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11.发明公开ORGANIC POLYMERIC ANTIREFLECTIVE COATINGS DEPOSITED BY CHEMICAL VAPOR DEPOSITION 有权有机高分子防反射涂层的化学气相沉积BE
公开(公告)号：EP1269258A4
公开(公告)日：2010-03-10
申请号：EP01905408
申请日：2001-02-02
Applicant: BREWER SCIENCE INC
Inventor： BREWER TERRY , GUERRERO DOUGLAS , SABNIS RAM W , SPENCER MARY J
IPC: G03F7/11 , C23C16/46 , G03F7/09 , H01L21/027 , G03C1/76 , G03C1/492 , G03C1/494 , G03F7/00 , G11B7/24
CPC classification number: G03F7/091 , Y10S430/136 , Y10S430/151
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