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公开(公告)号：KR1020120039220A
公开(公告)日：2012-04-25
申请号：KR1020100100802
申请日：2010-10-15
Applicant: 한국과학기술원
Abstract: PURPOSE: Laser processing apparatus and method using the plasmon resonance are provided to minimize the heat affected zone, the residual stress, and the debris on a processed product. CONSTITUTION: A laser processing apparatus(1) using the plasmon resonance includes an conductive material(102) and a laser generating unit(100). The laser generating unit irradiates the conductive material with laser(104) for generating the electric field from the conductive material. Electrons(401) of a processed product(103) disposed near the conductive material are extracted by the electric field.
Abstract translation: 目的：提供使用等离子体共振的激光加工设备和方法，以最小化热影响区域，残余应力和加工产品上的碎屑。 构成：使用等离子体共振的激光加工装置（1）包括导电材料（102）和激光发生单元（100）。 激光发生单元用导体材料照射具有用于从导电材料产生电场的激光（104）的导电材料。 通过电场提取设置在导电材料附近的加工产品（103）的电子（401）。
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公开(公告)号：KR1020110137032A
公开(公告)日：2011-12-22
申请号：KR1020100057009
申请日：2010-06-16
Applicant: 한국과학기술원
IPC: B26F3/00 , B26F3/06 , B23K26/382 , H01S3/10
CPC classification number: B26F3/06 , B23K26/382 , H01S3/10
Abstract: PURPOSE: A cutting method through the nonlinear focal shift of a femtosecond pulse laser is provided to efficiently cut and process a thin transparent material using a femtosecond pulse laser and a lens. CONSTITUTION: A cutting method through the nonlinear focal shift of a femtosecond pulse laser is as follows. A modified section is formed by plasma defocusing based on the multi-photon ionization of a femtosecond pulse laser(100) irradiated to a workpiece(200). The modified section is lengthened by moving the focus of the femtosecond pulse laser in the depth direction of the workpiece.
Abstract translation: 目的：提供通过飞秒脉冲激光器的非线性焦点偏移的切割方法，以使用飞秒脉冲激光器和透镜来有效地切割和处理薄透明材料。 构成：通过飞秒脉冲激光器的非线性焦点偏移的切割方法如下。 基于照射到工件（200）的飞秒脉冲激光（100）的多光子电离，通过等离子体散焦形成修改部分。 通过在工件的深度方向上移动飞秒脉冲激光器的焦点，延长了修改部分。
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公开(公告)号：KR1020180073111A
公开(公告)日：2018-07-02
申请号：KR1020160176602
申请日：2016-12-22
Applicant: 한국과학기술원
IPC: G01N23/207 , G02B5/02
CPC classification number: G01N23/207 , G02B5/0231
Abstract: 극자외선고차조화파생성장치가개시된다. 일실시예는펨토초레이저발생기에서출력되는빛을전달하는광 전달수단과, 상기광 전달수단을통해전달받은빛이통과할때 근접장증폭이일어날수 있는금속박막이포함된사파이어를포함한다.
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公开(公告)号：KR101361980B1
公开(公告)日：2014-02-12
申请号：KR1020120105115
申请日：2012-09-21
Applicant: 한국과학기술원
IPC: G02B6/124
CPC classification number: G02B6/4221 , G02B6/124 , G02B6/2706 , G02B6/4204 , G02B6/4214 , G02B6/4226 , H01S3/0057 , H01S3/06754 , H01S3/10007 , H01S3/1301
Abstract: The present invention relates to an active compensation system of a chirp pulse amplification system having an optical fiber as an amplification medium. The chirp pulse amplification system including a diffraction grating pulse dilator compares and compensates the position of the beam emitted from the pulse dilator and an optical fiber amplification load. The present invention comprises a position measuring unit for detecting the position of the beam emitted therefrom and a compensation unit for compensating to match the positions of the two beams detected by the position measuring unit via controlling them optically.
