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公开(公告)号：KR101335011B1
公开(公告)日：2013-12-02
申请号：KR1020120112004
申请日：2012-10-09
Applicant: 한국생산기술연구원
Inventor： 정훈
IPC: H01L21/66 , H01L21/3065
CPC classification number: H01J37/32972
Abstract: The present invention relates to a spectrum analyzer having a scanning zoom lens and the study of technical of the present invention is to provide the spectrum analyzer having the scanning zoom lens which analyzes a gas spectrum while scanning the inner side of a process chamber from an X-axis to a Y-axis and performs precise gas spectrum analysis. The present invention discloses the spectrum analyzer having the scanning zoom lens comprising; the process chamber in which a wafer is etched by plasma when the wafer is settled on a chuck; a scanning zoom lens part which is combined to the process chamber and scans the process chamber from the X-axis to the Y-axis and scans gas components inside the process chamber; and a spectrum part which analyzes the gas components inside the process chamber based on an optical signal inputted from the scanning zoom lens part. [Reference numerals] (110) Plasma;(131) Sensor part;(132) Control part;(AA) Y axis;(BB) X axis
Abstract translation: 本发明涉及一种具有扫描变焦透镜的光谱分析仪，本发明的技术研究是提供一种具有扫描变焦透镜的光谱分析仪，其在从X处扫描处理室的内侧时分析气体光谱 轴向Y轴进行精确的气体谱分析。 本发明公开了具有扫描变焦透镜的频谱分析仪， 当晶片沉积在卡盘上时，其中通过等离子体蚀刻晶片的处理室; 扫描变焦透镜部分，其组合到处理室并将处理室从X轴扫描到Y轴并扫描处理室内的气体成分; 以及光谱部分，其基于从扫描变焦透镜部分输入的光信号分析处理室内的气体成分。 （110）等离子体;（131）传感器部分;（132）控制部分;（AA）Y轴;（BB）X轴
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公开(公告)号：KR101334384B1
公开(公告)日：2013-11-29
申请号：KR1020120096516
申请日：2012-08-31
Applicant: 한국생산기술연구원
Inventor： 정훈
Abstract: The present invention provides an apparatus for analyzing a processing gas element in a processing chamber by analyzing the spectrum of the processing gas with a photodiode on a substrate with a wafer size. A processing gas analyzing apparatus in the processing chamber includes a plate which is received on the upper surface of a chuck in the processing chamber filled with the processing gas, a plurality of photodiodes, and a control unit. The photodiodes are inserted into the upper surface of the plate. One side of the photodiode is upwardly exposed. The control unit is inserted into the plate, is connected to the photodiodes, and analyzes the processing gas.
Abstract translation: 本发明提供一种用于通过利用晶片尺寸的基板上的光电二极管分析处理气体的光谱来分析处理室中的处理气体元件的装置。 处理室中的处理气体分析装置包括：容纳在填充有处理气体的处理室中的卡盘的上表面上的板，多个光电二极管和控制单元。 光电二极管插入板的上表面。 光电二极管的一侧向上露出。 控制单元插入板中，连接到光电二极管，并分析处理气体。
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15.发明授权두 가지 크기의 실리카 나노입자를 함유한 내스크래치성 실리카 보호막 형성용 코팅 조성물 및 이의 제조방법 有权用于形成含有不同尺寸的二氧化硅纳米颗粒的耐刮擦二氧化硅薄膜的涂料组合物，其制备方法
公开(公告)号：KR101302720B1
公开(公告)日：2013-10-10
申请号：KR1020110039354
申请日：2011-04-27
IPC: C09D183/02 , C09D1/00 , C09D7/12 , C09D5/00
Abstract: 두 가지 크기의 실리카 나노입자를 기반으로 구성된 금속 표면 도장을 위한 내스크래치성 실리카 보호막 형성용 코팅 조성물 및 이의 제조방법이 개시된다. 이를 위하여 테트라에톡시실란 및 메틸트리에톡시실란으로 이루어진 실리카 전구체 혼합물과 물과 산촉매와 용매로 이루어진 표면처리액, 및 입자크기가 서로 다른 2종 실리카 나노입자로 구성된 코팅용액을 포함하는 내스크래치성 실리카 보호막 형성용 코팅 조성물을 제공한다. 본 발명의 코팅 조성물은 크기가 서로 다른 실리카 나노 입자를 혼합하여 사용함으로써 치밀하고 결함이 없는 실리카 보호막을 형성할 수 있으며, 기존의 기술에 비해 낮은 온도인 200℃이하에서 소결이 가능하다.
