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公开(公告)号：JPS5662247A
公开(公告)日：1981-05-28
申请号：JP14068980
申请日：1980-10-09
Applicant: IBM
Inventor： ARI ABUIRAMU , DONARUDO KURIFUOODO HOFUAA , FURANKU BENJIYAMIN KOOFUMAN , SUTEIIBUN ROBAATO KURAMAA , JIEEN MAAGARETSUTO SHIYOU , MAIKERU HATSUZAKISU , FURETSUCHIYAA JIYOONZU
IPC: G03F7/004 , G03C1/675 , G03C5/00 , G03C5/16 , G03F7/038 , H01L21/027 , H01L21/302
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