公开(公告)号：US12044980B2

公开(公告)日：2024-07-23

申请号：US17296316

申请日：2019-10-30

Applicant: ASML NETHERLANDS B.V.

Inventor： Abraham Slachter ,  Wim Tjibbo Tel ,  Daan Maurits Slotboom ,  Vadim Yourievich Timoshkov ,  Koen Wilhelmus Cornelis Adrianus Van Der Straten ,  Boris Menchtchikov ,  Simon Philip Spencer Hastings ,  Cyrus Emil Tabery ,  Maxime Philippe Frederic Genin ,  Youping Zhang ,  Yi Zou ,  Chenxi Lin ,  Yana Cheng

IPC: G05B19/418 ,  G03F7/00

CPC classification number: G03F7/70625 ,  G03F7/70616 ,  G05B19/4188 ,  G03F7/70525

Abstract: A method for analyzing a process, the method including obtaining a multi-dimensional probability density function representing an expected distribution of values for a plurality of process parameters; obtaining a performance function relating values of the process parameters to a performance metric of the process; and using the performance function to map the probability density function to a performance probability function having the process parameters as arguments.

公开(公告)号：US20220277116A1

公开(公告)日：2022-09-01

申请号：US17744091

申请日：2022-05-13

Applicant: ASML NETHERLANDS B.V.

Inventor： Jing SU ,  Yi Zou ,  Chenxi Lin ,  Stefan Hunsche ,  Marinus Jochemsen ,  Yen-Wen Lu ,  Lin Lee Cheong

IPC: G06F30/20 ,  G03F7/20 ,  G06T7/00 ,  G06K9/62 ,  G06F30/398 ,  G06N20/00

Abstract: Methods of identifying a hot spot from a design layout or of predicting whether a pattern in a design layout is defective, using a machine learning model. An example method disclosed herein includes obtaining sets of one or more characteristics of performance of hot spots, respectively, under a plurality of process conditions, respectively, in a device manufacturing process; determining, for each of the process conditions, for each of the hot spots, based on the one or more characteristics under that process condition, whether that hot spot is defective; obtaining a characteristic of each of the process conditions; obtaining a characteristic of each of the hot spots; and training a machine learning model using a training set including the characteristic of one of the process conditions, the characteristic of one of the hot spots, and whether that hot spot is defective under that process condition.

公开(公告)号：US11183434B2

公开(公告)日：2021-11-23

申请号：US16466665

申请日：2017-12-13

Applicant: ASML NETHERLANDS B.V.

Inventor： Yu Cao ,  Yi Zou ,  Chenxi Lin

IPC: H01L21/66 ,  G03F7/20 ,  G05B19/418 ,  G06T7/00

Abstract: A method where deviations of a characteristic of an image simulated by two different process models or deviations of the characteristic simulated by a process model and measured by a metrology tool, are used for various purposes such as to reduce the calibration time, improve the accuracy of the model, and improve the overall manufacturing process.