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公开(公告)号：KR101060239B1
公开(公告)日：2011-08-29
申请号：KR1020100083178
申请日：2010-08-26
IPC: H01L31/0445 , H01L31/06
CPC classification number: H01L31/1872 , H01L31/046 , H01L31/0465 , H01L31/072 , Y02E10/50 , Y02P70/521
Abstract: PURPOSE: An integrated thin film photoelectromotive device and a manufacturing method thereof are provided to improve energy conversion efficiency by reducing the reactive area of a unit cell. CONSTITUTION: Trenches are formed on a substrate(200). A first extrinsic polycrystalline semiconductor material layer(210) is continuously formed on one side of the trench and a substrate which is adjacent to the trench. A second extrinsic polycrystalline semiconductor material layer(230) is entirely overlapped in a space between the trenches and is partially overlapped with the inside of the trenches.
Abstract translation: 目的：提供一种集成的薄膜光电装置及其制造方法，以通过减小单位电池的反应面积来提高能量转换效率。 构成：在衬底（200）上形成沟槽。 第一外部多晶半导体材料层（210）连续地形成在沟槽的一侧和与沟槽相邻的衬底。 第二非本征多晶半导体材料层（230）在沟槽之间的空间中完全重叠，并且与沟槽的内部部分地重叠。
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公开(公告)号：KR1020110014811A
公开(公告)日：2011-02-14
申请号：KR1020090072353
申请日：2009-08-06
IPC: H01L31/042
CPC classification number: H01L31/03923 , H01L31/022425 , H01L31/0392 , H01L31/03925 , H01L31/0463 , H01L31/0465 , H01L31/076 , Y02E10/541 , Y02E10/548 , Y02P70/521
Abstract: PURPOSE: A photovoltaic device and a manufacturing method thereof are provided to supply output voltage which vary in size by easily setting the number of unit cells formed on a substrate. CONSTITUTION: A trench(301,303,305) and a groove(302,304) are formed on a substrate(300). A first electrode layer(310) and a secondary electrode layer(320) are formed between the trenches. A photoelectric conversion layer(330) is formed on the first electrode layer or the secondary electrode layer. A second electrode layer(340) is formed by diagonally depositing a second conductive material on the photoelectric conversion layer. A conductive layer(350) is formed by depositing a third conductive material on the second electrode layer.
Abstract translation: 目的：提供一种光电器件及其制造方法，通过容易地设定在基板上形成的单元电池的数量来提供尺寸变化的输出电压。 构成：在衬底（300）上形成沟槽（301,303,305）和沟槽（302,304）。 在沟槽之间形成第一电极层（310）和次级电极层（320）。 在第一电极层或次电极层上形成光电转换层330。 通过在光电转换层上对角地沉积第二导电材料形成第二电极层（340）。 通过在第二电极层上沉积第三导电材料形成导电层（350）。
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公开(公告)号：KR1020070004320A
公开(公告)日：2007-01-09
申请号：KR1020050059825
申请日：2005-07-04
Applicant: 한국과학기술원
CPC classification number: H04N5/7458
Abstract: A projection display device is provided to increase light utilizing efficiency and improve the picture quality of a projection screen by using a micro-lens array and a micro-mirror array. A substrate(40) is distanced from a light source at a predetermined interval. A plurality of micro-mirrors(30) is rotatively installed on a surface of the substrate so that each of the micro-mirrors has a predetermined sized incident angle with respect to an incident light. A first micro-lens array(70) is disposed between the light source and the substrate, and has a plurality of first micro-lenses corresponding to the micro-mirrors. A second micro-lens array(80) is disposed on an advancing path of a reflected light, which is reflected from the micro-mirrors. The second micro-lens array has a plurality of second micro-lenses corresponding to the micro-mirrors.
Abstract translation: 提供投影显示装置，以通过使用微透镜阵列和微镜阵列来增加光利用效率并提高投影屏的图像质量。 衬底（40）以预定的间隔与光源隔开。 多个微反射镜（30）被旋转地安装在基板的表面上，使得每个微反射镜相对于入射光具有预定尺寸的入射角。 第一微透镜阵列（70）设置在光源和衬底之间，并且具有对应于微镜的多个第一微透镜。 第二微透镜阵列（80）设置在从微反射镜反射的反射光的前进路径上。 第二微透镜阵列具有对应于微镜的多个第二微透镜。
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公开(公告)号：KR1020030070445A
公开(公告)日：2003-08-30
申请号：KR1020020009989
申请日：2002-02-25
Applicant: 한국과학기술원
IPC: G02B26/08
Abstract: PURPOSE: A micromirror device using a cantilever is provided to obtain two stable states of rotation by forming the micromirror device having a symmetric structure. CONSTITUTION: A micromirror device using a cantilever includes a substrate(21), two electrodes(22,23), a cantilever support portion(24), two cantilevers(31,32), a couple of mirror support portions(26,27), and a mirror(20). An addressing circuit is formed on the substrate. The electrodes are formed on the substrate to be electrically connected to the addressing circuit. The cantilever support portion is formed vertically to a center of the substrate. The cantilever support portion is electrically connected to the addressing circuit. The cantilevers are horizontally supported by the cantilever support portion. The mirror support portions are formed vertically to each end of the cantilevers. The mirror is loaded on the mirror support portions. The cantilevers are modified by the electrostatic force between the electrodes and the cantilevers or the electrodes and the mirror.
