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11.

发明专利
Optical element for a lithographic apparatus, lithographic apparatus comprising such optical element and method for making the optical element. 未知

公开(公告)号：NL2003256A1

公开(公告)日：2010-02-09

申请号：NL2003256

申请日：2009-07-22

Applicant: ASML NETHERLANDS BV

Inventor： SJMAENOK LEONID , BANINE VADIM , MOORS ROEL , GLUSHKOV DENIS , YAKUNIN ANDREY

IPC: G03F7/20

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