公开(公告)号：JPH10157139A

公开(公告)日：1998-06-16

申请号：JP33885696

申请日：1996-12-04

Applicant: CANON KK

Inventor： ONO NORIYUKI ,  INABA MASAKI ,  GOTO AKIRA ,  FURUKAWA MASAAKI ,  TATSUMI JUNJI ,  ISHIMATSU SHIN ,  HASEGAWA TOSHINORI

IPC: B41J2/135

Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a highly accurate liquid jet recording head easily by combining a top plate, provided with a plurality of channels and jet ports through laser machining, with a substrate having a plurality of jet energy generation elements. SOLUTION: Using a laser mask provided with a channel pattern and a reference plane pattern matching the dimensions of a substrate, a plurality of channels 1f and a reference plane 1e for fixing are formed in a top plate 1 of synthetic resin by laser machining. The top plate 1 provided with the channels 1e and jet ports is then mounted on the substrate 3 and the top plate 1 is shifted to abut, at the reference plane 1e thereof, against the cutting face 3b of the substrate 3. Consequently, the channel 1f can be aligned with a jet energy generation element 3a and a highly accurate positioning can be realized without requiring conventional noncontact alignment for image processing or positional correction.

公开(公告)号：JPH10118782A

公开(公告)日：1998-05-12

申请号：JP27349396

申请日：1996-10-16

Applicant: CANON KK

Inventor： ISHIMATSU SHIN ,  GOTO AKIRA ,  ITO YOSHINORI ,  ABE TSUTOMU ,  FURUKAWA MASAAKI ,  HASEGAWA TOSHINORI ,  INABA MASAKI ,  KOMATA KOICHI

IPC: B23K26/00 ,  B23K26/066 ,  B23K26/382 ,  B41J2/14 ,  B41J2/145 ,  B41J2/16 ,  B23K26/06

Abstract: PROBLEM TO BE SOLVED: To produce a cubic shape with recessing and projecting parts in the irradiation direction of laser beam at first machining, by installing an extinction part less than the quotient of the set multiplying factor of the resolving power of an optical projector system on a mask. SOLUTION: An extinction part 26 is installed on a mask. The extinction part is made of a chrome layer of being less than the quotient of a prescribed multiplying factor of a revolving power of an optical projector system. For example, the revolving power of the optical projector system is made as 0.002mm, and the setting multiplying factor is made as 1/4 times. The extinction part of a square of one side being 0.002m is arranged in a pseudo error diffusion pattern. 0.002/(1/4)=0.008mm. The dimension of the extinction part 26 is 0.002mm and less than 0.008mm, so the image formation is not made on the face of work. However, the laser light is decreased. When machining using the extinction part, the depth of a groove of a part A equivalent to the extinction part 26 is made shallow. When the extinction part 26 is arranged in an arbitrary composition among the pattern of the mask, a cubic groove with the recessing and projecting parts is obtained at the first machining.

公开(公告)号：JP2000158659A

公开(公告)日：2000-06-13

申请号：JP36608298

申请日：1998-12-08

Applicant: CANON KK

Inventor： HASEGAWA TOSHINORI ,  ISHIMATSU SHIN ,  GOTO AKIRA ,  ITO YOSHINORI ,  FURUKAWA MASAAKI ,  INABA MASAKI ,  SAITO AKIO

IPC: B41J2/135 ,  B23K26/00 ,  B23K26/382 ,  B41J2/14 ,  B41J2/145 ,  B41J2/16 ,  H01S3/10

Abstract: PROBLEM TO BE SOLVED: To eliminate deviation in the machining dimensions and pitch of holes and trenches and occurrence of bur around an ejection opening while keeping a desired size of the holes and trenches without increasing the machining time by varying the energy density per unit time of laser light being projected to a work. SOLUTION: A work W is trenched or bored by projecting a laser light L while varying the energy density thereof per unit time. For example, a laser light L having a high energy density per unit time is employed until completion of trenching an ink channel or boring a liquid ejection opening and the energy density is lowered to a level causing no deformation of resin nor occurrence of bur immediately before completion of trenching or boring. According to the method, an ejection opening of desired size or a liquid channel of desired depth can be machined accurately.