Abstract translation: 目的：提供使用悬臂的微镜装置，通过形成具有对称结构的微镜装置来获得两种稳定的旋转状态。 构造：使用悬臂的微镜装置包括基板（21），两个电极（22,23），悬臂支撑部分（24），两个悬臂（31,32），一对反射镜支撑部分（26,27） ，和反射镜（20）。 在基板上形成寻址电路。 电极形成在基板上以电连接到寻址电路。 悬臂支撑部垂直于基板的中心形成。 悬臂支撑部分电连接到寻址电路。 悬臂由悬臂支撑部水平地支撑。 镜支撑部分垂直于悬臂的每一端形成。 镜子装载在镜子支撑部分上。 悬臂通过电极与悬臂或电极和反射镜之间的静电力来改变。
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公开(公告)号：KR101112494B1
公开(公告)日：2012-03-13
申请号：KR1020100023967
申请日：2010-03-17
IPC: H01L31/04
CPC classification number: Y02E10/50
Abstract: 본 발명의 광기전력 장치의 제조 방법은 제1 전극 및 제2 전극 사이에 위치하는 활성층을 챔버 내에서 형성하며, 미리 혼합된 수소 가스와 실리콘 포함 원료 가스가 상기 챔버 내로 유입되며, 상기 혼합된 수소 가스와 실리콘 포함 원료 가스의 수소 희석비는 주기적으로 증감하는 것을 특징으로 한다.
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Patent Agency Ranking
公开(公告)号：KR1020100127380A
公开(公告)日：2010-12-06
申请号：KR1020090045802
申请日：2009-05-26
CPC classification number: Y02E10/50 , Y02P70/521 , H01L31/18 , H01L31/04
Abstract: PURPOSE: A method for manufacturing a mold and a photovoltaic device by using the same are provided to manufacture the photovolatic device simply and inexpensively. CONSTITUTION: A mold manufacturing substrate(100), including the material that is not removed by a laser having a specific wave, is prepared. A layer(110) for producing a mold, including the material removed by the laser, is formed on the top of the substrate for producing the mold. The laser is irradiated on the layer for the mold production so that a groove(120) for the mold production is formed on the layer for the mold production.
Abstract translation: 目的：提供一种用于制造模具和使用该模具的光伏器件的方法，以简单且廉价地制造光电装置。 构成：制备包括不被具有特定波的激光去除的材料的模具制造衬底（100）。 在用于制造模具的基板的顶部上形成用于制造包括通过激光去除的材料的模具的层（110）。 将激光照射在用于模具生产的层上，使得用于模具生产的层上形成用于模具生产的槽（120）。
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17.发明授权
公开(公告)号：KR100817101B1
公开(公告)日：2008-03-26
申请号：KR1020070033378
申请日：2007-04-04
Applicant: 한국과학기술원
IPC: H01L21/027
CPC classification number: C09K19/544 , Y10T428/24802 , H01L21/0274 , B29C33/3842 , G03F7/2006 , H01L21/0275
Abstract: A method for forming a polymer or resist pattern is provided to form a polymer or resist pattern of a three-dimensional asymmetrical structure having various slopes and shapes by adjusting the diffusion degree and diffusion intensity together with the progression direction of incident light in a photolithography process while using conventional lithography equipment. Photosensitive polymer or resist is deposited on a substrate(400) to form a polymer or resist layer(410). An exposure portion is determined on the polymer or resist layer wherein a photomask(420), an embedded mask or a metal pattern can be formed on the polymer or resist layer. A light refraction layer(440) or a light diffusion layer(430) is disposed on the path of the light exposed to the polymer or resist layer. Light transmitting the light refraction layer and the light diffusion layer is irradiated to the exposure portion of the polymer or resist layer to form a polymer or resist pattern.
