-
公开(公告)号：KR101857950B1
公开(公告)日：2018-05-16
申请号：KR1020160077117
申请日：2016-06-21
Applicant: 한국표준과학연구원
Abstract: 본발명은광원부와; 상기광원부의전면에위치하며집속되는광을평행광의형태로변형할수 있도록하는 Flat-top모듈과; 상기 Flat-top모듈을통과한광을집속하여유입된입자에조사시켜회절흡수, 투과, 반사등의현상을발생하는플로우채널및; 상기플로우채널을통과한입사광을수광하여산란및 소멸광강도를감지하여입자의크기를측정하는광측정부를포함하는것으로서, 플로우채널내에유입된입자에광을조사하고이때발생되는산란및 소멸광의강도를이용하여입자의크기를측정함에있어 Flat-top모듈을이용하여집속된입사광은 r축방향으로균일광이고, z축에따라변화여도레지던스타임(Residence time)을이용하여정확한입자크기측정이가능한효과를도모할수 있도록하는실시간미세입자크기및 개수측정장치에관한것이다.
-
公开(公告)号：KR20180011899A
公开(公告)日：2018-02-05
申请号：KR20160093974
申请日：2016-07-25
Applicant: 한국표준과학연구원
CPC classification number: C23C16/305 , C23C16/0218 , C23C16/0227 , C23C16/0245 , C23C16/4488 , C23C16/52 , C30B25/16 , C30B29/46
Abstract: 본발명고균일 2차원전이금속디칼코지나이드박막의제조방법에관한것이며, 보다구체적으로는 500℃이하의저온조건에서고균일 2차원전이금속디칼코지나이드박막을제조하는방법에관한것이다.
Abstract translation: 本发明和均匀的二维过渡涉及更具体地制造金属基团浩二砷化物薄膜，以的方法的方法，以及在小于500℃均匀二维过渡金属的低温条件，以制备自由基浩二砷化薄膜。
-
公开(公告)号：KR1020180000015A
公开(公告)日：2018-01-02
申请号：KR1020160077117
申请日：2016-06-21
Applicant: 한국표준과학연구원
CPC classification number: G01N15/0211 , G01N21/85 , G01N2021/8592
Abstract: 본발명은광원부와; 상기광원부의전면에위치하며집속되는광을평행광의형태로변형할수 있도록하는 Flat-top모듈과; 상기 Flat-top모듈을통과한광을집속하여유입된입자에조사시켜회절흡수, 투과, 반사등의현상을발생하는플로우채널및; 상기플로우채널을통과한입사광을수광하여산란및 소멸광강도를감지하여입자의크기를측정하는광측정부를포함하는것으로서, 플로우채널내에유입된입자에광을조사하고이때발생되는산란및 소멸광의강도를이용하여입자의크기를측정함에있어 Flat-top모듈을이용하여집속된입사광은 r축방향으로균일광이고, z축에따라변화여도레지던스타임(Residence time)을이용하여정확한입자크기측정이가능한효과를도모할수 있도록하는실시간미세입자크기및 개수측정장치에관한것이다.
Abstract translation: 光源装置技术领域本发明涉及一种光源装置， 平顶模块，位于光源单元的前表面上并适于将聚焦的光转换成平行光; 流动通道，用于聚焦穿过平顶模块的光并照射入射粒子以产生衍射吸收，透射，反射等现象; 作为通过接收入射光通过流动通道已经通过包括散射和消光光学测量检测的光强度用于测量颗粒的尺寸，光被照射到在流道中流动的粒子，此时产生的光强度的散射和消光 在使用平顶模块测量粒径时，聚焦光是沿r轴方向的均匀光，并且即使它沿着z轴变化，也可以使用停留时间精确测量粒径 更具体地说，涉及一种能够实现效果的实时细粒度和数量测量装置。
-
公开(公告)号：KR101442409B1
公开(公告)日：2014-10-07
申请号：KR1020130043451
申请日：2013-04-19
Applicant: 한국표준과학연구원
Abstract: A flow rate control device by means of the present invention comprises: a pipe-shaped first member which includes first flange units having the same shape on both ends thereof; a second member which has second flange units corresponding to the first flange unit, is connected with the first member through the surface contact of the first and second flange units, and includes a screw thread unit formed on the outer circumferential surface thereof; an adjusting member which has a female screw unit formed on the inner circumferential surface to be screwed with the screw thread unit and includes one side end which can be inserted into a position contacting the second flange unit; a moving member which is inserted and disposed in the second member and in an internal spatial part of the adjusting member, is roundly moved in an axial direction by being connected with the rotation of the adjusting member, and includes a body connected with one side end of the adjusting means through surface contact and a tip member coupled with a through-hole formed in the center of the second member so as to adjust the passing flow rate of a gas including particles flowing in the internal spatial part; and a third member which is coupled with the end of the moving member in order to be moved along with the moving member and has a third flange unit.
