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公开(公告)号：KR1020040099808A
公开(公告)日：2004-12-02
申请号：KR1020030031918
申请日：2003-05-20
Applicant: 전자부품연구원
IPC: H01H59/00
Abstract: PURPOSE: An MEMS(Micro Electro Mechanical System) RF(Radio Frequency) switch is provided to induce a high power by using low voltage. CONSTITUTION: An MEMS RF switch includes input and output electrodes(110,120), a pair of anchors(131a,131b), a pair of first structures(132a,132b), a second structure(133), a third structure, a pair of fourth structures(135a,135b), an armature(130), and piezoelectric drivers(151,152). The input and output electrodes are spaced from each other on one side of a substrate. The anchors are spaced from each of the input and output electrodes and are formed to be spaced from each other on the substrate. The first structures are extended on one side of the anchors and are formed to be floating above the substrate. The structure includes two ends coupled with longitudinal ends of the first structures. The third structure is extended between the first structure from a central portion of the second structure and to a position above the input and output electrodes. The fourth structures are extended to the third structure. The armature is formed on a lower portion of the third structure and is made of a conductive material. The piezoelectric drivers are formed on each of the first structures.
Abstract translation: 目的：提供MEMS（微机电系统）RF（射频）开关，通过使用低电压来诱发高功率。 构成：MEMS RF开关包括输入和输出电极（110,120），一对锚定件（131a，131b），一对第一结构（132a，132b），第二结构（133），第三结构 第四结构（135a，135b），电枢（130）和压电驱动器（151,152）。 输入和输出电极在衬底的一侧彼此间隔开。 锚定件与每个输入和输出电极间隔开并且形成为在基板上彼此间隔开。 第一结构在锚固体的一侧上延伸并且被形成为浮在基底上方。 该结构包括与第一结构的纵向端部连接的两端。 第三结构从第二结构的中心部分到第一结构之间延伸到输入和输出电极之上的位置。 第四个结构被扩展到第三个结构。 电枢形成在第三结构的下部，并由导电材料制成。 压电驱动器形成在每个第一结构上。
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公开(公告)号：KR1020160139687A
公开(公告)日：2016-12-07
申请号：KR1020150075016
申请日：2015-05-28
Applicant: 전자부품연구원
Inventor： 조남규
IPC: H01L21/304 , H01L21/683 , H01L21/02
Abstract: 보다간단한구조로반도체웨이퍼의균일한연마가가능한반도체웨이퍼연마장치가제공된다. 본발명에따른반도체웨이퍼연마장치는회전운동가능한시편이안착되는시편안착부및 시편을연마할수 있는직선운동가능한연마부를포함한다.
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公开(公告)号：KR1020150052599A
公开(公告)日：2015-05-14
申请号：KR1020130134245
申请日：2013-11-06
Applicant: 전자부품연구원
Inventor： 조남규
CPC classification number: G01L9/04 , G01L9/0055 , G01L19/145
Abstract: 압력센서가제공되며, 압력에기초하여변형되는제1 부분과제1 부분의수평선상에서제1 부분을지지하는제2 부분을포함하는다이아프램(diaphragm), 제1 부분위에위치하고다이아프램에적용되는스트레인을감지하는스트레인게이지(strain gauge), 제2 부분위에위치하며스트레인게이지와전기적으로연결되어있으며스트레인게이지외측의수평방향에위치하는제1 회로기판, 제1 회로기판위에위치하며제1 회로기판과전기적으로연결되어있는제2 회로기판을포함하는제1 하우징, 그리고제2 회로기판의전기적신호를외부로전달하는제1 전극로드를포함하는제2 하우징을포함한다.
