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公开(公告)号：WO0223250A2
公开(公告)日：2002-03-21
申请号：PCT/IB0101553
申请日：2001-08-29
Applicant: IBM , BINNIG GERD K , BONA GIAN LUCA , HAEBERLE WALTER , VETTIGER PETER
Inventor： BINNIG GERD K , BONA GIAN-LUCA , HAEBERLE WALTER , VETTIGER PETER
CPC classification number: G02B6/3514 , G02B6/352 , G02B6/3528 , G02B6/3538 , G02B6/3546 , G02B6/357 , G02B6/358 , G02B6/3596
Abstract: An optical device comprises a substrate having a plane surface. An optical path is disposed on the substrate and extends in a plane parallel to the surface of the substrate. A recess intercepts the optical path. An optical element is provided for modifying light incident thereon. The optical element is moveable within the recess between a first position in which the optical element is located in the path and a second position in which optical element is remote from the path. A cantilever suspends the optical elements for movement within the recess between the second and first positions in a direction normal to the surface of the substrate.
Abstract translation: 一种光学器件包括具有平面表面的衬底。 光路布置在基板上并且在平行于基板表面的平面中延伸。 凹槽拦截光路。 提供用于修改入射到其上的光的光学元件。 光学元件可在凹槽内在光学元件位于路径中的第一位置和光学元件远离路径的第二位置之间移动。 悬臂将光学元件悬挂在垂直于基板表面的方向上的第二位置与第一位置之间的凹槽内移动。
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公开(公告)号：WO0223250A8
公开(公告)日：2004-03-04
申请号：PCT/IB0101553
申请日：2001-08-29
Applicant: IBM , BINNIG GERD K , BONA GIAN-LUCA , HAEBERLE WALTER , VETTIGER PETER
Inventor： BINNIG GERD K , BONA GIAN-LUCA , HAEBERLE WALTER , VETTIGER PETER
CPC classification number: G02B6/3514 , G02B6/352 , G02B6/3528 , G02B6/3538 , G02B6/3546 , G02B6/357 , G02B6/358 , G02B6/3596
Abstract: An optical device comprises a substrate having a plane surface. An optical path is disposed on the substrate and extends in a plane parallel to the surface of the substrate. A recess intercepts the optical path. An optical element is provided for modifying light incident thereon. The optical element is moveable within the recess between a first position in which the optical element is located in the path and a second position in which optical element is remote from the path. A cantilever suspends the optical elements for movement within the recess between the second and first positions in a direction normal to the surface of the substrate.
Abstract translation: 光学装置包括具有平面的基板。 光路设置在基板上并且在平行于基板的表面的平面中延伸。 凹口截取光路。 提供光学元件用于修改入射到其上的光。 光学元件可以在光学元件位于路径中的第一位置和光学元件远离路径的第二位置之间的凹部内移动。 悬臂悬挂光学元件以在垂直于基板表面的方向在第二和第一位置之间的凹槽内移动。
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13.发明申请
公开(公告)号：WO02064495A3
公开(公告)日：2003-06-05
申请号：PCT/IB0200395
申请日：2002-02-08
Applicant: IBM , DESPONT MICHEL , DRECHSLER UTE , GENOLET GREGOIRE , VETTIGER PETER
Inventor： DESPONT MICHEL , DRECHSLER UTE , GENOLET GREGOIRE , VETTIGER PETER
CPC classification number: B81C1/00476 , B81C2201/0109
Abstract: A method for at least partially releasing microstructures from a substrate is provided. The method comprises the steps of: a) providing a substrate (2); b) depositing onto said substrate (2) a first layer (4) and a second layer (6), the first layer (4) and the second layer (6) each comprising an electrically conducting material and each having a different oxido-reduction potential; c) electrically connecting the first layer (4) and the second layer (6); d) forming a microstructure (8) on the first (4) and second (6) layers deposited in step b) to produce an intermediate structure (10); and e) electrochemically etching said second layer (6) by immersing the intermediate structure (10) formed in step d) in an electrolyte (12).
