公开(公告)号：US20220060125A1

公开(公告)日：2022-02-24

申请号：US16950062

申请日：2020-11-17

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Jian GAO ,  Jindi ZHANG ,  Yuheng LUO ,  Lingwei TAN ,  Lanyu ZHANG ,  Xin CHEN

IPC: H02N2/06 ,  G05B19/19

Abstract: The present disclosure relates to the technical field of mechanical precision manufacturing, in particular to a motor tracking error reduction method and an implementation device based on a micro-drive unit. A motor tracking error reduction method based on micro-drive unit includes: providing a motor mover as the working output end, and feeding back the position information of the motor mover to the micro-drive controller in real time by the sensor; controlling the micro-drive unit to compensate the displacement of the motor mover by the micro-drive controller; correcting the tracking error of the motor mover after the displacement compensation, and feeding back the tracking error information after correction to the motor controller. The error reduction method and implementation device in the present disclosure reduce the motor tracking error and solve the problem of coupling interference. In addition, the single position feedback is used to reduce the production cost.

公开(公告)号：US20200218243A1

公开(公告)日：2020-07-09

申请号：US16819178

申请日：2020-03-16

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Qiang LIU ,  Hao ZHANG ,  Xin CHEN ,  Kuanyuan LI ,  Jiewu LENG

IPC: G05B19/418 ,  G06F13/40

Abstract: A parallel control method for an intelligent workshop is provided, comprising the following steps: step A: constructing a parallel control simulation platform; step B: establishing a parallel execution mechanism; and, step C: correcting and optimizing a parallel control system. A parallel control system for an intelligent workshop is provided, comprising: an MES module configured to issue production instructions to unit management modules; the unit management modules configured to convert the received production instructions into machine instructions and synchronously issue the machine instructions to underlying PLCs by a bus control network module, and drive the parallel control simulation platform and a field device to move by a soft PLC and a hard PLC; the bus control network module configured to establish a communication network among the MES module, an SCADA module, an industrial personal computer, physical devices and a whole-line simulation model; and, the SCADA module.

公开(公告)号：US20190355587A1

公开(公告)日：2019-11-21

申请号：US16383885

申请日：2019-04-15

Applicant: Guangdong University of Technology

Inventor： Xin CHEN ,  Yun CHEN ,  Dachuang SHI ,  Xun CHEN ,  Qiang LIU ,  Jian GAO ,  Chengqiang CUI

IPC: H01L21/308 ,  H01L21/306

Abstract: A method for synchronous wet etching processing of differential microstructures, including the following steps: step a: performing photoetching on a processing surface of a workpiece to be processed to develop the workpiece; step b: affixing a mask to a surface opposite to the processing surface of the workpiece; step c: continuously cooling the mask; step d: placing the cooled mask and the workpiece in a wet etching device; and adding an etchant to the processing surface of the workpiece to start etching; step e: removing the mask and the workpiece from the wet etching device after the set etching time; separating the mask and the workpiece to obtain a workpiece with a etching structure. A temperature difference is formed between the pattern area to be processed and the retaining area.

公开(公告)号：US20240359326A1

公开(公告)日：2024-10-31

申请号：US18769309

申请日：2024-07-10

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Jian GAO ,  Disai CHEN ,  Yuheng LUO ,  Lanyu ZHANG ,  Zhuojun ZHENG ,  Guoqing WU ,  Xin CHEN

IPC: B25J9/16

CPC classification number: B25J9/1664 ,  B25J9/1607 ,  B25J9/163

Abstract: The present application provides a kinematics modeling method, apparatus and device for a multi-degree-of-freedom mechanism and a storage medium. The method includes: constructing a point coordinate system, and constructing the transformation matrix; constructing transformation matrices of two rotating axes and the transformation matrix; constructing the forward kinematics model based on the transformation matrices of the point coordinate system, the two rotating axes and the workpiece coordinate system; solving the motor value of the rotating axis through the rotation matrix of the end-effector, using the translation matrix of the end-effector as a non-homogeneous linear equation set, solving the motor value of linear axis. Thus solving the technical problem in the prior arts that the redundant parameters are introduced as a cost to separate the linear axis and the rotating axis for step-by-step kinematics calibration, which affects the error calibration precision of the overall end-effector movement of the mechanism.

公开(公告)号：US20240176315A1

公开(公告)日：2024-05-30

申请号：US18430513

申请日：2024-02-01

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Lanyu ZHANG ,  Boyu ZHAN ,  Jian GAO ,  Yachao LIU ,  Yun CHEN ,  Xin CHEN ,  Nan HUANG ,  Huake WANG ,  Xuanzhu CHEN

IPC: G05B13/04 ,  H02P25/06

CPC classification number: G05B13/042 ,  G05B13/048 ,  H02P25/06

Abstract: A linear motor motion control method, device, equipment and storage medium. The proposed invention uses an extended state observer constructed in advance based on the model parameters of the linear motor, and performs state estimation based on the total control amount of the linear motor and the actual displacement signal to obtain each observation signal. The phase advance controller is used to improve the estimated lag of the disturbance observation signal, and a model prediction controller built in advance based on the mathematical model of the linear motor is used to perform rolling optimization based on each observation signal to obtain the optimal control amount increment; The total control amount is updated based on the improved disturbance observation signal and the optimal control amount increment, and the corresponding drive signal is output to the drive end of the linear motor based on the updated total control amount.

