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公开(公告)号：EP1509776A4
公开(公告)日：2010-08-18
申请号：EP03729099
申请日：2003-05-23
Applicant: CASCADE MICROTECH INC
Inventor： LESHER TIM , ANDREWS MIKE , MARTIN JOHN , DUNKLEE JOHN , HAYDEN LEONARD , SAFWAT AMR M E , STRID ERIC
CPC classification number: G01R1/06772 , G01R1/06711 , G01R1/06755 , G01R1/06777
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