公开(公告)号：KR100454460B1

公开(公告)日：2004-10-28

申请号：KR1020020019109

申请日：2002-04-09

Applicant: 한국전자통신연구원

Inventor： 이대식 ,  이명래 ,  고종수 ,  김윤태

IPC: H01L21/00

Abstract: PURPOSE: A micro actuating apparatus for controlling fluid and a micro fluid control apparatus using the same are provided to be capable of optimizing the transfer of a biomass sample having a high viscosity and conductivity, improving response speed, and operating at low temperature. CONSTITUTION: A micro actuating apparatus for controlling fluid is provided with a silicon substrate(100a), an outer wall(101) formed at the upper portion of the silicon substrate by sequentially depositing a silicon oxide layer and a silicon layer, a mobile structure(102) including at least one pair of leaf springs having a restoring force, connected with the outer wall through both ends of the mobile structure, and an actuator formed at the upper portion of the silicon substrate for driving backward or forward the mobile structure by using the expansion of a heating element(106) due to the supply of voltage.

Abstract translation: 目的：提供一种用于控制流体的微动装置和使用该微动装置的微流体控制装置，以便能够优化具有高粘度和导电率的生物质样品的转移，提高响应速度并且在低温下操作。 组成：用于控制流体的微致动装置设置有通过顺序地沉积一氧化硅层和硅层，移动结构（形成在硅衬底的上部的硅衬底（100A），外壁（101） 102），其包括至少一对具有恢复力的板簧，其通过移动结构的两端与外壁连接;以及致动器，其形成在硅衬底的上部，用于通过使用来驱动移动结构向后或向前 由于电压供应而使加热元件（106）膨胀。

公开(公告)号：KR100452946B1

公开(公告)日：2004-10-14

申请号：KR1020020074014

申请日：2002-11-26

Applicant: 한국전자통신연구원

Inventor： 이대식 ,  양해식 ,  고종수 ,  윤태환 ,  김효겸 ,  신용범 ,  김성진 ,  박세호 ,  김규원 ,  김윤태

IPC: C12M1/00 ,  G01N27/26

Abstract: PURPOSE: A low power consumption microfabricated thermal cycler and a method for fabrication of the same are provided, thereby accurately and minutely controlling the temperature of the reaction occurring area, so that it can be applied to various bio chips including PCR chip, protein chip, DNA chip, drug delivery system, micro biological/chemical reactor and lab-on-a-chip. CONSTITUTION: The low power consumption microfabricated thermal cycler comprises an upper board(112) and a lower board(100), wherein the upper board(112) comprises an fluid inlet(114) and outlet, a reaction chamber(118), and a fluid channel(116) connecting the inlet(114) and outlet to the reaction chamber(118); and the lower board(100) comprises an insulated heating thin layer(106) formed on the lower board(100), a heating means(102) formed on the insulated heating thin layer(106), a temperature sensor(104) formed on the insulated heating thin layer(106), and an insulating layer(108) covering the heating means(102) and the temperature sensor(104); and the insulated heating thin layer(106) is composed of Si3N4, SiO2, Si3N4/SiO2/Si3N4 or SiO2/Si3N4/SiO2 and has thickness of 0.1 to 10 micrometer.

Abstract translation: 目的：提供一种低功耗的微制造型热循环仪及其制造方法，从而准确而精确地控制反应发生区域的温度，从而可应用于各种生物芯片，包括PCR芯片，蛋白质芯片， DNA芯片，药物输送系统，微生物/化学反应器和芯片实验室。 构成：低功耗微制造热循环仪包括上板（112）和下板（100），其中上板（112）包括流体入口（114）和出口，反应室（118）和 将入口（114）和出口连接到反应室（118）的流体通道（116）; （100）上形成的绝缘加热薄层（106），形成在绝缘加热薄层（106）上的加热装置（102），形成在其上的温度传感器（104） 绝缘加热薄层（106）和覆盖加热装置（102）和温度传感器（104）的绝缘层（108）; 所述绝缘加热薄膜（106）由Si3N4，SiO2，Si3N4 / SiO2 / Si3N4或SiO2 / Si3N4 / SiO2组成，厚度为0.1〜10微米。

