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    ROUTING OF MEMS VARIABLE CAPACITORS FOR RF APPLICATIONS
    11.
    发明申请
    ROUTING OF MEMS VARIABLE CAPACITORS FOR RF APPLICATIONS 审中-公开
    用于射频应用的MEMS可变电容器的布线

    公开(公告)号：WO2013028546A1

    公开(公告)日：2013-02-28

    申请号：PCT/US2012/051427

    申请日：2012-08-17

    Applicant: CAVENDISH KINETICS, INC ,  GADDI, Roberto ,  VAN KAMPEN, Robertus Petrus ,  KNIPE, Richard L. ,  UNAMUNO, Anartz

    Inventor： GADDI, Roberto ,  VAN KAMPEN, Robertus Petrus ,  KNIPE, Richard L. ,  UNAMUNO, Anartz

    IPC: H01G5/16 ,  H01G5/38 ,  H01H59/00 ,  B81B3/00

    CPC classification number: H01G5/16 ,  H01G5/38 ,  H01G7/00 ,  H01H59/0009 ,  Y10T29/43

    Abstract: The present invention generally relates to a variable capacitor for RF and microwave applications. The variable capacitor includes a bond pad that has a plurality of cells electrically coupled thereto. Each of the plurality of cells has a plurality of MEMS devices therein. The MEMS devices share a common RF electrode, one or more ground electrodes and one or more control electrodes. The RF electrode, ground electrodes and control electrodes are all arranged parallel to each other within the cells. The RF electrode is electrically connected to the one or more bond pads using a different level of electrical routing metal.

    Abstract translation: 本发明一般涉及用于RF和微波应用的可变电容器。 可变电容器包括具有与其电耦合的多个单元的接合焊盘。 多个单元中的每一个在其中具有多个MEMS器件。 MEMS器件共享公共RF电极，一个或多个接地电极和一个或多个控制电极。 RF电极，接地电极和控制电极都在电池内彼此平行布置。 RF电极使用不同级别的电路由金属电连接到一个或多个接合焊盘。

    ESD PROTECTION OF MEMS RF APPLICATIONS
    13.
    发明申请
    ESD PROTECTION OF MEMS RF APPLICATIONS 审中-公开
    MEMS射频应用的ESD保护

    公开(公告)号：WO2017087338A1

    公开(公告)日：2017-05-26

    申请号：PCT/US2016/061933

    申请日：2016-11-14

    Applicant: CAVENDISH KINETICS, INC.

    Inventor： GADDI, Roberto ,  HUFFMAN, James Douglas ,  NIU, Chenhui ,  PARKHURST, Ray

    IPC: H01H1/00 ,  H01H59/00 ,  H01L27/02 ,  H04B1/04 ,  H04B1/16 ,  H04B1/40

    CPC classification number: H01H1/0036 ,  H01H59/0009 ,  H01L27/0248

    Abstract: The present disclosure generally relates to the combination of MEMS intrinsic technology with specifically designed solid state ESD protection circuits in state of the art solid state technology for RF applications. Using ESD protection in MEMS devices has some level of complexity in the integration which can be seen by some as a disadvantage. However, the net benefits in the level of overall performance for insertion loss, isolation and linearity outweighs the disadvantages.

    Abstract translation: 本公开总体上涉及MEMS本征技术与用于RF应用的现有技术固态技术中特别设计的固态ESD保护电路的组合。 在MEMS器件中使用ESD保护在集成中存在一定程度的复杂性，这可以被某些人视为缺点。 然而，插入损耗，隔离和线性的整体性能水平的净收益超过了这些缺点。

    DEVICE WITH VARIABLE FREQUENCY FILTER FOR REJECTING HARMONICS
    14.
    发明申请
    DEVICE WITH VARIABLE FREQUENCY FILTER FOR REJECTING HARMONICS 审中-公开
    具有可变频率滤波器的器件用于拒绝谐波

    公开(公告)号：WO2015157085A1

    公开(公告)日：2015-10-15

    申请号：PCT/US2015/024104

    申请日：2015-04-02

    Applicant: CAVENDISH KINETICS, INC

    Inventor： PARKHURST, Ray ,  GADDI, Roberto

    IPC: H04B1/12 ,  H04B1/18 ,  H04B1/04

    CPC classification number: H04B1/123 ,  H04B1/0458 ,  H04B1/18

    Abstract: The present disclosure generally relates to a device having a variable frequency filter that rejects harmonics generated by a variable reactance device. The variable frequency filter may be coupled to the antenna and the variable reactance device. The filter includes a variable capacitor and an inductor coupled together as a resonant circuit. The filter may be used in cellular technology to prevent harmonic frequencies that are created by another variable reactance device from reaching the antenna of the cellular device. Furthermore, the filter can reflect any receiving frequencies from the antenna and prevent the receiving frequencies from passing through.

    Abstract translation: 本公开总体上涉及一种具有可变频率滤波器的装置，其抑制由可变电抗装置产生的谐波。 可变频率滤波器可以耦合到天线和可变电抗装置。 滤波器包括作为谐振电路耦合在一起的可变电容器和电感器。 滤波器可用于蜂窝技术中以防止由另一可变电抗装置产生的谐波频率到达蜂窝设备的天线。 此外，滤波器可以反射来自天线的任何接收频率并防止接收频率通过。

    PULL UP ELECTRODE AND WAFFLE TYPE MICROSTRUCTURE
    15.
    发明申请
    PULL UP ELECTRODE AND WAFFLE TYPE MICROSTRUCTURE 审中-公开
    拉起电极和WAFFLE型微结构

    公开(公告)号：WO2012040092A1

    公开(公告)日：2012-03-29

    申请号：PCT/US2011/052118

    申请日：2011-09-19

    Applicant: CAVENDISH KINETICS, INC ,  KNIPE, Richard L. ,  VAN KAMPEN, Robertus Petrus ,  UNAMUNO, Anartz ,  GADDI, Roberto

    Inventor： KNIPE, Richard L. ,  VAN KAMPEN, Robertus Petrus ,  UNAMUNO, Anartz ,  GADDI, Roberto

    IPC: H01H1/00 ,  H01H59/00

    CPC classification number: H01H1/0036 ,  H01H59/0009 ,  H01H2001/0084

    Abstract: The present invention generally relates to MEMS devices and methods for their manufacture. The cantilever of the MEMS device may have a waffle-type microstructure. The waffle-type microstructure utilizes the support beams to impart stiffness to the microstructure while permitting the support beam to flex. The waffle-type microstructure permits design of rigid structures in combination with flexible supports. Additionally, compound springs may be used to create very stiff springs to improve hot-switch performance of MEMS devices. To permit the MEMS devices to utilize higher RF voltages, a pull up electrode may be positioned above the cantilever to help pull the cantilever away from the contact electrode.

    Abstract translation: 本发明一般涉及MEMS器件及其制造方法。 MEMS器件的悬臂可以具有华夫饼型微结构。 华夫饼形微结构利用支撑梁来赋予微结构刚度，同时允许支撑梁弯曲。 华夫饼型微结构允许将刚性结构与柔性支撑结合在一起。 此外，可以使用复合弹簧来产生非常硬的弹簧以改善MEMS装置的热开关性能。 为了允许MEMS器件利用更高的RF电压，可以将上拉电极定位在悬臂上方以帮助将悬臂从接触电极拉出。

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