RAPID ACTIVE VIBRATION REDUCTION METHOD FOR HIGH-SPEED MOTION STAGE

    公开(公告)号:US20230235810A1

    公开(公告)日:2023-07-27

    申请号:US18154533

    申请日:2023-01-13

    Abstract: A rapid active vibration reduction method for a high-speed motion stage includes acquiring motion parameters of a motion body of the motion stage in current motion; determining a vibration reduction mode of a vibration reduction device according to the motion parameters; and controlling an action end of the vibration reduction device to contact with the motion body of the motion stage or contact with a driving device for driving the motion body to move based on the vibration reduction mode, so that a contact friction force used for suppressing vibration of the motion body is generated. Realizing vibration reduction by means of active friction can reduce vibration of the motion body in a specific stage needing vibration reduction, and the action end of the vibration reduction device does not need to contact with the motion body or does not need to contact with the driving device before vibration reduction.

    METHOD FOR SYNCHRONOUS WET ETCHING PROCESSING OF DIFFERENTIAL MICROSTRUCTURES

    公开(公告)号:US20190355587A1

    公开(公告)日:2019-11-21

    申请号:US16383885

    申请日:2019-04-15

    Abstract: A method for synchronous wet etching processing of differential microstructures, including the following steps: step a: performing photoetching on a processing surface of a workpiece to be processed to develop the workpiece; step b: affixing a mask to a surface opposite to the processing surface of the workpiece; step c: continuously cooling the mask; step d: placing the cooled mask and the workpiece in a wet etching device; and adding an etchant to the processing surface of the workpiece to start etching; step e: removing the mask and the workpiece from the wet etching device after the set etching time; separating the mask and the workpiece to obtain a workpiece with a etching structure. A temperature difference is formed between the pattern area to be processed and the retaining area.

    THREE-DIMENSIONAL MEASUREMENT METHOD AND RELATED APPARATUS

    公开(公告)号:US20230401730A1

    公开(公告)日:2023-12-14

    申请号:US18154557

    申请日:2023-01-13

    CPC classification number: G06T7/521 G01C3/02 G06T2207/10028

    Abstract: A three-dimensional measurement method comprises: converting a total number of levels of sawtooth fringes into a Gray code and acquiring a sawtooth slope coefficient; fusing the coefficient into a sawtooth fringe image to generate a target sawtooth fringe pattern; projecting each target sawtooth fringe pattern to a surface of a to-be-measured object through a projector, and collecting a deformed target sawtooth fringe pattern on the surface through a camera; solving a Gray code of each sawtooth fringe collection pattern at each pixel point according to a differential property of adjacent pixels in each sawtooth fringe collection pattern and solving a fringe level and a wrapped phase at each pixel point; calculating an absolute phase at each pixel point according to the fringe level and the wrapped phase at each pixel point, and reconstructing a three-dimensional point cloud through triangulation ranging to obtain a three-dimensional model of the to-be-measured object.

    PLANE CODING TARGET AND IMAGE SPLICING SYSTEM AND METHOD APPLYING THE SAME

    公开(公告)号:US20230217036A1

    公开(公告)日:2023-07-06

    申请号:US18065530

    申请日:2022-12-13

    CPC classification number: H04N19/513 H04N19/172

    Abstract: Disclosed are a plane coding target and an image splicing system and method applying the same. The plane coding target comprises a plurality of coding units distributed in an array, the coding unit comprises one central coding point, a plurality of normal coding points and at least one positioning point, and a positioning point distribution style of the positioning point is used for determining coordinates of the central coding point and the normal coding points in a coding unit coordinate system; and coding numerical value sequences of the coding units are different from each other and unique. The plane coding target can realize large-area coding and positioning functions, and the image splicing system applying the plane coding target can solve the problems of splicing error and error accumulation caused by an identification error of a splicing location, thus realizing large-range, high-precision and short-time two-dimensional image splicing.

    TIME OPTIMAL SPEED PLANNING METHOD AND SYSTEM BASED ON CONSTRAINT CLASSIFICATION

    公开(公告)号:US20230185262A1

    公开(公告)日:2023-06-15

    申请号:US17991936

    申请日:2022-11-22

    CPC classification number: G05B19/041 G06F17/16

    Abstract: A time optimal speed planning method and system based on constraint classification. The method comprises: reading path information and carrying out curve fitting to obtain a path curve; sampling the path curve, and considering static constraint to obtain a static upper bound value of a speed curve; considering dynamic constraint, and combining the static upper bound value of the speed curve to construct a time optimal speed model; carrying out convex transformation on the time optimal speed model to obtain a convex model; and solving the convex model based on a quadratic sequence planning method to obtain a final speed curve. The system comprises: a path curve module, a static constraint module, a dynamic constraint module, a model transformation module and a solving module.

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