Abstract translation: 本发明涉及一种具有光纤作为放大介质的啁啾脉冲放大系统的有源补偿系统。 包括衍射光栅脉冲扩张器的啁啾脉冲放大系统比较和补偿从脉冲扩张器发射的光束的位置和光纤放大负载。 本发明包括用于检测从其发射的光束的位置的位置测量单元和补偿单元，用于通过光学控制来补偿由位置测量单元检测到的两个光束的位置。
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15.发明公开포화흡수체와 비선형 편광 회전 현상을 통해 모드 동기가 되는 10 ＭＨｚ 이하의 반복률을 갖는 광섬유 레이저 공진기 有权SUB 10MHZ - 所有正常分散的光纤激光振荡器由可饱和吸收器和非线性偏振旋转原型模拟
公开(公告)号：KR1020130134199A
公开(公告)日：2013-12-10
申请号：KR1020120057545
申请日：2012-05-30
Applicant: 한국과학기술원
CPC classification number: H01S3/06704 , G02B27/149 , H01S3/10061 , H01S5/5072
Abstract: The present invention relates to an entire normal dispersion optical fiber laser resonator having a repetition rate of less than 10 MHz which is a mode locked through a saturation absorber and a nonlinear polarization rotation phenomenon, comprising a laser diode which outputs a laser pump light; a wavelength divider which couples the laser pump light outputted in the laser diode inside the resonator; a yitterbium addition optical fiber which amplifies a pulse of the resonator that penetrates the wavelength divider using the coupled pump light; a first wavelength plate (1/4) and a first wavelength plate (1/2) which convert the polarization of a laser light that penetrates the optical fiber; a first polarization light divider which separates the polarization of the laser light that penetrates each of the first wavelength plates; a birefringence determination based optical filter and an interference filter which respectively filters the penetration band of the light that penetrates the first polarization light divider; an optical shielding device which blocks a part of the light in the polarization that penetrates the interference filter; a second wavelength plate (1/2) which converts the polarization of the light that penetrates the optical shielding device; a second polarization light divider which separates the polarization of the laser light that penetrates the second wavelength plate; a second wavelength plate (1/4) which converts the polarization of the light that penetrates the second polarization light divider; a lens which penetrates the light that penetrates the second wavelength plate; a saturation absorber which induces a mode locking of the light that penetrates the lens; a third wavelength plate (1/4) which converts the polarization of the mode locked laser light; and a single mode optical fiber which induces the low repetition rate of the laser light that penetrates the third wavelength plate, wherein the laser light outputted in the laser diode is sequentially penetrated.