Abstract translation: 提供了一种至少部分地从基板上释放微结构的方法。 该方法包括以下步骤：a）提供衬底（2）; b）在所述基板（2）上沉积第一层（4）和第二层（6），所述第一层（4）和所述第二层（6）各自包括导电材料并且各自具有不同的氧化还原 潜在; c）电连接第一层（4）和第二层（6）; d）在步骤b）中沉积的第一（4）和第二（6）层上形成微结构（8）以产生中间结构（10）; 以及e）通过将步骤d）中形成的中间结构（10）浸入电解质（12）中来电化学蚀刻所述第二层（6）。
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公开(公告)号：WO03014789A2
公开(公告)日：2003-02-20
申请号：PCT/IB0202117
申请日：2002-06-07
Applicant: IBM , DESPONT MICHEL , DRECHSLER UTE , ROTHUIZEN HUGO E , VETTIGER PETER , WIDMER ROLAND W
Inventor： DESPONT MICHEL , DRECHSLER UTE , ROTHUIZEN HUGO E , VETTIGER PETER , WIDMER ROLAND W
CPC classification number: G11C23/00 , G02B6/122 , G02B6/3514 , G02B6/3518 , G02B6/3546 , G02B6/3576 , G02B6/358 , H01H1/0036 , H01H61/02 , H01H2001/0042 , H01H2001/0084 , H01H2061/006
Abstract: A microsystem switch (1, 20, 25, 30, 33) has a support (2) defining a recess (3), and a flexible bridge (6) is mounted on the support (2) bridging the recess (3). The bridge (6) is shaped so as to hold selectively a concave support stable state, in which the bridge bulges out of the recess (3). The switch includes an actuator (8, 9; 26, 27) for effecting flexing of the bridge (6) between the stable states, and a switching element (7, 31, 34) is mounted on the bridge (6) such that movement of the bridge between the stable states moves the switching element between an on position and an off position. According to another design, a microsystem switch (40, 55) has a support (41) defining a recess (42), and an elongate torsion member (44) is mounted on the support (41) bridging the recess (42). A flexible bridge (43, 56) is mounted on the support (41) bridging the recess (42) in a direction substantially perpendicular to the torsion member (44). The bridge (43, 56) is connected to the torsion member (44) at the cross-point thereof so that a first section of the bridge extends between the cross-point and one side of the recess (42) and a second section of the bridge extends between the cross-point and the opposite side of the recess (42). The bridge (43, 56) is shaped so as to hold selectively a first stable state, in which the first section of the bridge bulges into the recess and the second section of the bridge bulges out of the recess, and a second stable state in which this configuration is reversed. A switching element (45) is mounted at the cross-point of the bridge (43, 56) and torsion member (44), and an actuator (46a, 46b; 58a, 58b) is again provided for effecting flexing of the bridge (43, 56) between the stable states. Here, movement of the bridge (43, 56) between the stable states effects twisting of the torsion member (44) and rotation of the switching element (45) between an on position and an off position. Switching devices incorporating these switches, and switching apparatus comprising arrays of such switching devices, are also provided.
Abstract translation: 微系统开关（1,20,25,30,33）具有限定凹部（3）的支撑件（2），并且柔性桥（6）安装在桥接凹部（3）的支撑件（2）上。 桥（6）成形为能够选择性地保持凹形支撑件稳定状态，其中桥从凸出部（3）突出。 所述开关包括用于在所述稳定状态之间实现所述桥梁（6）的弯曲的致动器（8,9; 26,27），并且将开关元件（7,31,34）安装在所述桥架（6）上， 在稳定状态之间的桥接器之间的开关元件在接通位置和关闭位置之间移动。 根据另一种设计，微系统开关（40,55）具有限定凹部（42）的支撑件（41），并且细长扭转构件（44）安装在桥接凹部（42）的支撑件（41）上。 柔性桥（43,46）安装在基本上垂直于扭转构件（44）的方向上桥接凹部（42）的支撑件（41）上。 桥（43,46）在其交叉点处连接到扭转构件（44），使得桥的第一部分在凹部（42）的交叉点和一侧之间延伸，并且第二部分 该桥在凹口（42）的交叉点和相对侧之间延伸。 桥（43,56）成形为能够选择性地保持第一稳定状态，其中桥的第一部分凸起到凹部中，并且桥的第二部分从凹部膨胀出来，并且第二稳定状态在 这个配置是相反的。 开关元件（45）安装在桥（43,56）和扭转构件（44）的交叉点处，并且再次提供致动器（46a，46b; 58a，58b）以实现桥的弯曲 43，56）之间的稳定状态。 这里，桥梁（43,46）在稳定状态之间的移动使得扭转构件（44）扭转和开关元件（45）的旋转在接通位置和关闭位置之间。 还提供了包括这些开关的开关装置和包括这种开关装置的阵列的开关装置。
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公开(公告)号：WO02077986A3
公开(公告)日：2002-12-27
申请号：PCT/IB0200783
申请日：2002-03-14
Applicant: IBM , VETTIGER PETER , BINNIG GERD K , HAEBERLE WALTER
Inventor： VETTIGER PETER , BINNIG GERD K , HAEBERLE WALTER
CPC classification number: B82Y10/00 , G11B9/14 , G11B9/1409 , G11B9/1418 , G11B25/06 , G11B25/063
Abstract: In accordance with the present invention, there is provided an apparatus comprising a tape having an information layer on which information is storable in the form of perturbations, an array (10) of probes (11) that in function faces the tape (2) such that the probes scan the surface of the tape, means for selectively forming the perturbations via the probes, means for detecting the presence of the perturbations via the probes, and drive means (20, 25, 40, 42) for moving the tape relative to the array of probes. The apparatus allows to store high data capacities at a small form factor.
