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公开(公告)号:JPS59159397A
公开(公告)日:1984-09-08
申请号:JP23802883
申请日:1983-12-19
Applicant: Ibm
Inventor: ARI ABUIRAMU , MITSUCHIERU SHIMONZU KOOHEN
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公开(公告)号:JPS59127773A
公开(公告)日:1984-07-23
申请号:JP22861983
申请日:1983-12-05
Applicant: Ibm
Inventor: ARI ABUIRAMU , ZURATA KOBUATSUKU , HAN CHIYUNGU WANGU
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公开(公告)号:JPS57144784A
公开(公告)日:1982-09-07
申请号:JP19869881
申请日:1981-12-11
Applicant: IBM
Inventor: ARI ABUIRAMU , SUUZAN ORUGA ERUMAN
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公开(公告)号:JPS5662247A
公开(公告)日:1981-05-28
申请号:JP14068980
申请日:1980-10-09
Applicant: IBM
Inventor: ARI ABUIRAMU , DONARUDO KURIFUOODO HOFUAA , FURANKU BENJIYAMIN KOOFUMAN , SUTEIIBUN ROBAATO KURAMAA , JIEEN MAAGARETSUTO SHIYOU , MAIKERU HATSUZAKISU , FURETSUCHIYAA JIYOONZU
IPC: G03F7/004 , G03C1/675 , G03C5/00 , G03C5/16 , G03F7/038 , H01L21/027 , H01L21/302
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