公开(公告)号：DE10031035A1

公开(公告)日：2001-01-11

申请号：DE10031035

申请日：2000-06-26

Applicant: CASCADE MICROTECH INC

Inventor： COWAN CLARENCE E ,  TERVO PAUL A ,  DUNKLEE JOHN L

IPC: G01R31/26 ,  G01R1/06 ,  G01R1/18 ,  G01R31/28 ,  H01L21/66 ,  H01L35/00 ,  H01L35/32 ,  H01L21/68 ,  G05D23/19

Abstract: Thermal chuck comprises a chuck for holding the test device, a thermal unit for altering the chuck temperature, a controller that powers the thermal unit and a conductor which is coupled via a capacitor with the thermal unit but which has no direct connection to the unit. Conductor and controller are connected so that all thermal unit capacitative currents can be fed back to the controller.

公开(公告)号：EP1559116A4

公开(公告)日：2007-05-02

申请号：EP03768538

申请日：2003-10-24

Applicant: CASCADE MICROTECH INC

Inventor： LESHER TIMOTHY ,  MILLER BRAD ,  COWAN CLARENCE E ,  SIMMONS MICHAEL ,  GRAY FRANK ,  MCDONALD CYNTHIA L

IPC: H01B7/18 ,  G01R1/18 ,  G01R31/28 ,  G01R31/316

CPC classification number: G01R1/18 ,  G01R19/0053 ,  G01R31/2886 ,  G01R31/2889 ,  H01B11/206

Abstract: A cable includes an inner conductor, an inner dielectric, and a guard conductor, where the inner dielectric is between the inner conductor and the guard conductor. The cable also includes an outer dielectric, and a shield conductor, where the outer dielectric is between the guard conductor and the shield conductor. The cable further includes an additional layer of material between the outer dielectric and the shield conductor of suitable composition for reducing triboelectric current generation between the outer dielectric and the shield conductor to less than that which would occur were the outer dielectric and the shield conductor to directly adjoin each other.

公开(公告)号：EP1567871A4

公开(公告)日：2006-05-17

申请号：EP03777879

申请日：2003-10-24

Applicant: CASCADE MICROTECH INC

Inventor： DUNKLEE JOHN ,  COWAN CLARENCE E

IPC: G01R31/28 ,  G01R31/02

CPC classification number: G01R31/2851 ,  G01R31/2886 ,  G01R31/2887

Abstract: A probe assembly suitable for high-current measurements of an electrical device.

Abstract translation: 适用于电气设备的高电流测量的探头组件。

公开(公告)号：EP1570279A4

公开(公告)日：2006-11-08

申请号：EP03779339

申请日：2003-10-27

Applicant: CASCADE MICROTECH INC

Inventor： DUNKLEE JOHN ,  NORGDEN GREG ,  COWAN CLARENCE E

IPC: G01R1/18 ,  G01R31/28 ,  G01R31/02 ,  G01R27/28

CPC classification number: G01R31/2862 ,  G01R1/18 ,  G01R31/2865 ,  G01R31/2886

Abstract: A probe station with an improved guarding structure.

Abstract translation: 具有改进的防护结构（130）的探测台（110）。