Abstract translation: 根据本发明，提供了一种装置，包括具有信息层的信息层，信息层可以以扰动的形式存储在信息层上;功能上面向带（2）的探针（11）阵列（10） 探针扫描带的表面，用于通过探针选择性地形成扰动的装置，用于检测经由探针的扰动的存在的装置，以及用于使带移动的驱动装置（20,25,40,42） 探针阵列。 该设备允许以小尺寸存储高数据容量。
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Patent Agency Ranking
公开(公告)号：AT408880T
公开(公告)日：2008-10-15
申请号：AT03010254
申请日：2003-05-07
Applicant: IBM
Inventor： ALBRECHT THOMAS , BINNIG GERD K , ELEFTHERIOU EVANGELOS S , POZIDIS HARIS , SRI-JAYANTHA SRI , VETTIGER PETER
Abstract: A storage device and a method for scanning a storage medium. A storage medium for storing data in the form of marks is scanned by an array of probes for mark detecting purposes in a scanning mode. The storage medium has fields with each field to be scanned by an associated one of the probes. At least one of the fields has marks representing operational data for operating the scanning mode. Scanning parameters are computed from the operational data and the scanning mode is adjusted according to the computed parameters.
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公开(公告)号：DE60131558T2
公开(公告)日：2008-09-25
申请号：DE60131558
申请日：2001-09-17
Applicant: IBM
Inventor： BINNIG GERD K , DESPONT MICHEL , VETTIGER PETER
Abstract: Read/write components for AFM-based data storage devices are provided. In particular embodiments, a read/write component (30, 45, 50, 65, 80) comprises lever means (31, 51, 66, 82) and a support structure (32, 52, 67, 81), the lever means being connected to the support structure for substantially pivotal movement. The lever means (31, 51, 66, 82) provides first and second current paths between a pair of electrical supply lines (R, C) on the support structure via which the lever means can be connected in use to power supply means operable in a write mode and a read mode. A write-mode heater (36, 47, 56, 73) is provided on the lever means in the first current path, and a read/write tip (37, 57, 74, 84) is provided on the write-mode heater. A read-mode heater (39, 46, 58, 75, 83) is provided on the lever means in the second current path. Decoupling means (38a, 38b, 40a, 40b, 60, 61, 77a, 77b, 78a, 78b) is arranged to inhibit current flow to the write-mode heater via the first current path in use when the power supply means is operated in the read mode. The component, with separate write and read-mode heaters, can thus be addressed in both the write and read modes via a single pair of supply lines. Other embodiments provide read/write components (100) employing a thermal decoupling mechanism, and read/write components (80) where read-sensing is performed by a proximity sensing arrangement between the lever means and the support structure. Sensing apparatus (115) for atomic force microscopes is also provided where tip movement can be detected via similar proximity sensing arrangements.
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公开(公告)号：DE60131558D1
公开(公告)日：2008-01-03
申请号：DE60131558
申请日：2001-09-17
Applicant: IBM
Inventor： BINNIG GERD K , DESPONT MICHEL , VETTIGER PETER
Abstract: Read/write components for AFM-based data storage devices are provided. In particular embodiments, a read/write component (30, 45, 50, 65, 80) comprises lever means (31, 51, 66, 82) and a support structure (32, 52, 67, 81), the lever means being connected to the support structure for substantially pivotal movement. The lever means (31, 51, 66, 82) provides first and second current paths between a pair of electrical supply lines (R, C) on the support structure via which the lever means can be connected in use to power supply means operable in a write mode and a read mode. A write-mode heater (36, 47, 56, 73) is provided on the lever means in the first current path, and a read/write tip (37, 57, 74, 84) is provided on the write-mode heater. A read-mode heater (39, 46, 58, 75, 83) is provided on the lever means in the second current path. Decoupling means (38a, 38b, 40a, 40b, 60, 61, 77a, 77b, 78a, 78b) is arranged to inhibit current flow to the write-mode heater via the first current path in use when the power supply means is operated in the read mode. The component, with separate write and read-mode heaters, can thus be addressed in both the write and read modes via a single pair of supply lines. Other embodiments provide read/write components (100) employing a thermal decoupling mechanism, and read/write components (80) where read-sensing is performed by a proximity sensing arrangement between the lever means and the support structure. Sensing apparatus (115) for atomic force microscopes is also provided where tip movement can be detected via similar proximity sensing arrangements.
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公开(公告)号：ES2257532T3
公开(公告)日：2006-08-01
申请号：ES02707044
申请日：2002-03-15
Applicant: IBM
Inventor： BINNIG GERD K , HABERLE WALTER , VETTIGER PETER
Abstract: Un método para escribir datos y/o leer datos desde lugares de una superficie de medio de almacenamiento a través de una punta, comprendiendo el método: mover la punta (40) entre los lugares de la superficie; y, en cada lugar, aplicar selectivamente energía a la superficie a través de la punta (40) activando un elemento de calentamiento (30) para calentamiento y/o para relectura térmica en un modo por impulsos en que un sensor en voladizo (10) comprende el elemento de calentamiento (30) y la punta (40); y caracterizado por impulsar conjuntamente de manera selectiva a la punta (40) mediante la superficie en un modo por impulsos y en sincronización con la aplicación selectiva de energía.
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公开(公告)号：AU8240501A
公开(公告)日：2002-04-29
申请号：AU8240501
申请日：2001-09-13
Applicant: IBM
Inventor： BINNIG GERD K , HABERLE WALTER , VETTIGER PETER
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