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Patent Agency Ranking
公开(公告)号：KR101311268B1
公开(公告)日：2013-09-25
申请号：KR1020110138271
申请日：2011-12-20
Applicant: 한국생산기술연구원
IPC: H01L21/205 , H01L21/3065
Abstract: 본 발명에 따른 다원계 화합물 증착용 샤워헤드(200)는, 일면에 가상의 육각형 단위격자(210)가 규칙적으로 반복 배치되되, 제1반응기체 분사공(21)과 제2반응기체 분사공(22)은 육각형 단위격자(210)의 꼭지점에 번갈아 위치하도록 형성되고, 제3반응기체 분사공(23)은 육각형 단위격자(210)의 중심에 위치하도록 형성되며, 제4반응기체 분사공(24)은 육각형 단위격자(210)의 중심에서 육각형 단위격자(210)의 꼭지점에 방사상 선을 그어 만들어지는 가상의 삼각형(220) 내에 위치하도록 형성되는 것을 특징으로 한다. 본 발명에 의하면, 특정 성분 기체의 분사공을 다른 성분 기체의 분사공에 비하여 밀도 높게 배치할 수 있기 때문에 특정 반응기체를 다른 반응기체에 비하여 더 균일하게 분사할 수 있게 된다.
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公开(公告)号：KR1020110072479A
公开(公告)日：2011-06-29
申请号：KR1020090129430
申请日：2009-12-23
Applicant: 한국생산기술연구원
IPC: H01L21/78
CPC classification number: H01L21/67092 , B23K26/0093
Abstract: PURPOSE: An apparatus and a method for cutting a semiconductor wafer using optical fiber laser are provided to easily cut wafers regardless of the thickness of the wafers by forming at least two focuses on the wafers. CONSTITUTION: Laser beam is pulsed and two or more different wavelengths are secured for the laser beam. Two or more focuses of the laser beam transferred to a wafer are generated. Light source part(120) generates one or more laser beam. A wavelength controlling part(140) controls the wavelengths of the laser beam. A pulse generating part(160) pulses the laser beam. A radiating part radiates the laser beam to a semiconductor waver through a lens module.
Abstract translation: 目的：提供使用光纤激光器切割半导体晶片的装置和方法，通过在晶片上形成至少两个焦点来容易地切割晶片，而不管晶片的厚度。 构成：激光束是脉冲的，激光束固定两个或更多个不同的波长。 产生转移到晶片的激光束的两个或更多个焦点。 光源部分（120）产生一个或多个激光束。 波长控制部分（140）控制激光束的波长。 脉冲产生部分（160）脉冲激光束。 辐射部分通过透镜模块将激光束辐射到半导体摇臂。
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公开(公告)号：KR1020100132841A
公开(公告)日：2010-12-20
申请号：KR1020090051632
申请日：2009-06-10
Applicant: 한국생산기술연구원
Abstract: PURPOSE: A noncontact area measuring device is provided to easily measure a distance and an area by calculating the area of an object by measuring the slope through a gyro sensor. CONSTITUTION: A noncontact area measuring device(10) includes a gyro sensor(110), a distance measuring unit(120), a controller(130), and a display unit(140). The gyro sensor measures the slope of a different axial direction. The distance measuring unit measures a distance by transmitting and receiving the laser. The controller calculates the area of the object based on the slope measured by the gyro sensor and the distance measured by the distance measuring unit. A display unit displays the calculated area, the measured slope, and the measured distance. The gyro sensor measures the horizontal slope and the vertical slope.