Abstract translation: 本发明涉及一种具有小于10MHz的重复频率的整个正常色散光纤激光谐振器，它是通过饱和吸收器锁定的模式和非线性偏振旋转现象，包括输出激光泵浦光的激光二极管; 波长分配器，耦合在激光二极管内输出的激光泵浦光; 一种掺镱添加光纤，其使用耦合的泵浦光来放大穿透波长分配器的谐振器的脉冲; 第一波长板（1/4）和第一波长板（1/2），其转换穿透光纤的激光的偏振; 第一偏振光分离器，其分离穿透每个第一波长板的激光的偏振; 基于双折射确定的光学滤波器和干涉滤光器，其分别滤光穿透第一偏振光分光器的光的穿透带; 光屏蔽装置，其阻挡穿过干涉滤光器的极化中的一部分光; 第二波长板（1/2），其转换穿过光学屏蔽装置的光的偏振; 第二偏振光分离器，其分离穿透第二波长板的激光的偏振; 第二波长板（1/4），其转换穿过第二偏振光分离器的光的偏振; 穿透第二波长板的光的透镜; 饱和吸收体，其诱导透过透镜的光的模式锁定; 转换模式锁定激光的偏振的第三波长板（1/4）; 以及引起穿透第三波长板的激光的低重复率的单模光纤，其中激光二极管中输出的激光依次被穿透。
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Patent Agency Ranking
公开(公告)号：KR101268569B1
公开(公告)日：2013-05-28
申请号：KR1020110057551
申请日：2011-06-14
Applicant: 한국과학기술원
Abstract: 본발명은포화광흡수체거울과광학필터를이용한극초단광섬유레이저공진기에관한것으로, 레이저펌핑광을출사하는펌핑광원, 상기펌핑광원에서출사되는펌핑광의파장을공진기내부로입사시키는파장분할기, 상기파장분할기를통해입사하는광을이용하여발진기내부공진광을증폭시키는이터븀첨가광섬유, 공진기광경로를구성하는단일모드광섬유및 공진기내부광을모드잠금하기위한펄스발진부;를포함하여공진기를구성하고, 상기펄스발진부는, 편광을조절하여원하는경로를설정하는파장판(wave plate), 한방향공진을유도하는광 차폐기(optical isolator), 공진을통해넓어지는스펙트럼의양 끝단을제거하여안정적인공진이가능토록하는광학필터(optical filter) 및광량기반모드잠금현상을유도하기위한포화광흡수체소자를포함하여구성된다.
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公开(公告)号：KR101268568B1
公开(公告)日：2013-05-28
申请号：KR1020110012349
申请日：2011-02-11
Applicant: 한국과학기술원
Abstract: 본발명은, 두가지방법을통해 0.1 ~ 30 MHz의반복률을가지는레이저를생성한다. 첫번째방법은레이저펌핑광을출사하는펌핑광원, 상기광원에서출사되는펌핑광의파장을공진기로입사시키는파장분할기, 상기파장분할기를통해입사하는광을이용하여공진기내부공진광을증폭시키는이터븀첨가광섬유, 공진기내부의편광을조절하여 NPE(nonlinear polarization evolution)을통한편광기반모드잠금을유발하는데필요한제 1파장판, 광차폐기, 제 2파장판, 혹은광량기반모드잠금현상을유발하기위해필요한포화광흡수체를이용하여 30 ~ 200 MHz의반복률을갖는레이저공진기를구성하고, 상기공진기에서출력되는레이저를펄스추출기를이용하여 0.1 ~ 30 MHz의반복률을가지는레이저를생성하는것을특징으로한다. 두번째방법은첫 번째방법과는달리공진기외부에펄스추출기를사용하지않고, 공진기자체적으로 0.1 ~ 30 MHz에해당하는펄스를생성하는것으로, 이를위해단일모드광섬유를추가로공진기내에연결하며, 이로인해발생한과도한분산을보상하기위한분산보상부를삽입하고, 편광기반모드잠금과광량기반모드잠금방법을동시에적용하여안정적인모드잠금이유지되도록하는것을특징으로한다. 또한, 0.1 ~ 30 MHz의반복률을갖는레이저를증폭단을통해증폭하여가공에적용함으로써, 높은수율을보이는가공시스템을구성할수 있다.
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公开(公告)号：KR101181719B1
公开(公告)日：2012-09-19
申请号：KR1020100059233
申请日：2010-06-22
Applicant: 한국과학기술원
IPC: B23K26/55 , H01S3/10 , H01L21/304 , C03B33/09
Abstract: 본 발명은 펨토초 레이저에 의해 나노 보이드 어레이 형성을 통한 절단방법에 관한 것으로, 극초단 펨토초 레이저를 개구수(NA)가 0.7 내지 0.95를 가지는 집광렌즈로 집광시켜 투명재료 또는 기판에 조사함으로써, 비선형 커렌즈(Kerr Lens) 현상에 의한 자체 집속(Self Focusing)과 다중광자이온화(Multi-Photon Ionization) 현상에 의한 플라즈마 디포커싱(Plasma Defocusing) 되도록 하여 기판에 나노 보이드 어레이(Nano-Void Array)를 형성한 후 절단하는 것을 특징으로 한다. 이와 같이 구성되는 본 발명은 나노 보이드 어레이를 형성하여 투명재료의 절단 및 가공 효율을 향상시킬 수 있고, 기존에 불가능한 얇은 투명재료의 효율적인 절단 및 가공을 가능한 이점이 있다.
