑体是接合处的连接构件，底部电极形成在第二晶片上。 第一和第二晶片在接合步骤中接合，同时对反射镜和底部电极进行蚀刻。
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公开(公告)号：KR100767059B1
公开(公告)日：2007-10-15
申请号：KR1020070064147
申请日：2007-06-28
Applicant: 이화여자대학교 산학협력단
CPC classification number: G02B27/648 , G03B39/005 , G02B27/022 , G02B26/0825
Abstract: An optical system using a mirror which controls a reflective angle at high speed is provided to enable a wide field of view to be compatible with a high resolution by using a mirror which adjusts a reflective angle at high speed. An optical system using a mirror which controls a reflective angle at high speed includes a triggering optical module(110), an imaging optical module(120), a mirror(130), and a control unit. The triggering optical module(110) has a wide field of view, and detects an object in a wide range. The imaging optical module(120) has a narrower field of view than the triggering optical module(110), but has a high resolution, and observes the object in detail. The mirror(130) is installed on a front of the imaging optical module(120), and controls the reflective angle at high speed. The control unit determines whether the object detected in the triggering optical module(110) is the object to be observed. The control unit controls the mirror(130) so that the detected optical signal of the object is imaged and observed on the imaging optical module(120) if the detected object is determined as the object to be observed.
Abstract translation: 提供了一种使用高速控制反射角的反射镜的光学系统，通过使用高速调节反射角的反射镜，能够使广视野与高分辨率兼容。 使用控制高速反射角的反射镜的光学系统包括触发光学模块（110），成像光学模块（120），反射镜（130）和控制单元。 触发光学模块（110）具有宽的视野，并且在宽范围内检测对象。 成像光学模块（120）具有比触发光学模块（110）更窄的视野，但是具有高分辨率，并且详细地观察对象。 镜子130安装在成像光学模块120的前面，并且高速地控制反射角度。 控制单元确定在触发光学模块（110）中检测到的对象是否是要观察的对象。 如果检测对象被确定为要观察的对象，则控制单元控制反射镜（130），使得检测到的物体的光信号被成像并在成像光学模块（120）上观察。
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