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公开(公告)号:SE1151169A1
公开(公告)日:2012-06-23
申请号:SE1151169
申请日:2011-12-07
Applicant: GEN ELECTRIC
Inventor: BLAYDES HOLLY ANN , DALAKOS GEORGE THEODORE , VERNOOY DAVID WILLIAM , NORTHRUP ALLAN ROBERT , ROJO JUAN CARLOS , MESCHTER PETER JOEL , PENG HONGYING , CAO HONGBO , XI YANGANG ANDREW , GOSSMAN ROBERT DWAYNE , ZHANG ANPING
IPC: H01L31/20
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12.
公开(公告)号:CA2697104A1
公开(公告)日:2010-09-30
申请号:CA2697104
申请日:2010-03-18
Applicant: GEN ELECTRIC
Inventor: TAN DANIEL QI , IRWIN PATRICIA CHAPMAN , DALAKOS GEORGE THEODORE , CAO YANG
Abstract: In one aspect of the present invention, a method for increasing the dielectric breakdown strength of a polymer is described. The method comprises providing the polymer and contacting a surface of the polymer in a reaction chamber with a gas plasma, under specified plasma conditions. The polymer is selected from the group consisting of a polymer having a glass transition temperature of at least about 150°C, and a polymer composite comprising at least one inorganic constituent. The contact with the gas plasma is carried out for a period of time sufficient to incorporate additional chemical functionality into a surface region of the polymer film, to provide a treated polymer. Also provided are an article and method of manufacture.
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公开(公告)号:BRPI0605712A
公开(公告)日:2007-10-16
申请号:BRPI0605712
申请日:2006-12-21
Applicant: GEN ELECTRIC
Inventor: LEWIS DANIEL JOSEPH , LOU VICTOR LIENKONG , DALAKOS GEORGE THEODORE , SAYLOR MATTHEW DAVID , WEAVER SCOTT ANDREW , RUCKER MICHAEL HOWARD
IPC: C23C16/00 , H01L21/205
Abstract: A chemical vapor deposition apparatus (10) comprises a heating element (12) capable of emitting electromagnetic radiation; a retort (16) positioned relative to the heating element (12) to receive the electromagnetic radiation; an encasing member (18) at least partially disposed around the retort (16), the encasing member (18) comprising a material that is at least partially transparent to the electromagnetic radiation; a plenum (20) defined at least in part by an inner surface (24) of the encasing member (18) and an outer surface (22) of the retort (16) ; and a furnace box (14) at least partially disposed around the encasing member (18) and the retort (16), and housing the heating element (12).
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