公开(公告)号：DE19949611B4

公开(公告)日：2007-05-31

申请号：DE19949611

申请日：1999-10-14

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  HANDTMANN MARTIN

IPC: G01C19/56

Abstract: An angular rate sensor includes a ring that is kept floating by electrostatic forces between electrodes without the ring being mechanically or electrically contacted. The ring is divided into segments of differing radial dimensions which cooperate with a multi-phase drive from segmented electrodes to exert a torque on the floating ring which causes the ring to rotate. A control of the position of the ring and a detection of the Coriolis force that occurs are achieved by the voltages applied to the electrodes.

公开(公告)号：DE102005028927B4

公开(公告)日：2007-02-15

申请号：DE102005028927

申请日：2005-06-22

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  HANDTMANN MARTIN

IPC: H03H9/15

Abstract: The bulk acoustic wave (BAW) apparatus has two BAW resonators (72,74) connected in antiparallel, such that the resonators have same polarization direction. The top electrode (72T) of BAW resonator (72) is electrically connected to the bottom electrode (74B) of BAW resonator (74) and electrical terminal (76) of BAW apparatus. The bottom electrode (72B) of BAW resonator (72) is electrically connected to the top electrode (74T) of BAW resonator (74) and electrical terminal (78) of BAW apparatus. Independent claims are also included for the following: (1) method of reducing non-linear properties within BAW apparatus; and (2) BAW filter.

公开(公告)号：DE50202400D1

公开(公告)日：2005-04-07

申请号：DE50202400

申请日：2002-07-10

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  HANDTMANN MARTIN ,  MARKSTEINER STEPHAN ,  NESSLER WINFRIED

IPC: H03H9/00 ,  H03H9/17 ,  H03H9/58

Abstract: A BAW resonator includes a first piezoelectric layer made of a material oriented toward a first direction, and a second piezoelectric layer made of a material oriented toward a second direction which is opposed to the first direction. The first piezoelectric layer and the second piezoelectric layer are acoustically coupled with each other.

公开(公告)号：DE10149542A1

公开(公告)日：2003-04-17

申请号：DE10149542

申请日：2001-10-08

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  MARKSTEINER STEPHAN ,  NESSLER WINFRIED ,  HANDTMANN MARTIN

IPC: H03H9/00 ,  H03H9/17 ,  H03H9/58 ,  H03H9/15

Abstract: A bulk acoustic wave resonator has a first piezoelectric layer (PL) (106) made from material that is oriented in a first direction and a second PL (108) made from material that is oriented in a second direction opposed to the first direction. A substrate (100) has a first main surface (102) to support a first metal/conductive connector electrode (MCCE) (104) with the first and second PLs. A second MCCE (110) rests on the second PL. An Independent claim is also included for a bulk acoustic wave filter with one or more bulk acoustic resonators.