公开(公告)号：JPH11198388A

公开(公告)日：1999-07-27

申请号：JP1340798

申请日：1998-01-07

Applicant: CANON KK

Inventor： ORIGASA TAKESHI ,  YOSHIHARA YOSHIHIKO ,  KIGAMI HIROYUKI ,  KOTAKI YASUO ,  FURUKAWA MASAAKI ,  OKAWA MASAYOSHI

IPC: B41J2/05 ,  B41J2/16

Abstract: PROBLEM TO BE SOLVED: To align a top plate and an element substrate accurately using a simple and low cost apparatus and to assemble them at a short tact without damaging the top plate. SOLUTION: A base plate 30 pasted with an element substrate 20 is positioned on the upper surface of a jig base 50 inclining obliquely rearward with respect to a horizontal plane P and secured in place. After being transferred onto the element substrate 20, a top plate 10 is oscillated by an oscillator arranged on the jig base 50 to move smoothly on the element substrate 20 along the inclining direction thus bringing the reference abutting part 16 of the top plate 10 into precise contact with the side end face of the element substrate 20 and the lower part of the jetting port plate 11 of the top plate 10 with the front end face of the element substrate 20 respectively. After stopping oscillation, the top plate 10 and the element substrate 20 are secured through a spring using a spring hooking jig under a state the upper surface of the top plate 10 is pressed by a Z pressing jig 57.

公开(公告)号：JPH1191116A

公开(公告)日：1999-04-06

申请号：JP27062197

申请日：1997-09-17

Applicant: CANON KK

Inventor： FURUKAWA MASAAKI ,  INABA MASAKI ,  ITO YOSHINORI ,  ISHIMATSU SHIN ,  GOTO AKIRA ,  HASEGAWA TOSHINORI ,  SAITO AKIO

IPC: B41J2/135 ,  B23K26/066 ,  B23K26/382 ,  B41J2/14 ,  B41J2/145 ,  B41J2/16 ,  B23K26/00 ,  B23K26/06

Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid jet recording head in which a liquid channel and a jet port can be machined with high accuracy by evaluating the laser irradiation state and feeding back laser information and the operating rate of apparatus can be enhanced while reducing the cost. SOLUTION: When a liquid channel and a jet port are made in the resin top plate of a liquid jet recording head by laser machining, a liquid channel 23 being machined through irradiation with laser light 12 is observed and the image thereof is processed. The depth (d) of the liquid channel is measured simultaneously with machining alignment of jet port and compared with a preset standard value. Subsequently, the output state of current laser is recognized and evaluated based on the comparison results thus determining the correction quantity of laser irradiation energy for next machining. The information is fed back to a control section and a laser light source and the voltage being applied to the laser light source is regulated to emit a laser light 12 having an optimal irradiation energy density thus machining a jet port, or the like, with high accuracy.

公开(公告)号：JPH1178032A

公开(公告)日：1999-03-23

申请号：JP25610197

申请日：1997-09-04

Applicant: CANON KK

Inventor： TAKIMOTO MASAFUMI ,  INABA MASAKI ,  GOTO AKIRA ,  FURUKAWA MASAAKI ,  HASEGAWA TOSHINORI ,  ITO YOSHINORI ,  SAITO AKIO

IPC: B41J2/16 ,  B23K26/00 ,  B23K26/046 ,  B23K26/16 ,  B23K26/364 ,  B23K26/382 ,  B41J2/14 ,  H01S3/00 ,  B23K26/04

Abstract: PROBLEM TO BE SOLVED: To remove debris being generated when a liquid channel, a jet port, or the like, are formed on the top plate of a liquid jet recording head by laser machining without causing any damage on the compositional members of the top plate or a water repellent layer. SOLUTION: When a liquid channel or a jet port is formed in a top plate 50 constituting a liquid jet recording head through irradiation with laser light, a debris 16 deposited on the wall of a liquid channel is irradiated with the secondary harmonic (wavelength: 532 nm) of a YAG laser which is absorbed by the debris 16 but not absorbed by a resin composing the top plate 50 generated from a laser oscillator 11. The secondary harmonic is passed through lenses 12, 13 and the slit 15a in a mask 15 to produce a beam of desired shape which is then condensed through a lens 14 to a region of the top plate 50 adhered with the debris 16, e.g. the wall of liquid channel, in order to irradiate the debris 16. According to the method, only the debris can be removed selectively without having any effect on the resin composing the top plate.

公开(公告)号：JPH11291359A

公开(公告)日：1999-10-26

申请号：JP9460198

申请日：1998-04-07

Applicant: CANON KK

Inventor： HASEGAWA TOSHINORI ,  GOTO AKIRA ,  TAKIMOTO MASAFUMI ,  FURUKAWA MASAAKI ,  INABA MASAKI ,  ITO YOSHINORI

IPC: B41J2/16 ,  B29C71/00

Abstract: PROBLEM TO BE SOLVED: To improve a throughput in manufacturing a recording head by previously emitting a light having a predetermined energy to a predetermined position of a resin material, discoloring the material, and providing an aligning marker for assembling and connecting a product with the material as one component, thereby rapidly conducting a binarizing process of an image. SOLUTION: A resin to become a positioning marker 104 is discolored by a light 103 passing a photomask 102. If the light 103 has, for example, an energy density of 1 J/cm , the discoloring of the resin material 102 is completed by emitting the light 103 of about 5 pulses. A discoloring position, i.e., a position for providing a positioning marker 104 at the material 101 can be freely altered by variously changing the mask 102. Thus, it can be conducted in a short time to provide the marker 104 at a predetermined position on the resin material. The position and the shape of providing the marker 104 can be freely regulated and altered by the photomask 102.