公开(公告)号：KR100439423B1

公开(公告)日：2004-07-09

申请号：KR1020020002495

申请日：2002-01-16

Applicant: 한국전자통신연구원

Inventor： 고종수 ,  이대식 ,  이명래 ,  전치훈 ,  김윤태

IPC: H02K33/10

CPC classification number: H01H53/06 ,  B81B3/0021 ,  B81B2201/038 ,  B81B2203/0109 ,  B81B2203/051 ,  B81B2203/056 ,  B81B2203/058 ,  G02B6/266 ,  G02B6/3546 ,  G02B6/3572 ,  H01H1/0036 ,  H01H2001/0078

Abstract: The present invention relates to a micro-electromechanical actuator. An electromagnetic-type micro-electromechanical actuator of the present invention has a conductive beam formed in a micro electronic substrate on an upper side of a magnetic substance, so that the conductive beam can be moved toward an in-plane mode in parallel to the micro electronic substrate depending on a direction that current flows. Therefore, the micro-electromechanical actuator can be applied to most of electromagnetic micro-electromechanical systems that require an in-plane mode.

Abstract translation: 本发明涉及一种微机电致动器。 本发明的电磁型微机电致动器具有形成在磁性物质的上侧的微电子基板中的导电束，使得导电束能够平行于微型地移动到平面内模式 电子基板取决于电流流动的方向。 因此，微机电致动器可应用于需要面内模式的大多数电磁微机电系统。

公开(公告)号：KR1020040041767A

公开(公告)日：2004-05-20

申请号：KR1020020069636

申请日：2002-11-11

Applicant: 한국전자통신연구원

Inventor： 정광효 ,  고종수 ,  윤현철 ,  양해식 ,  표현봉 ,  김성진 ,  김윤태

IPC: C12Q1/00

CPC classification number: B01L3/5027 ,  B01J2219/00837 ,  B01L3/502738 ,  B01L3/502746 ,  B01L2200/0621 ,  B01L2200/0684 ,  B01L2400/0688 ,  B33Y70/00 ,  B33Y80/00 ,  Y10T137/2076 ,  Y10T436/2575

Abstract: PURPOSE: A device for controlling fluid using surface tension is provided, thereby removing additional pump and electric power supply from the device, so that the device can be minimized and portable, while reducing the production costs, and increasing production yield. CONSTITUTION: A device for controlling fluid using surface tension comprises at least one of fluid storage chambers(100, 102); at least one reaction chamber(112); at least one fluid discarding chamber(114); at least one fluid channel(108) connecting the storage chamber, the reaction chamber and the discarding chamber; at least one fluid flow delaying portion(110) which is positioned within the fluid channel and delays the fluid flow by the surface tension; and at least one of fluid flow stop valves(104, 106) which are positioned within the fluid channel and stopping the fluid flow, wherein the fluid flow is automatically generated by the surface tension.

Abstract translation: 目的：提供一种用于使用表面张力控制流体的装置，从而从装置中除去附加的泵和电力供应，从而可以将装置最小化和便携，同时降低生产成本，并提高产量。 构成：用于使用表面张力控制流体的装置包括流体储存室（100,102）中的至少一个; 至少一个反应室（112）; 至少一个流体废弃室（114）; 连接储存室，反应室和废弃室的至少一个流体通道（108） 至少一个流体流延迟部分（110），其定位在所述流体通道内并且使所述流体流动延迟所述表面张力; 以及定位在流体通道内并停止流体流动的流体流动截止阀（104,106）中的至少一个，其中流体流由表面张力自动产生。

