PATTERNED STRUCTURE REPRODUCTION USING NONSTICKING MOLD
    13.
    发明公开
    PATTERNED STRUCTURE REPRODUCTION USING NONSTICKING MOLD 审中-公开
    代表作品VON GEMUSTERTER STRUKTUR UNTER VERWENDUNG VON NICHTHAFTENDER FORM

    公开(公告)号:EP1441868A4

    公开(公告)日:2006-08-30

    申请号:EP02784090

    申请日:2002-10-10

    CPC classification number: G03F7/0002 B29C33/3857 B29C33/62

    Abstract: Nonstick molds (16) and method of forming and using such molds are provided. The molds are formed of a nonstick material such as those selected from the group consisting of fluoropolymers, fluorinated siloxane polymers, silicones, and mixtures thereof. The nonstick mold is imprinted with a negative image of a master mold, where the master mold is designed to have a topography pattern corresponding to that desired surface on the surface of a microelectronic substrate. The nonstick mold (16) is then used to transfer the pattern or image (18) to a flowable film (20) on the substrate (22) surface. This film is subsequently cured or hardened, resulting in the desired pattern (26) ready for further processing.

    Abstract translation: 提供不粘模具(16)以及形成和使用这种模具的方法。 模具由不粘材料形成,例如选自含氟聚合物,氟化硅氧烷聚合物,硅氧烷及其混合物的那些材料。 不粘模具印有主模具的负像,其中主模具被设计成具有对应于微电子衬底表面上的所需表面的形貌图案。 然后使用不粘模具(16)将图案或图像(18)转印到基底(22)表面上的可流动薄膜(20)上。 随后该膜被固化或硬化,导致所需的图案(26)准备进一步加工。

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