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公开(公告)号：AU4349489A
公开(公告)日：1990-04-18
申请号：AU4349489
申请日：1989-09-25
Applicant: BREWER SCIENCE INC
Inventor： LAMB JAMES E III , BREWER TERRY , MORI J MICHAEL
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公开(公告)号：AU3329001A
公开(公告)日：2001-09-03
申请号：AU3329001
申请日：2001-02-02
Applicant: BREWER SCIENCE INC
Inventor： BREWER TERRY , GUERRERO DOUGLAS , SABNIS RAM W , SPENCER MARY J
IPC: G03F7/11 , C23C16/46 , G03F7/09 , H01L21/027 , G03C1/76 , G03C1/492 , G03C1/494 , G11B7/24 , G03F7/00
Abstract: An improved method for applying organic antireflective coatings to substrate surfaces and the resulting precursor structures are provided. Broadly, the methods comprise chemical vapor depositing (CVD) an antireflective compound on the substrate surface. In one embodiment, the compound is highly strained (e.g., having a strain energy of at least about 10 kcal/mol) and comprises two cyclic moieties joined to one another via a linkage group. The most preferred monomers are [2.2](1,4)-naphthalenophane and [2.2](9,10)-anthracenophane. The CVD processes comprise heating the antireflective compound so as to vaporize it, and then pyrolizing the vaporized compound to form stable diradicals which are subsequently polymerized on a substrate surface in a deposition chamber. The inventive methods are useful for providing highly conformal antireflective coatings on large substrate surfaces having super submicron (0.25 mum or smaller) features.
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公开(公告)号：DE3856007T2
公开(公告)日：1998-02-05
申请号：DE3856007
申请日：1988-01-12
Applicant: BREWER SCIENCE INC
Inventor： BREWER TERRY , HAWLEY DAN , LAMB JAMES , LATHAM WILLIAM , STICHNOTE LYNN
Abstract: Filters (10, 15) suitable for microelectronic uses and the like may be prepared directly on substrates (250) either as monolithically integrated filters (10) or as hybrid filters (50) using a soluble dye material in a resin (252). The resin (252) may be applied to microelectronic substrates (250) and patterned by conventional microphotolitho-graphic processes.
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公开(公告)号：AT541236T
公开(公告)日：2012-01-15
申请号：AT01905408
申请日：2001-02-02
Applicant: BREWER SCIENCE INC
Inventor： BREWER TERRY , GUERRERO DOUGLAS , SABNIS RAM , SPENCER MARY
Abstract: An improved method for applying organic antireflective coatings to substrate surfaces and the resulting precursor structures are provided. Broadly, the methods comprise chemical vapor depositing (CVD) an antireflective compound on the substrate surface. In one embodiment, the compound is highly strained (e.g., having a strain energy of at least about 10 kcal/mol) and comprises two cyclic moieties joined to one another via a linkage group. The most preferred monomers are [2.2](1,4)-naphthalenophane and [2.2](9,10)-anthracenophane. The CVD processes comprise heating the antireflective compound so as to vaporize it, and then pyrolizing the vaporized compound to form stable diradicals which are subsequently polymerized on a substrate surface in a deposition chamber. The inventive methods are useful for providing highly conformal antireflective coatings on large substrate surfaces having super submicron (0.25 mum or smaller) features.
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公开(公告)号：DE68928548D1
公开(公告)日：1998-02-19
申请号：DE68928548
申请日：1989-09-25
Applicant: BREWER SCIENCE INC
Inventor： LAMB JAMES , BREWER TERRY , MORI J
IPC: G03F7/004 , G03F7/039 , G03F7/085 , G03F7/09 , H01L21/027
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Patent Agency Ranking6.发明专利
公开(公告)号：AU4646189A
公开(公告)日：1990-05-28
申请号：AU4646189
申请日：1989-11-07
Applicant: BREWER SCIENCE INC
Inventor： BREWER TERRY , MOSS MARY , CUZMAR RUTH , HAWLEY DAN , FLAIM TONY
IPC: G03F7/039 , H01L21/312 , H01L23/532 , H01L29/00 , G03C1/60 , G03F7/26
Abstract: Positive working polyamic acid photoresist compositions are disclosed having improved high resolution upon image development and exhibiting stable photosensitivity and superior dielectric performance. The compositions comprise polyamic acid condensation products of an aromatic dianhydride and an aromatic di-primary amine wherein a percentage of the diamine comprises special dissolution inhibiting monomers. The compositions may be further improved by the presence of particular supplemental additives.
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公开(公告)号：CA2400157A1
公开(公告)日：2001-08-30
申请号：CA2400157
申请日：2001-02-02
Applicant: BREWER SCIENCE INC
Inventor： SPENCER MARY J , SABNIS RAM W , GUERRERO DOUGLAS , BREWER TERRY
IPC: G03F7/11 , C23C16/46 , G03F7/09 , H01L21/027 , G03C1/76 , G03F7/00 , G11B7/24 , G03C1/492 , G03C1/494
Abstract: An improved method for applying organic antireflective coatings to substrate surfaces and the resulting precursor structures are provided. Broadly, the methods comprise chemical vapor depositing (CVD) an antireflective compound on the substrate surface. In one embodiment, the compound is highly strained (e.g., having a strain energy of at least about 10 kcal/mol) and comprises t wo cyclic moieties joined to one another via a linkage group. The most preferre d monomers are [2.2](1,4)-naphthalenophane and [2.2](9,10)-anthracenophane. Th e CVD processes comprise heating the antireflective compound so as to vaporize it, and then pyrolizing the vaporized compound to form stable diradicals whi ch are subsequently polymerized on a substrate surface in a deposition chamber. The inventive methods are useful for providing highly conformal antireflecti ve coatings on large substrate surfaces having super submicron (0.25.mu.m or smaller) features.
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公开(公告)号：DE68928548T2
公开(公告)日：1998-04-23
申请号：DE68928548
申请日：1989-09-25
Applicant: BREWER SCIENCE INC
Inventor： LAMB JAMES , BREWER TERRY , MORI J
IPC: G03F7/004 , G03F7/039 , G03F7/085 , G03F7/09 , H01L21/027
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公开(公告)号：DE3856007D1
公开(公告)日：1997-10-02
申请号：DE3856007
申请日：1988-01-12
Applicant: BREWER SCIENCE INC
Inventor： BREWER TERRY , HAWLEY DAN , LAMB JAMES , LATHAM WILLIAM , STICHNOTE LYNN
Abstract: Filters (10, 15) suitable for microelectronic uses and the like may be prepared directly on substrates (250) either as monolithically integrated filters (10) or as hybrid filters (50) using a soluble dye material in a resin (252). The resin (252) may be applied to microelectronic substrates (250) and patterned by conventional microphotolitho-graphic processes.
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公开(公告)号：AU5433890A
公开(公告)日：1990-11-05
申请号：AU5433890
申请日：1990-03-30
Applicant: BREWER SCIENCE INC
Inventor： BREWER TERRY , FLAIM TONY , LAMB JAMES E III , BARNES GREGG A
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