Abstract translation: 提供一种压力传感器，包括：膜片，包括要被压力变换的第一部分和第二部分，以支撑第一部分的水平线上的第一部分; 位于第一部分上的应变计，以检测施加到隔膜的应变; 定位在第二部分上的第一电路板，电连接到应变计，并且位于应变片的外侧的水平方向上; 第一壳体，其位于所述第一电路板上并且包括电连接到所述第一电路板的第二电路板; 以及第二壳体，包括将第二电路板的电信号传输到外部的第一电极棒。
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公开(公告)号：KR101215922B1
公开(公告)日：2012-12-27
申请号：KR1020100078350
申请日：2010-08-13
Applicant: 전자부품연구원
Abstract: 본발명은제조공정을단순화시키고, 접합특성과감지특성을향상시킬수 있는정전용량형(capacitive type) 압력센서및 그의제조방법을제공하는데그 목적이있다. 이를위해, 본발명은홈부를구비한유리기판과, 상기홈부내에형성된상부전극과, 후면에멤브레인을구비한실리콘기판과, 상기실리콘기판의전면에이온주입공정을실시하여상기실리콘기판의전면으로부터일정깊이를갖도록상기실리콘기판내에서로이격되어형성된제1 및제2 하부전극을포함하고, 상기제1 및제2 하부전극의적어도일부가상기상부전극과대향되도록상기실리콘기판과상기유리기판이양극접합(anodic bonding)으로이종접합된정전용량형압력센서를제공한다. 따라서, 본발명은실리콘기판내에제1 및제2 하부전극을형성하고, 유리기판상에상부전극을형성하며, 상기실리콘기판과상기유리기판을양극접합으로이종접합시켜정전용량형압력센서를구현함으로써종래기술에따른실리콘융합접합방법(실리콘-실리콘접합)에비해공정을단순화시키고, 접합및 감도특성을향상시킬수 있다.
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公开(公告)号：KR1020120015845A
公开(公告)日：2012-02-22
申请号：KR1020100078321
申请日：2010-08-13
Applicant: 전자부품연구원
CPC classification number: G01L9/12 , G01L9/0042 , G01L9/0073 , G01L19/0076 , H01L29/66007 , H01L29/84
Abstract: PURPOSE: A capacitive pressure sensor is provided to miniaturize a size by minimizing parasitic capacitance and to form a conductive sealing film in an anchor shape. CONSTITUTION: A capacitive pressure sensor comprises a substrate(110), a first insulating layer(111), a cavity(116), a second insulating layer(113), sealing films(117), and an upper electrode(115). The substrate is used as a lower electrode. The first insulating layer is formed on the substrate. The cavity is formed in the first insulating layer. The second insulating layer has an opening connected to the cavity and is formed on the first insulating layer to cover the cavity. The sealing films are formed using a conductive material. The upper electrode is electrically separated from the sealing films and is formed on the second insulating layer to be overlapped with the cavity.
Abstract translation: 目的：提供电容式压力传感器，通过最小化寄生电容并形成锚定形状的导电密封膜来使尺寸小型化。 构成：电容式压力传感器包括基板（110），第一绝缘层（111），空腔（116），第二绝缘层（113），密封膜（117）和上电极（115）。 基板用作下电极。 第一绝缘层形成在基板上。 空腔形成在第一绝缘层中。 第二绝缘层具有连接到空腔的开口，并形成在第一绝缘层上以覆盖空腔。 密封膜使用导电材料形成。 上电极与密封膜电隔离，并形成在第二绝缘层上以与空腔重叠。
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Patent Agency Ranking
公开(公告)号：KR1020110055955A
公开(公告)日：2011-05-26
申请号：KR1020090112592
申请日：2009-11-20
Applicant: 전자부품연구원
IPC: G01N27/414
Abstract: PURPOSE: A sensing device is provided to ensure improved quality of an ion-sensitive membrane and prevent the variation of threshold voltage of an FET because the membrane is manufactured through an LPCVD process. CONSTITUTION: A sensing device comprises a first chip(110) including an ion-sensitive membrane, a second chip(120) including a field effect transistor which detects the surface potential of the ion-sensitive membrane, and a connection part(130) which connects the first and second chips. The first and second chips are integrated on a printed circuit board(100).
Abstract translation: 目的：提供感测装置，以确保提高离子敏感膜的质量，并防止FET的阈值电压的变化，因为膜是通过LPCVD工艺制造的。 构成：感测装置包括包括离子敏感膜的第一芯片（110），包括检测离子敏感膜的表面电位的场效应晶体管的第二芯片（120）和连接部分（130），其连接部分 连接第一和第二芯片。 第一和第二芯片集成在印刷电路板（100）上。
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公开(公告)号：KR2020100006710U
公开(公告)日：2010-07-01
申请号：KR2020080017033
申请日：2008-12-23
Applicant: 전자부품연구원
Abstract: 본 고안은 내시경용 카테터가 삽입되어지는 개선된 유도관 구조에 관한 것으로, 본 고안에 따르면, 내시경이 삽입되어 형성된 제1 유도관; 상기 튜브의 상측부에 형성되고, 카테터가 삽입되는 카테터 삽입구; 카테터가 삽입되어 유도되는 제2 유도관; 및 상기 카테터 삽입구 근방에 형성된 액체 투입구를 포함하고, 상기 액체 투입구로부터 투입된 액체는 상기 제2 유도관을 통해 흐르는 것을 특징으로 하는 내시경용 튜브가 제공된다.
