公开(公告)号：WO2013033722A1

公开(公告)日：2013-03-07

申请号：PCT/US2012/053699

申请日：2012-09-04

Applicant: CAVENDISH KINETICS, INC ,  VAN KAMPEN, Robertus Petrus ,  UNAMUNO, Anartz ,  KNIPE, Richard L. ,  GADDI, Roberto ,  MAHAMEED, Rashed

Inventor： VAN KAMPEN, Robertus Petrus ,  UNAMUNO, Anartz ,  KNIPE, Richard L. ,  GADDI, Roberto ,  MAHAMEED, Rashed

IPC: H01L27/14

CPC classification number: H01H59/0009 ,  B81B3/0097 ,  B81B7/04 ,  B81B2201/018 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81B2203/0172 ,  B81B2203/0307

Abstract: The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.

Abstract translation: 本发明一般涉及具有多个悬臂的MEMS装置，所述多个悬臂在锚定区域中耦合在一起，和/或通过腿连接在悬臂的中心区域中。 腿部确保每个悬臂可以在相同电压下从RF电极上方移动/释放。 锚定区域联接器匹配悬臂的所有部分中的机械刚度，使得所有悬臂移动在一起。

公开(公告)号：EP2751837A1

公开(公告)日：2014-07-09

申请号：EP12827352.1

申请日：2012-09-04

Applicant: Cavendish Kinetics Inc.

Inventor： VAN KAMPEN, Robertus Petrus ,  UNAMUNO, Anartz ,  KNIPE, Richard L. ,  GADDI, Roberto ,  MAHAMEED, Rashed

IPC: H01L27/14

CPC classification number: H01H59/0009 ,  B81B3/0097 ,  B81B7/04 ,  B81B2201/018 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81B2203/0172 ,  B81B2203/0307

Abstract: The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.

公开(公告)号：EP2751837B1

公开(公告)日：2020-07-22

申请号：EP12827352.1

申请日：2012-09-04

Applicant: Cavendish Kinetics Inc.

Inventor： VAN KAMPEN, Robertus Petrus ,  UNAMUNO, Anartz ,  KNIPE, Richard L. ,  GADDI, Roberto ,  MAHAMEED, Rashed

IPC: B81B7/04 ,  H01L27/14