公开(公告)号：US20230389431A1

公开(公告)日：2023-11-30

申请号：US18448861

申请日：2023-08-11

Applicant: Guangdong University of Technology

Inventor： Yun CHEN ,  Pengfei YU ,  Aoke SONG ,  Zijian LI ,  Maoxiang HOU ,  Xin CHEN

IPC: H10N30/082 ,  H10N30/081

CPC classification number: H10N30/082 ,  H10N30/081 ,  H10N30/30

Abstract: A core-shell coaxial gallium nitride piezoelectric nanogenerator includes a core-shell coaxial gallium nitride nanowire array and a flexible substrate. A first conductive layer is provided on a surface of the flexible substrate. The core-shell coaxial gallium nitride nanowire array is fixed to the flexible substrate. A top end of the core-shell coaxial gallium nitride nanowire array is provided with a second conductive layer. The first conductive layer and the second conductive layer are both connected to an external circuit via a wire. A nanowire of the core-shell coaxial gallium nitride nanowire array is covered with an alumina layer. A method for preparing the core-shell coaxial gallium nitride piezoelectric nanogenerator is further provided. The gallium nitride nanowire array is formed by electrodeless photoelectrochemical etching.

公开(公告)号：US20230298914A1

公开(公告)日：2023-09-21

申请号：US18062026

申请日：2022-12-06

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Hui TANG ,  Zhishen LIAO ,  Xin CHEN ,  Zhihang LIN ,  Jian GAO ,  Qiang LIU ,  Xun CHEN

IPC: H01L21/67

CPC classification number: H01L21/67144 ,  H01L21/67259

Abstract: A compliant mechanical system for Mini/Micro chip mass transfer and packaging comprises a flexure-based continuous ejector pin mechanism including a drive support plate, a mounting base, first thorn die attach drive devices, second thorn die attach drive devices, first flexible hinges, second flexible hinges, and a pricking pin. The first thorn die attach drive devices and the second thorn die attach drive devices are mounted on the drive support plate. A drive end of the first thorn die attach drive device horizontally passes rightward through the first flexible hinge at a corresponding position; a drive end of the second thorn die attach drive device horizontally passes leftward through the first flexible hinge at a corresponding position; and the mounting base is hinged to the drive ends of the two thorn die attach drive devices through the second flexible hinges.

公开(公告)号：US20190189459A1

公开(公告)日：2019-06-20

申请号：US16221456

申请日：2018-12-15

Applicant: Guangdong University of Technology

Inventor： Yun CHEN ,  Xin CHEN ,  Jian GAO ,  Zhengping WANG ,  Haidong YANG

IPC: H01L21/306 ,  H01L21/308 ,  H01L21/311 ,  H01L21/3213 ,  H01L21/67 ,  G01F23/64

CPC classification number: H01L21/30612 ,  G01F23/64 ,  H01L21/3081 ,  H01L21/311 ,  H01L21/3213 ,  H01L21/67063

Abstract: Disclosed is a processing device for the third generation semiconductor materials. The device includes a reaction device, an operating platform and a support device. A reaction chamber is located inside the reaction device and the upper and lower ends of the reaction device are covered with an upper cover and a lower cover, respectively. An etching solution injection port and an etching solution discharge port are provided at the side wall of the reaction chamber. A stirring excitation coil, a plurality of conducting rods, a plurality of heating rods, a plurality of sealing rings and a workpiece are provided inside of the reaction chamber. The stirring excitation coil is mounted just under the upper cover; the conducting rods and the heating rods are respectively mounted in a circumferentially symmetrical manner in an inner wall of the reaction chamber.

公开(公告)号：US20190185319A1

公开(公告)日：2019-06-20

申请号：US16221457

申请日：2018-12-15

Applicant: Guangdong University of Technology

Inventor： Yun CHEN ,  Xin CHEN ,  Dachuang SHI ,  Jian GAO ,  Zhengping WANG ,  Haidong YANG

IPC: B81C1/00 ,  H01L21/306 ,  H01L29/06

Abstract: A method of processing nano- and micro-pores includes washing a substrate and cleaning a surface of the substrate; spin-coating photoresist, exposing the substrate and developing to form the substrate with a pattern; 3. depositing micro-nano metal particles on the surface of the substrate; wherein the micro-nano metal particles are centered on a magnetic core; and the surface of the magnetic core is plated with a metal nano-particle coating composed of a plurality of gold, silver or aluminum nanoparticles; removing the photoresist, and maintaining dot arrays of the micro-nano metal particles; applying laser irradiation and a strong uniform magnetic field on the substrate, so that the substrate is processed to form processed structures; and after the processed structures being formed into nano-/micro-pores with targeted pore size, shape and depth, stopping the laser irradiation and removing the strong uniform magnetic field.

公开(公告)号：US20250115483A1

公开(公告)日：2025-04-10

申请号：US18982794

申请日：2024-12-16

Applicant: Guangdong University of Technology

Inventor： Yun CHEN ,  Bin XIE ,  Yuanhui GUO ,  Hao ZHANG ,  Maoxiang HOU ,  Li MA ,  Xin CHEN

IPC: G01N27/12 ,  B23K26/362 ,  C01B32/184

Abstract: A method for manufacturing a humidity alarm device based on laser-induced graphene is performed as follows. Carbon-based films are coated with a hydroxide ion-containing solution and processed by a laser device to generate hydrophilic graphene layers. The hydrophilic graphene layers are peeled off from the carbon-based films, wetted, and respectively wrapped around shaping rods varying in diameter. The wrapped rods are heated and shaped by a drying oven to obtain curled graphene switches. Each curled graphene switch is connected in series with an alarm lamp to form an alarm component. The alarm components are connected in parallel, and then connected to a positive terminal and a negative terminal of a power supply to form the humidity alarm device.