5.
    发明专利
    未知

    公开(公告)号:AT501525T

    公开(公告)日:2011-03-15

    申请号:AT01993188

    申请日:2001-11-28

    Applicant: HARRIS CORP

    Abstract: A thermally enhanced microcircuit package includes a microcircuit having a microcircuit device cavity that receives a microcircuit device. A microelectromechanical (MEMS) cooling module is operatively connected to the microcircuit package and forms a capillary pumped loop cooling circuit having an evaporator, condenser and interconnecting cooling fluid channels for passing vapor and fluid between the evaporator and condenser and evaporating and condensing the cooling fluid.

    CERAMIC MICROELECTROMECHANICAL STRUCTURE

    公开(公告)号:CA2417352C

    公开(公告)日:2006-12-12

    申请号:CA2417352

    申请日:2001-08-04

    Applicant: HARRIS CORP

    Abstract: A microelectromechanical structure having a ceramic substrate formed from lo w temperature co-fired ceramic sheets. A low loss photodefinable dielectric planarizing layer is formed over one surface of the ceramic substrate. This layer can be a sacrificial layer or a subsequent sacrificial layer added. A photodefined conductor is printed over the low loss dielectric planarizing layer and formed with the sacrificial layer into a structural circuit component. A switch is formed with a biasing actuator and deflectable member formed over the biasing actuator and moveable into open and closed circuit positions.

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