Abstract translation: 提供形成聚合物或抗蚀剂图案的方法，以通过在光刻工艺中调整扩散度和扩散强度以及入射光的进行方向来形成具有各种斜率和形状的三维不对称结构的聚合物或抗蚀剂图案 同时使用传统的光刻设备。 光敏聚合物或抗蚀剂沉积在基底（400）上以形成聚合物或抗蚀剂层（410）。 在聚合物或抗蚀剂层上确定曝光部分，其中可以在聚合物或抗蚀剂层上形成光掩模（420），嵌入掩模或金属图案。 在暴露于聚合物或抗蚀剂层的光的路径上设置光折射层（440）或光扩散层（430）。 将透射光折射层和光扩散层的光照射到聚合物或抗蚀剂层的曝光部分以形成聚合物或抗蚀剂图案。
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公开(公告)号：KR100726737B1
公开(公告)日：2007-06-11
申请号：KR1020050059825
申请日：2005-07-04
Applicant: 한국과학기술원
CPC classification number: H04N5/7458
Abstract: 본 발명은 마이크로렌즈 어레이와 마이크로미러 어레이를 이용한 프로젝션 디스플레이 장치에 관한 것이다.
본 발명에 따른 마이크로렌즈 어레이와 마이크로미러 어레이를 이용한 프로젝션 디스플레이 장치는, 광원으로부터 소정 거리만큼 이격된 기판과 입사되는 입사광에 대하여 일정한 크기의 입사각을 가지도록 기판의 표면에 회동가능하게 설치되는 다수의 마이크로미러 어레이와 각각의 마이크로미러 어레이에 대응되는 다수의 마이크로렌즈 어레이가 형성되며, 광원과 기판 사이의 소정의 위치에 설치되는 제1 마이크로렌즈 어레이에 대응되는 다수의 마이크로미러가 형성되며, 마이크로미러로부터 반사된 반사광이 진행하는 경로상에 설치되는 제2 마이크로렌즈 어레이를 포함하는 프로젝션 디스플레이 장치를 특징으로 이루어진다.
제1 마이크로렌즈 어레이, 제2 마이크로렌즈 어레이, 마이크로미러 어레이, 제3 마이크로렌즈 어레이, 초점-
公开(公告)号：KR100669260B1
公开(公告)日：2007-01-16
申请号：KR1020050068978
申请日：2005-07-28
Applicant: 한국과학기술원
Abstract: A method of manufacturing a mirror supporter of a micro-mirror element using a plating process is provided to completely level the mirror surface of the micro-mirror element and to secure the high light and darkness ratio by manufacturing the column supporting the mirror surface and removing the hole of the mirror surface. A method of manufacturing a mirror supporter(46) of a micro-mirror element using a plating process to reflect the light projected to a mirror(47) by rotating the mirror supported by the mirror supporter mechanically connected to a base plate by static electricity and elastic recovery force of a driving part(43) is composed of a step of forming a non-conductive pattern for the mirror supporter; a step of forming the mirror supporter by filling the pattern with the metal through the plating of the seed electrode; and a step of forming the mirror on the mirror supporter.
Abstract translation: 提供使用电镀工艺制造微镜元件的镜支撑件的方法，以使微镜元件的镜面完全平整，并且通过制造支撑镜面并除去的镜片来确保高亮度和黑暗度 镜面孔。 使用电镀工艺制造微镜元件的镜支撑件（46）的方法，该电镀工艺通过旋转由通过静电机械地连接到基板的镜支撑件支撑的反射镜来反射投射到反射镜（47）的光;以及 驱动部（43）的弹性恢复力由对镜支撑体形成非导电图案的步骤构成; 通过种子电极的电镀用金属填充图案来形成镜支撑件的步骤; 以及在镜子支撑件上形成镜子的步骤。
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公开(公告)号：KR1020060046844A
公开(公告)日：2006-05-18
申请号：KR1020040092330
申请日：2004-11-12
Applicant: 한국과학기술원
IPC: G02F1/035
CPC classification number: G02B26/023 , G02B6/353 , G02F1/1335
Abstract: 본 발명은 광 밸브에 관한 것으로서, 보다 상세하게는 불투명한 가동 박막과 경사 벽면으로 이루어진 도광로를 이용한 광 밸브에 관한 것이다.
본 발명에 따른 광 밸브는 경사면으로 형성된 벽면을 포함하는 도광로가 형성된 기판과, 상기 도광로가 형성된 기판에 대향하여 형성된 상부전극과, 상기 도광로의 경사 벽면 위에 형성된 하부전극과, 상기 기판 위에 일단이 부착되고, 상기 상부전극과 하부전극 사이에 형성된 가동박막과, 상기 하부전극과 가동 박막간에 전기적 단락을 방지하기 위해 형성된 제1 절연막과, 상기 상부전극과 가동 박막간에 전기적 단락을 방지하기 위해 형성된 제2 절연막을 포함하고, 상기 하부전극과 가동 박막 간 또는 상부전극과 가동 박막 간의 인가 전압에 따라 상기 상부전극측 또는 하부전극측으로 이동되어 상기 도광로를 개폐하는 특징을 갖는다.
평판, 디스플레이, 가동 박막, 경사 벽면, 도광로, 광 밸브, 배열, 백라이트,
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