公开(公告)号：CA2400157A1

公开(公告)日：2001-08-30

申请号：CA2400157

申请日：2001-02-02

Applicant: BREWER SCIENCE INC

Inventor： SPENCER MARY J ,  SABNIS RAM W ,  GUERRERO DOUGLAS ,  BREWER TERRY

IPC: G03F7/11 ,  C23C16/46 ,  G03F7/09 ,  H01L21/027 ,  G03C1/76 ,  G03F7/00 ,  G11B7/24 ,  G03C1/492 ,  G03C1/494

Abstract: An improved method for applying organic antireflective coatings to substrate surfaces and the resulting precursor structures are provided. Broadly, the methods comprise chemical vapor depositing (CVD) an antireflective compound on the substrate surface. In one embodiment, the compound is highly strained (e.g., having a strain energy of at least about 10 kcal/mol) and comprises t wo cyclic moieties joined to one another via a linkage group. The most preferre d monomers are [2.2](1,4)-naphthalenophane and [2.2](9,10)-anthracenophane. Th e CVD processes comprise heating the antireflective compound so as to vaporize it, and then pyrolizing the vaporized compound to form stable diradicals whi ch are subsequently polymerized on a substrate surface in a deposition chamber. The inventive methods are useful for providing highly conformal antireflecti ve coatings on large substrate surfaces having super submicron (0.25.mu.m or smaller) features.

公开(公告)号：AU3329001A

公开(公告)日：2001-09-03

申请号：AU3329001

申请日：2001-02-02

Applicant: BREWER SCIENCE INC

Inventor： BREWER TERRY ,  GUERRERO DOUGLAS ,  SABNIS RAM W ,  SPENCER MARY J

IPC: G03F7/11 ,  C23C16/46 ,  G03F7/09 ,  H01L21/027 ,  G03C1/76 ,  G03C1/492 ,  G03C1/494 ,  G11B7/24 ,  G03F7/00

Abstract: An improved method for applying organic antireflective coatings to substrate surfaces and the resulting precursor structures are provided. Broadly, the methods comprise chemical vapor depositing (CVD) an antireflective compound on the substrate surface. In one embodiment, the compound is highly strained (e.g., having a strain energy of at least about 10 kcal/mol) and comprises two cyclic moieties joined to one another via a linkage group. The most preferred monomers are [2.2](1,4)-naphthalenophane and [2.2](9,10)-anthracenophane. The CVD processes comprise heating the antireflective compound so as to vaporize it, and then pyrolizing the vaporized compound to form stable diradicals which are subsequently polymerized on a substrate surface in a deposition chamber. The inventive methods are useful for providing highly conformal antireflective coatings on large substrate surfaces having super submicron (0.25 mum or smaller) features.

公开(公告)号：EP1269258A4

公开(公告)日：2010-03-10

申请号：EP01905408

申请日：2001-02-02

Applicant: BREWER SCIENCE INC

Inventor： BREWER TERRY ,  GUERRERO DOUGLAS ,  SABNIS RAM W ,  SPENCER MARY J

IPC: G03F7/11 ,  C23C16/46 ,  G03F7/09 ,  H01L21/027 ,  G03C1/76 ,  G03C1/492 ,  G03C1/494 ,  G03F7/00 ,  G11B7/24

CPC classification number: G03F7/091 ,  Y10S430/136 ,  Y10S430/151