公开(公告)号：AT319652T

公开(公告)日：2006-03-15

申请号：AT01959574

申请日：2001-08-04

Applicant: HARRIS CORP

Inventor： NEWTON CHARLES ,  RUMPF RAYMOND ,  GAMLEN CAROL

IPC: B81B3/00 ,  H01H59/00 ,  H01P1/12 ,  H05K1/09 ,  H05K3/02 ,  H01H1/00

公开(公告)号：CA2417352A1

公开(公告)日：2002-02-14

申请号：CA2417352

申请日：2001-08-04

Applicant: HARRIS CORP

Inventor： GAMLEN CAROL ,  RUMPF RAYMOND ,  NEWTON CHARLES

IPC: B81B3/00 ,  H01H59/00 ,  H01P1/12 ,  H05K1/09 ,  H05K3/02 ,  H01H1/00

Abstract: A microelectromechanical structure having a ceramic substrate formed from lo w temperature co-fired ceramic sheets. A low loss photodefinable dielectric planarizing layer is formed over one surface of the ceramic substrate. This layer can be a sacrificial layer or a subsequent sacrificial layer added. A photodefined conductor is printed over the low loss dielectric planarizing layer and formed with the sacrificial layer into a structural circuit component. A switch is formed with a biasing actuator and deflectable member formed over the biasing actuator and moveable into open and closed circuit positions.