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公开(公告)号：KR1020120092350A
公开(公告)日：2012-08-21
申请号：KR1020110012349
申请日：2011-02-11
Applicant: 한국과학기술원
CPC classification number: H01S3/1115 , B23K26/382 , H01S3/06791 , H01S3/115
Abstract: PURPOSE: A fiber laser systems with the repetition rate of 0.1-30 mhz and specimen manufacturing using the same are provided to implement a stable manual mode lock by simultaneously applying an NPE(Nonlinear Polarization Rotation) phenomenon and a saturable absorber. CONSTITUTION: Pump light generated from a laser diode(301) enters a resonator through a wavelength splitter(300). The pump light is absorbed in a ytterbium additional optical fiber(303). The light letting the resonator resonating passes through a wave plate(304) and a light shielding unit(305). One polarizing component is amplified in the ytterbium additional optical fiber. The amplified polarizing component is outputted through an opto-coupler(302). The outputted light reduces a repetition rate through a pulse extractor(306).
Abstract translation: 目的：提供重复率为0.1-30 mhz的光纤激光系统，并通过同时施加NPE（非线性极化旋转）现象和可饱和吸收器实现稳定的手动模式锁定。 构成：从激光二极管（301）产生的泵浦光通过波长分离器（300）进入谐振器。 泵浦光被镱附加光纤吸收（303）。 谐振器谐振的光通过波片（304）和遮光单元（305）。 在镱附加光纤中放大一个偏振分量。 放大的偏振分量通过光耦合器（302）输出。 输出的光通过脉冲提取器（306）减少重复率。
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公开(公告)号：KR1020120058276A
公开(公告)日：2012-06-07
申请号：KR1020100119980
申请日：2010-11-29
Applicant: 한국과학기술원
Abstract: PURPOSE: A cutting device and method using ultra-short pulse laser and water freezing are provided to prevent the residue on a work piece by forming a void on the underside of the work piece using ultra-short pulse laser and reduce cut scraps by using stress generated from the freezing of water in the void. CONSTITUTION: A cutting device using ultra-short pulse laser and water freezing comprises a laser source, a base plate(104), a vapor supply unit(108), and a cooling gas supply unit(109). The laser source condenses a laser(100) through a condensing lens(110) to a work piece(102) and outputs ultra-short pulse laser to form a void(103) in the work piece. The base plate comprises a vapor supply part(106) and a cooling gas supply part(107) on both sides thereof. The cooling gas supply unit supplies cooling gas to the cooling gas supply part. A crack is generated in the work piece by the laser of the laser source. Vapor and cooling gas are successively supplied and the work piece is cut by expansion resulting from the freezing of vapor.
Abstract translation: 目的：提供使用超短脉冲激光和水冷冻的切割装置和方法，以通过使用超短脉冲激光在工件的下侧上形成空隙来防止工件上的残留物，并通过应力减少切割屑 由空隙中的水冻结产生。 构成：使用超短脉冲激光和水冷冻的切割装置包括激光源，基板（104），蒸气供应单元（108）和冷却气体供应单元（109）。 激光源将激光器（100）通过聚光透镜（110）冷凝到工件（102），并输出超短脉冲激光器以在工件中形成空隙（103）。 基板在其两侧包括蒸气供应部分（106）和冷却气体供应部分（107）。 冷却气体供给单元向冷却气体供给部供给冷却气体。 通过激光源的激光在工件中产生裂纹。 依次供给蒸气和冷却气体，并且通过蒸气冷冻而产生的膨胀来切割工件。
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