公开(公告)号：AU2003235621A1

公开(公告)日：2003-07-30

申请号：AU2003235621

申请日：2003-01-07

Applicant: INFINEON TECHNOLOGIES AG

Inventor： KLEIN WOLFGANG ,  SCHWERD MARKUS ,  KOLLER KLAUS

IPC: H01L21/768 ,  H01L23/522

公开(公告)号：DE10201448A1

公开(公告)日：2003-07-24

申请号：DE10201448

申请日：2002-01-16

Applicant: INFINEON TECHNOLOGIES AG

Inventor： KLEIN WOLFGANG ,  SCHWERD MARKUS ,  KOLLER KLAUS

IPC: H01L21/768 ,  H01L23/522 ,  H01L21/283

Abstract: Production of a through-contact (34) comprises forming an insulating layer (56), forming a contact opening (76) in a contact region extending from the second main side (59) of the insulating layer up to a first strip conductor (18) and opening into a trench, and filling the contact opening with a conducting material (78) to produce the through-contact and a second strip conductor (10) so that the width of the second strip conductor can be fitted in a self-adjusting manner to the size of the through-contact. An Independent claim is also included for the through-contact formed by the above process. Preferred Features: The step of filling the contact opening comprises also filling the trench for the second strip conductor with the conducting material to produce the second strip conductor. The insulating layer is produced by forming a further insulating layer, forming a trench for the first strip conductor in a main side of the further insulating layer, filling the trench with a conducting material to form the first strip conductor, applying the insulating layer on the main side of the further insulating layer, and forming the trench for the second strip conductor in the main side of the insulating layer lying opposite the further insulating layer.