公开(公告)号：JPH11285887A

公开(公告)日：1999-10-19

申请号：JP10692698

申请日：1998-04-02

Applicant: CANON KK

Inventor： ITO YOSHINORI ,  GOTO AKIRA ,  ISHIMATSU SHIN ,  INABA MASAKI ,  HASEGAWA TOSHINORI ,  TAKIMOTO MASAFUMI ,  FURUKAWA MASAAKI

IPC: B41J2/16 ,  B23K26/142 ,  B23K26/16 ,  B41J2/00 ,  B41J2/14 ,  B41J3/407 ,  B23K26/14

Abstract: PROBLEM TO BE SOLVED: To remove, without damaging a workpiece, a pollutant (byproduct) firmly stuck to the workpiece at the time of abrasion, film-forming or other working which is performed by emitting a laser beam to resin. SOLUTION: In forming plural grooves 2 in a workpiece (base material) 1 made of resin by abrasion or other working which is performed by irradiation of a laser beam, a vibration block 11 connected to a piezo-actuator 12 is abutted on the workpiece 1, in which the byproduct (pollutant) 3 formed in accordance with the working is stuck to the inside of the groove 2 or its wall part 2a, so that the workpiece 1 is vibrated, with a pollutant 3 separated from it; then, by blowing off nitrogen gas 17, the pollutant 3 is completely removed from the workpiece 1.

公开(公告)号：JPH11157086A

公开(公告)日：1999-06-15

申请号：JP33177097

申请日：1997-12-02

Applicant: CANON KK

Inventor： GOTO AKIRA ,  HASEGAWA TOSHINORI ,  ITO YOSHINORI ,  TAKIMOTO MASAFUMI ,  FURUKAWA MASAAKI ,  INABA MASAKI

IPC: B41J2/05 ,  B41J2/16

Abstract: PROBLEM TO BE SOLVED: To prevent an obstacle when an orifice plate is united, invasion of a sealing agent or loss of a discharge pressure, etc., by providing a step intentionally between a substrate and a top plate in connecting, and absorbing the step by a recessed step formed at the orifice plate. SOLUTION: A silicon substrate 1 having a patterned energy generation element 2 is used. 64 ink passage grooves 4 are formed at a top plate 3 with a pitch of 70.5 μm by a transfer from a mold to conform to the energy generation element 2 for discharging ink. A 5-10 μm step 10 is secured when the substrate 1 is united to the top plate 3. An orifice plate 7 has an orifice 8 and a 20 μm recess 9 formed by a KrF excimer laser oscillating a light of a wavelength (λ=248nm) strongly absorptive to polyethersulfone to a 35 μm polyethersulfone film.

公开(公告)号：JPH1191115A

公开(公告)日：1999-04-06

申请号：JP27052197

申请日：1997-09-17

Applicant: CANON KK

Inventor： GOTO AKIRA ,  HASEGAWA TOSHINORI ,  ITO YOSHINORI ,  FURUKAWA MASAAKI ,  INABA MASAKI ,  TAKIMOTO MASAFUMI ,  ISHIMATSU SHIN

IPC: B41J2/135 ,  B23K26/06 ,  B23K26/064 ,  B23K26/073 ,  B23K26/382 ,  B41J2/145 ,  B41J2/16 ,  B23K26/00 ,  B23K26/08

Abstract: PROBLEM TO BE SOLVED: To provide a method and a system for manufacturing a liquid jet recording head in which throughput can be enhanced by simplifying the optical system while enhancing the utilization efficiency of laser beam at the time of machining a jet port through irradiation with laser beam. SOLUTION: An optical fiber bundle 7 comprising a plurality of optical fibers is secured by a securing member 8 at each emission side end face thereof such that it corresponds to the jet port forming position of a jet port forming member (work) 10 constituting a liquid jet recording head. A laser beam 2 from a laser oscillator 1 is shaped through a beam shaping optical system 6 and entered into an optical fiber bundle 8. The laser beam emitting from the emitting end face of each optical fiber in the optical fiber bundle 8 is projected while being demagnified through a projection optical system 9 onto the work 10 secured to a work station 11 thus machining all or a plurality of jet ports of the work 10 collectively.