Abstract translation: 目的：提供一种非接触式面积测量装置，通过通过陀螺仪传感器测量斜率来计算物体的面积来容易地测量距离和面积。 构成：非接触式区域测量装置（10）包括陀螺传感器（110），距离测量单元（120），控制器（130）和显示单元（140）。 陀螺传感器测量不同轴向的斜率。 距离测量单元通过发射和接收激光来测量距离。 控制器根据由陀螺传感器测得的斜率和距离测量单元测得的距离来计算物体的面积。 显示单元显示计算的面积，测量的斜率和测量的距离。 陀螺传感器测量水平斜率和垂直坡度。
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公开(公告)号：KR1020100046405A
公开(公告)日：2010-05-07
申请号：KR1020080105231
申请日：2008-10-27
Applicant: 한국생산기술연구원
CPC classification number: H01L23/14 , H01L21/268 , H01L23/13 , H01L24/26
Abstract: PURPOSE: By using laser, the anisotropic conductive film device of packaging and the method using laser bond the anisotropic conductive film. The reliability and accuracy of the process are improved. CONSTITUTION: An optical source section(100) generates the laser having the fixed wavelength. The irradiation portion(200) examines the laser created from the optical source section in the upper side of the substrate(10). A presser portion(300) sanctions pressure in the substrate upside in which the laser irradiation is completed. The irradiation portion comprises the galvanometer scanner for examining laser in the upper side of substrate and polygon scanner, at least, one.
Abstract translation: 目的：通过使用激光，封装各向异性导电膜器件和使用激光的方法将各向异性导电膜结合。 改进了流程的可靠性和准确性。 构成：光源部（100）产生具有固定波长的激光。 照射部分（200）检查从基板（10）的上侧中的光源部分产生的激光。 按压部分（300）对激光照射完成的基板上侧进行压制。 照射部分包括用于检查基板和多边形扫描器的上侧的激光的电流计扫描器，至少一个。
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公开(公告)号：KR1020080061260A
公开(公告)日：2008-07-02
申请号：KR1020070118910
申请日：2007-11-21
Applicant: 한국생산기술연구원
IPC: B60S1/08
CPC classification number: B60S1/0833
Abstract: A rain sensing apparatus for using a reference photo diode is provided to recognize the amount of rain by attaching a rain sensor having the reference photo diode on a windshield of a car. A rain sensing apparatus includes an LED(Light Emitting Diode) light source(35), a photo diode(36), a reference photo diode(39), a micro computer, and an infrared filter(33). The LED light source emits an LED light to a windshield(12). The photo diode corrects the LED light reflected from a rain dropped on the windshield and performs photoelectric conversion. The reference photo diode detects light entered from an outside and performs the photoelectric conversion. The micro computer detects a difference of photoelectric signals corrected through the photo diode and the reference photo diode and determines the amount of the rain. The infrared filter is formed at a slit(44) of a part adjacent to the windshield.
Abstract translation: 提供了一种用于使用参考光电二极管的雨感测装置，通过将具有参考光电二极管的雨水传感器附着在汽车的挡风玻璃上来识别雨量。 雨感测装置包括LED（发光二极管）光源（35），光电二极管（36），参考光电二极管（39），微计算机和红外滤光器（33）。 LED光源向挡风玻璃（12）发射LED灯。 光电二极管校正从挡风玻璃上掉下来的雨水反射的LED光，进行光电转换。 参考光电二极管检测从外部输入的光，并执行光电转换。 微型计算机检测通过光电二极管校正的光电信号和参考光电二极管的差异，并确定雨量。 红外滤光器形成在与挡风玻璃相邻的部分的狭缝（44）处。
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