公开(公告)号：KR1020030080468A

公开(公告)日：2003-10-17

申请号：KR1020020019109

申请日：2002-04-09

Applicant: 한국전자통신연구원

Inventor： 이대식 ,  이명래 ,  고종수 ,  김윤태

IPC: H01L21/00

Abstract: PURPOSE: A micro actuating apparatus for controlling fluid and a micro fluid control apparatus using the same are provided to be capable of optimizing the transfer of a biomass sample having a high viscosity and conductivity, improving response speed, and operating at low temperature. CONSTITUTION: A micro actuating apparatus for controlling fluid is provided with a silicon substrate(100a), an outer wall(101) formed at the upper portion of the silicon substrate by sequentially depositing a silicon oxide layer and a silicon layer, a mobile structure(102) including at least one pair of leaf springs having a restoring force, connected with the outer wall through both ends of the mobile structure, and an actuator formed at the upper portion of the silicon substrate for driving backward or forward the mobile structure by using the expansion of a heating element(106) due to the supply of voltage.

Abstract translation: 目的：提供一种用于控制流体的微型致动装置和使用其的微流体控制装置，其能够优化具有高粘度和电导率，改善响应速度和在低温下操作的生物质样品的转移。 构成：用于控制流体的微型致动装置设置有硅衬底（100a），通过依次沉积硅氧化物层和硅层而形成在硅衬底的上部的外壁（101），移动结构（ 102），其包括具有恢复力的至少一对板簧，通过移动结构的两端与外壁连接，以及形成在硅衬底的上部的致动器，用于通过使用来驱动移动结构 由于电压的供给导致的加热元件（106）的膨胀。

公开(公告)号：KR1020040013731A

公开(公告)日：2004-02-14

申请号：KR1020020046794

申请日：2002-08-08

Applicant: 한국전자통신연구원

Inventor： 고종수 ,  윤현철 ,  양해식 ,  이대식 ,  정광효 ,  표현봉 ,  김성진 ,  김윤태

IPC: G01N27/27

CPC classification number: B01L3/502707 ,  B01L3/50273 ,  B01L3/502746 ,  B01L2200/16 ,  B01L2300/0645 ,  B01L2300/0867 ,  B01L2400/0406 ,  B01L2400/0442 ,  B01L2400/0487 ,  B01L2400/0688 ,  B01L2400/086 ,  B01L2400/088 ,  B33Y70/00 ,  B33Y80/00 ,  Y10T436/25

Abstract: PURPOSE: A microfluidic device is provided to control the minimum amount of fluid with reducing manufacturing cost and improving productivity by completely removing liquid solution from a chamber. CONSTITUTION: A first fluid injection port(5) and a second fluid injection port(10) are formed in a fluid substrate(100). A first fluid injection port chamber(15), an isolation protrusion(25), a reaction chamber(20), a fluid delaying section(30) and a detecting chamber(35) are formed at one side of the fluid substrate(100). A test sample introduced into the first fluid injection port(5) is moved into the detecting chamber(35) through the first fluid injection port chamber(15), the isolation protrusion(25), the reaction chamber(20), and the fluid delaying section(30) by means of a capillary phenomenon. In addition, a second fluid injection port chamber(40), a fluid path(45) and a waste fluid chamber(50) are formed in the fluid substrate(100).

Abstract translation: 目的：提供微流体装置以通过从腔室中完全去除液体溶液来降低制造成本并提高生产率来控制最小量的流体。 构成：流体基板（100）中形成有第一流体注入口（5）和第二流体注入口（10）。 在流体基板（100）的一侧形成有第一流体注入口室（15），隔离突起（25），反应室（20），流体延迟部分（30）和检测室（35） 。 引入第一流体注入口（5）的测试样品通过第一流体注入口腔（15），隔离突起（25），反应室（20）和流体 延迟部分（30）通过毛细管现象。 此外，流体基板（100）中形成有第二流体注入口室（40），流体路径（45）和废液室（50）。