公开(公告)号：DE60020308D1

公开(公告)日：2005-06-30

申请号：DE60020308

申请日：2000-01-31

Applicant: CASIO COMPUTER CO LTD

Inventor： KOHNO ICHIRO ,  SHIOTA JUNJI ,  KAMADA HIDEKI ,  KANEMITSU SATOSHI ,  KAWAMURA YOSHIHIRO

IPC: B41J2/16

Abstract: A printer head substrate having a silicon substrate on which heat generating elements and partitions are formed and an orifice plate which adhered to the partitions is placed on a stage of a helicon-wave dry etching system. Helicon-wave dry etching is performed while cooling the printer head substrate by allowing a coolant gas to be intervened between the substrate and the stage. This allows multiple orifices of a desired and adequate shape to be simultaneously and quickly bored in the orifice plate even if a thin film sheet having adhesive layers adhered to both sides thereof is used as the orifice plate, thereby improving the working efficiency.

公开(公告)号：AU2003219560A8

公开(公告)日：2003-10-13

申请号：AU2003219560

申请日：2003-03-28

Applicant: CASIO COMPUTER CO LTD

Inventor： OGURA NAOTSUGU ,  KAWAMURA YOSHIHIRO ,  IGARASHI AKIRA

IPC: B01J19/00 ,  B01J19/24 ,  C01B3/32 ,  C01B3/38 ,  H01M8/06 ,  H01M16/00 ,  F28F13/00 ,  F28D9/00 ,  F28F9/20

Abstract: A chemical reaction apparatus includes a solid body in which a reaction flow path is formed, and a heater having a thin-film heater formed on the body to oppose the reaction flow path and at least partially exposed to the reaction flow path, and which supplies a predetermined heat amount to the reaction flow path by the thin-film heater.

公开(公告)号：JP2003265951A

公开(公告)日：2003-09-24

申请号：JP2002071548

申请日：2002-03-15

Applicant: CASIO COMPUTER CO LTD

Inventor： KAWAMURA YOSHIHIRO ,  OGURA NAOTADA ,  IGARASHI SATORU

IPC: C01B3/32 ,  B01J19/08 ,  B01J19/24 ,  H01M8/06

Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a compact chemical reaction apparatus having a catalyst layer formed in a minute flow passage formed on one side of a silicon substrate, in which the photoresist used for forming the catalyst layer in the flow passage is removed excellently without damaging the catalyst layer remaining in the flow passage. SOLUTION: An opening 32 is formed at the position corresponding to the flow passage 22 on the photoresist 31 which is stuck to one side of the silicon substrate 21 and consists of a dry film. Next, the catalyst layer 23 is formed on the surface of the photoresist 31 including the inside surfaces of the passage 22 and the opening 32. After that, the photoresist 31 is peeled off and removed together with the unnecessary portion of the layer 23 formed on the surface of the photoresist 31. As a result, the photoresist 31 can be removed excellently without damaging the layer 23 remaining in the passage 22. COPYRIGHT: (C)2003,JPO

公开(公告)号：JP2002019116A

公开(公告)日：2002-01-23

申请号：JP2000208262

申请日：2000-07-10

Applicant: CASIO COMPUTER CO LTD

Inventor： KUMAGAI MINORU ,  KAMATA HIDEKI ,  KAWAMURA YOSHIHIRO ,  SAKURAOKA SATOSHI

IPC: B41J2/05

Abstract: PROBLEM TO BE SOLVED: To provide an ink jet printing head in which a top plate is prevented from sinking and which has a superior refilling efficiency for ink to a pressure chamber and is advantageous for high-speed printing. SOLUTION: The printing head 20 has a driving circuit 22 stacked to a substrate 21, to which a driving circuit terminal 23, a heating part 24, a common electrode 25, a power supply terminal 25-1, a common electrode opening 26, a diaphragm 27 (a seal diaphragm 27-1 and a partition diaphragm 27-2) and an ink supply port 29 are formed. Moreover, an ink groove region 30 comprising an ink inflow part 31 communicating with the ink supply port 29, two branching grooves 32a and 32b branching from the ink inflow part and extending in parallel to the ink inflow part, and a strip-shaped region 33 held between the branching grooves is formed within the common electrode opening 26. Supporting members 34 as struts for the top plate are set erecting at predetermined intervals to the strip-shaped region 33 in the ink groove region 30. The ink to be supplied to the pressure chamber 35 through an ink channel 28 from the branching grooves 32a and 32b of the ink groove region 30 smoothly flows into the pressure chamber 35 without being interrupted in the halfway.

