(0,π) 위상변이를 갖는 미세패턴 형성방법
    15.
    发明授权
    (0,π) 위상변이를 갖는 미세패턴 형성방법 失效
    (0,?)相移

    公开(公告)号:KR1019930007028B1

    公开(公告)日:1993-07-26

    申请号:KR1019910009213

    申请日:1991-06-04

    Abstract: The method comprises (a) causing the photoinduced anisotropy uniformly on a non-linear optical thin film (8) by exposing the thin film (8) to the light which is linearly polarized when the recording light source (9) passes through the polariscope (10), and (b) selectively forming a 90≦̸-rotated light axis with respect to the photoinduced light axis using a 90≦̸polariscope (11) and a binary photomask (3). The method provides the real-time (0,π) phase shift for non-linear optical materials only by a containuous 2- step photolighography exposing process without several etching steps needed in the conventional method.

    Abstract translation: 该方法包括:(a)通过将薄膜(8)暴露于记录光源(9)通过偏振镜(8)的线性偏振光,使非线性光学薄膜(8)均匀地引起光致各向异性 10),和(b)使用90&极化极化(11)和二元光掩模(3),相对于光诱导的光轴选择性地形成90°旋转光轴。 该方法仅通过具有传统方法所需的几个蚀刻步骤的紧密的2-步摄影曝光工艺,为非线性光学材料提供实时(0,π)相移。

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