상기 구조에 따르면, 제2 유도관에 카테터가 유지된체로 액체 투입관으로 세정액을 투입할 수 있기 때문에, 카테터를 세정하기 위해 카테터를 꺼내는 번거로움이 제거될 수 있다.
유도관, 카테터, 내시경, 산도 측정-
公开(公告)号：KR1020100001548A
公开(公告)日：2010-01-06
申请号：KR1020080061490
申请日：2008-06-27
Applicant: 전자부품연구원
Abstract: PURPOSE: A torque measurement is provided to measure the torque by measuring the change of the magnet force due to the twist of an input shaft and an output shaft. CONSTITUTION: A first magnet ring(140) is fixed to one side of an input shaft(110). A torsion bar(120) transfers the torque of the input shaft to the output shaft. One side of the output shaft(130) is fixed to one side of the torsion bar. The output shaft receives the torque of the torsion bar. A second magnet ring(150) is fixed in one side of the output shaft to face to the first magnet ring. A first magnetic sensor measures the magnetic line variation between the first and second magnet rings due to the twisting of the torsion bar.
Abstract translation: 目的：通过测量由于输入轴和输出轴的扭曲引起的磁力变化来提供扭矩测量。 构成：第一磁体环（140）固定在输入轴（110）的一侧。 扭杆（120）将输入轴的扭矩传递到输出轴。 输出轴（130）的一侧固定在扭力杆的一侧。 输出轴接收扭杆的扭矩。 第二磁环（150）固定在输出轴的一侧以面对第一磁环。 第一磁传感器由于扭杆的扭转而测量第一和第二磁环之间的磁线变化。
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公开(公告)号：KR1020080061301A
公开(公告)日：2008-07-02
申请号：KR1020070137347
申请日：2007-12-26
IPC: H01L29/84
Abstract: A tactile sensor is provided to reduce the size of a tactile sensor by decreasing the number of electrodes. A tactile sensor receives a tactile sensor select signal and a clock signal as one common signal. A signal separation part(120) receives the common signal to separate the common signal into the select signal and the clock signal. A unit device select switch(130) activates the tactile sensor according to the select signal. An output part(140) sequentially outputs piezoresistive signals of a plurality of piezoresistive detection elements through a common output terminal according to the clock signal. The output part can include a switch with respect to each piezoresistive detection element and a control unit for controlling the plurality of switches according to the clock signal. The tactile sensor can sequentially and serially outputs the piezoresistive signals.
Abstract translation: 提供了一种触觉传感器，通过减少电极的数量来减小触觉传感器的尺寸。 触觉传感器接收触觉传感器选择信号和时钟信号作为一个公共信号。 信号分离部分（120）接收公共信号以将公共信号分离成选择信号和时钟信号。 单元设备选择开关（130）根据选择信号激活触觉传感器。 输出部（140）根据时钟信号通过公共输出端依次输出多个压阻检测元件的压阻信号。 输出部分可以包括关于每个压阻检测元件的开关和用于根据时钟信号控制多个开关的控制单元。 触觉传感器可以顺序地和串行地输出压阻信号。
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公开(公告)号：KR1020080060079A
公开(公告)日：2008-07-01
申请号：KR1020060134175
申请日：2006-12-26
Applicant: 전자부품연구원
CPC classification number: A61B1/041 , A61B2560/0242
Abstract: A memory-embedded capsule endoscope is provided to improve convenience of use without a separate information receiver by having a flash memory. At least one lighting unit(210) lights a predetermined part inside a body. At least one image sensor unit(220) obtains image information of the predetermined part lighted by the lighting unit. A signal processing unit(230) controls the image sensor unit and compresses data corresponding to the obtained image information. A storing unit(250) accumulates and stores the compressed data until a capsule endoscope(200) is discharged from the body. A control unit(240) controls the signal processing unit and the storing unit. A power supply unit(260) supplies driving power to the capsule endoscope.
Abstract translation: 提供了一种内存式胶囊型内窥镜，以通过具有闪速存储器来提高使用方便性，而无需单独的信息接收器。 至少一个照明单元（210）照亮身体内部的预定部分。 至少一个图像传感器单元（220）获得由照明单元点亮的预定部分的图像信息。 信号处理单元（230）控制图像传感器单元并压缩与获得的图像信息相对应的数据。 存储单元（250）累积并存储压缩数据，直到胶囊型内窥镜（200）从身体排出。 控制单元（240）控制信号处理单元和存储单元。 电源单元（260）向胶囊型内窥镜供给驱动电力。
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