公开(公告)号：JP2001162803A

公开(公告)日：2001-06-19

申请号：JP35092499

申请日：1999-12-10

Applicant: CASIO COMPUTER CO LTD

Inventor： KAMATA HIDEKI ,  KANEMITSU SATOSHI ,  TANAKA KOICHI ,  NAKAMURA OSAMU ,  KAWAMURA YOSHIHIRO ,  YAMAGUCHI TOMOHARU

IPC: B41J2/05 ,  B41J2/16

Abstract: PROBLEM TO BE SOLVED: To provide a monolithic ink jet printer head ensuring a good print quality stably by preventing generation of a bubble through electrolysis of ink. SOLUTION: The ink jet printer head comprises a drive circuit 23 of diffusion layer, an oxide film 39, a heater layer 24 (heating part 24a, extension part 24b), an adhesion layer 41, an electrode layer (common electrode 25, discrete wiring electrode 26), an insulation layer 42, a barrier wall (29-1, 29-2, 29-3), and an orifice plate 31 formed sequentially on the upper surface of a chip substrate 22. An ejection nozzle 34 is made in the orifice plate 31 and an ink channel (ink supply path 27, ink supply hole 28) is made in a chip substrate 22. Since electrical contact of a common electrode 25, the discrete wiring electrode 26 and the heating part 24a of the heater layer with ink is blocked by means of an insulation layer 42, current flow from the electrode to the exposed silicon part of the ink channel is blocked even if a voltage for driving the heating part 24a is applied from an external power supply through electrodes 25, 26 by means of a drive circuit 23. Consequently, electrochemical change of ink is inhibited thus preventing generation of a bubble.

公开(公告)号：JP2001130009A

公开(公告)日：2001-05-15

申请号：JP31153399

申请日：1999-11-01

Applicant: CASIO COMPUTER CO LTD

Inventor： KAWAMURA YOSHIHIRO

IPC: B41J2/16 ,  B41J2/05

Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method for an ink jet printer head exhibiting excellent workability in which an ejection opening can be shaped correctly and easily. SOLUTION: A barrier wall material 31' and a thermoplastic polyimide adhesive layer 38 are applied sequentially onto the entire upper surface of a chip substrate 20 and then a metal film is sputtered thereon and etched to obtain a metal mask 39 for forming a barrier wall. The two layer structure of the barrier wall material 31' and the adhesive layer 38 is then dry etched along the metal mask 39 and a removing port 32 is removed to form a barrier wall 31 (31-1, 31-2, 31-3). Subsequently, a residual metal mask 39 is removed to expose the adhesive layer 38 on the barrier wall 31, an orifice plate 33 is attached thereto and a pattern 42 for forming ejection nozzles through the metal mask 35 is formed thereon before forming ejection nozzles 36 by helicon wave etching. Since the adhesive layer 38 is not present at parts for boring the ejection nozzles, excess adhesive is prevented from causing troubles, e.g. unstable shaping of ejection opening or generation of residues, after etching.

公开(公告)号：JP2001038909A

公开(公告)日：2001-02-13

申请号：JP21911499

申请日：1999-08-02

Applicant: CASIO COMPUTER CO LTD

Inventor： KAWAMURA YOSHIHIRO ,  KANEMITSU SATOSHI

IPC: B41J2/05 ,  B41J2/16

Abstract: PROBLEM TO BE SOLVED: To provide an ink jet printing head not generating the irregularity of ink emitting capacity at each emitting nozzle caused by the height non- uniformity of ink flow channels generated by the bulding-up of the edge part of a partition wall or the hanging-down of a top plate. SOLUTION: Metal supports 20 having a height of 10 μm being the usual interval between a top plate 32 and a chip substrate 20 are formed on the chip substrate 20 having heating parts 23 and electrodes formed thereon by electroplating. Next, partition walls 29 (29-2, 29-3) are baked to be formed patternwise so as to become higher than the metal supports 34 by several μm. Succeedingly, the upper surfaces of the partition walls 29 are polished and shaved by a polishing method such as CMP to make the height of the partition walls 29 same as that of the metal supports 34. Thereafter, a common ink supply groove and ink receiving/supplying holes are formed and the top plate 32 is laminated to the partition walls and ink emitting nozzles 35 are formed to the top plate 32.