Abstract translation: 本发明的流量控制装置包括：管状的第一构件，其包括在其两端具有相同形状的第一凸缘单元; 具有与第一凸缘单元相对应的第二凸缘单元的第二构件通过第一和第二凸缘单元的表面接触与第一构件连接，并且包括形成在其外周表面上的螺纹单元; 调节构件，其具有形成在与所述螺纹单元螺合的内周面上的内螺纹单元，并且包括能够插入到与所述第二凸缘单元接触的位置的一个侧端; 插入并设置在第二构件中和调节构件的内部空间部分中的移动构件通过与调节构件的旋转连接而在轴向方向上圆周地移动，并且包括主体，其与一个侧端 调节装置通过表面接触和与形成在第二构件的中心的通孔联接的尖端构件以调节包括在内部空间部分中流动的颗粒的气体的通过流量; 以及与移动构件的端部联接以便与移动构件一起移动并具有第三凸缘单元的第三构件。
-
公开(公告)号：KR101378293B1
公开(公告)日：2014-03-28
申请号：KR1020130011029
申请日：2013-01-31
Applicant: 한국표준과학연구원
Abstract: An exhaust system of a particle complex characteristic measurement device for optimal flow control according to the present invention comprises; a particle focusing unit including an aerodynamic lens; and a first chamber in which one end is connected to the particle focusing unit, the internal pressure is controlled to a medium-vacuum state (1 to 10^(-3) Torr), and a nozzle is formed on the other end. The first chamber accelerates particles which are inserted through the particle focusing unit. The exhaust system of the particle complex characteristic measurement device for optimal flow control also comprises a second chamber in which one end is connected to the nozzle of the first chamber, the internal pressure is controlled to a high-vacuum state (10^(-3) to 10^(-7) Torr), and an electron gun for charging the particles accelerated in the first chamber is installed; a third chamber in which one end is connected to the second chamber and an electrostatic deflection device is installed; and a pump which is connected to the first and second chambers through an exhaust flow path and discharges gas within the first and second chambers to the outside. The electrostatic deflection device classifies particles of a specific size among particles which are charged till saturation in the electron gun by applying a specific voltage to the inner side.
Abstract translation: 根据本发明的用于最佳流量控制的颗粒复合特征测量装置的排气系统包括： 包括空气动力学透镜的粒子聚焦单元; 和一端与颗粒聚焦单元连接的第一室，将内部压力控制在中等真空状态（1〜10 ^（ - 3）Torr），另一端形成喷嘴。 第一室加速通过颗粒聚焦单元插入的颗粒。 用于最佳流量控制的颗粒复合特征测量装置的排气系统还包括第二室，其中一端连接到第一室的喷嘴，内压被控制到高真空状态（10 ^（ - 3 ）至10 ^（ - 7）Torr），并且安装用于对在第一室中加速的颗粒进行充电的电子枪; 第三室，其一端连接到第二室，并安装静电偏转装置; 以及泵，其通过排气流路连接到第一和第二室，并将第一和第二室内的气体排出到外部。 静电偏转装置通过向内侧施加特定的电压，对电子枪充满直至饱和的粒子中的粒子进行分类。
-
Patent Agency Ranking
公开(公告)号：KR102235245B1
公开(公告)日：2021-04-05
申请号：KR1020190126813
申请日：2019-10-14
Applicant: 한국표준과학연구원
Abstract: 본발명에따른오염입자측정용광 조사장치는챔버내의오염입자측정을위하여챔버의내부공간으로레이저광을조사하는장치로서, 레이저광을생성하여조사하는광 조사부, 조사되는레이저광의경로를챔버를향하도록바꾸어주는반사거울, 반사거울에서반사된레이저광을챔버내의일정위치로집속하는포커스렌즈, 광조사부를일정범위내에서직선이동시키는액추에이터부를포함하여이루어진다. 광조사부가일정범위만큼직선이동하기때문에결국챔버내에서광이집속되는부분이하나의특정지점이아니라일정한영역범위로확장된다. 이에따라, 확장된영역범위에존재하는오염입자들을측정할수 있게되어더욱정확한오염입자측정이가능하며, 챔버내에광이집속되도록미리설정된반사거울과포커스렌즈등의광학계를새로설정할필요가없어적은비용으로편리하게구현할수 있다.
-
公开(公告)号：KR102227433B1
公开(公告)日：2021-03-15
申请号：KR1020200158562
申请日：2020-11-24
Applicant: 한국표준과학연구원
Abstract: 본발명은입자측정장치및 입자측정방법에관한것으로서, 여러파워의레이저를순서대로조사하는레이저파워스캐닝을이용하여, 높은정확도로크기범위별입자개수를측정할수 있다. 먼저, 복수개의서로다른입자크기에각각대응하여, 해당크기이상의입자를측정할수 있는최소파워의레이저를입자측정공간에일정시간동안조사하고, 산란된광을검출하여입자의크기별개수를측정한다. 그리고, 측정된실측값을이용하여, 각크기범위에속한입자의개수를알고리즘을이용하여정확하게산출한다. 이때, 측정되는입자개수와레이저파워에관한비례관계를이용할수 있다. 플로우노즐이나플랫-탑광학계등 추가적부품을사용하지않으므로, 입자측정장치의개발비용을절감할수 있으며, 상압(대기압)이나진공환경에상관없이사용가능하다. 또한, 기존장치에대한알고리즘업그레이드를통해서도정확도를개선할수 있다.
-
公开(公告)号：KR102025724B1
公开(公告)日：2019-09-26
申请号：KR1020170146440
申请日：2017-11-06
Applicant: 한국표준과학연구원
IPC: H01L21/78 , H01L21/768 , H01L21/762
-
公开(公告)号：KR101997512B1
公开(公告)日：2019-07-09
申请号：KR1020160183706
申请日：2016-12-30
Applicant: 한국표준과학연구원
IPC: H05K1/03 , B05D1/00 , B05D7/24 , C23C16/455 , C23C14/34 , C09D179/08 , C09D183/04
-
-
-
-
-
-
-
-
-
Search Results
24
records
(took 0.025 seconds)
