公开(公告)号：DE102004051842B4

公开(公告)日：2007-01-04

申请号：DE102004051842

申请日：2004-10-25

Applicant: ADE CORP

Inventor： JUDELL NEIL ,  MURPHREE MICHAEL

IPC: G01B11/02 ,  G01N21/95 ,  G01N21/956 ,  H01L21/66

Abstract: A system for inspecting semiconductor wafers capable of determining a scattering power associated with a wafer surface detect whether or not the scattering power exceeds the dynamic range of the system. The scattering power is obtained by determining the height of a Gaussian shape representing data collected by the system. The height is determined by defining a plurality of cross-sectional areas of the Gaussian shape, determining a value of each area, determining a value of the natural logarithm of intermediate heights of the Gaussian shape corresponding to the cross-sectional areas, plotting the area values as function of the natural logarithm of the intermediate height values to form a linear plot, determining a natural logarithm of the height value corresponding to a zero area value based on the linear plot, and determining the inverse natural logarithm of the value to obtain the height of the Gaussian shape.

公开(公告)号：DE102004051842A1

公开(公告)日：2005-12-08

申请号：DE102004051842

申请日：2004-10-25

Applicant: ADE CORP

Inventor： JUDELL NEIL ,  MURPHREE MICHAEL

IPC: G01B11/02 ,  G01N21/95 ,  G01N21/956 ,  H01L21/66

Abstract: A system for inspecting semiconductor wafers capable of determining a scattering power associated with a wafer surface detect whether or not the scattering power exceeds the dynamic range of the system. The scattering power is obtained by determining the height of a Gaussian shape representing data collected by the system. The height is determined by defining a plurality of cross-sectional areas of the Gaussian shape, determining a value of each area, determining a value of the natural logarithm of intermediate heights of the Gaussian shape corresponding to the cross-sectional areas, plotting the area values as function of the natural logarithm of the intermediate height values to form a linear plot, determining a natural logarithm of the height value corresponding to a zero area value based on the linear plot, and determining the inverse natural logarithm of the value to obtain the height of the Gaussian shape.