公开(公告)号：JP2000309100A

公开(公告)日：2000-11-07

申请号：JP12149599

申请日：1999-04-28

Applicant: CASIO COMPUTER CO LTD

Inventor： KAWAMURA YOSHIHIRO

IPC: B41J2/05 ,  B41J2/16

Abstract: PROBLEM TO BE SOLVED: To provide a highly reliable ink-jet printer head having a good pressuring energy efficiency, capable of ejecting an ink stably over a long time, with a good pressure storage partition wall having a good adhesion property with respect to a substrate. SOLUTION: A photosensitive polyimide is coated on the upper entire surface of a substrate 20 as a base layer 41 so as to be closely contacted on an inert metal electrode film on the substrate 20. A partition wall 31 is patterned on the base layer 41 so as to form an ink seal wall and a heat generating part section wall. After formation of a common ink supply groove and an ink supply hole, an orifice plate 33 is laminated on the partition wall 31. A metal film is patterned thereon so as to form a metal film mask 42. The orifice plate 33 is dry-etched by a helicon wave, or the like so as to form an ink jetting nozzle 35 along the metal film mask 42. By continuing the etching operation so as to drill the base layer 41 in the area with the heat generating part 25 formed, immediately below the ink ejecting nozzle 35, the heat generating part 25 is exposed.

公开(公告)号：JPH11339959A

公开(公告)日：1999-12-10

申请号：JP15999998

申请日：1998-05-26

Applicant: CASIO COMPUTER CO LTD

Inventor： KAWAMURA YOSHIHIRO

IPC: H05B33/12 ,  H05B33/22

Abstract: PROBLEM TO BE SOLVED: To provide a display device capable of improving display quality at the time of non-lighting while preventing the visual recognition of the fluorescent color of a color converting layer and of improving a contrast between picture elements at the time of selective lighting. SOLUTION: A transparent electrode 12, an organic EL layer 13, a back surface electrode 14 are formed on the back surface of a first transparent board 11 so as to form a light emitting part. A first black layer 16 is formed on the back surface of a second transparent board 15, and an annular opening part 16A is formed at a part corresponding to the light emitting part, and a color converting layer 17 is arranged on the back surface of a black mask 16B surrounded by the opening part 16A. A second black layer 18 is formed on the back surface of the first black layer 17, and the light emitting part and the color converting layer 17 are arranged opposite to each other through a space 18A formed in the second black layer 18. With this structure, intrusion of the external light into the color converting layer 17 is shielded by the black mask 16B, and the visual recognition of the fluorescent color of the color converting layer is prevented so as to improve the dignity of display at the time of non-lighting, and a contrast between picture elements at the time of selective lighting can be improved.

公开(公告)号：JPH0980406A

公开(公告)日：1997-03-28

申请号：JP25726795

申请日：1995-09-11

Applicant: CASIO COMPUTER CO LTD

Inventor： KAWAMURA YOSHIHIRO

IPC: G02F1/1333

Abstract: PROBLEM TO BE SOLVED: To obviate the development of connection defects, such as disconnection. SOLUTION: This liquid crystal display device is constituted by projecting the right end of a lower film substrate 6 from the right end of an upper film substrate 5 to form a projecting part 6a and arranging and forming plural connecting terminals 11 atop the projecting part 6a. In such a case notched and recessed parts 21 are formed to face each other in both outer parts in the arrangement of the connecting terminals 11 at the projecting part 6a and, therefore, such bending stress as to bend the projecting part 6a downward acts thereon, the parts between the notched and recessed parts 21 of the projecting part 6a are curved by the arc of the width X of the notched and recessed parts 21. The projecting part 6a is thus prevented from bending which is nearly flexing, unlike with the conventional liquid crystal display devices. Then, the connecting terminals 11 formed in the projecting part 6a are also curved by the arc of the width of the notched and recessed parts 21 and the development of the connection defects, such as disconnection, is averted.