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公开(公告)号：CA2378736A1
公开(公告)日：2001-01-18
申请号：CA2378736
申请日：2000-07-13
Applicant: INPUT OUTPUT INC
Inventor： RIED ROBERT P , SCHMIDT MARTIN A , YU DULI , YU LIANZHONG , GOLDBERG HOWARD D
Abstract: A micro machined mirror assembly is provided that includes a micro machined top cap (205), mirror (210), and bottom cap (215) mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T - shaped hinges and includes travel stops that limit motion of the mirror in t he x-, y-, and z-directions. The top and bottom micro machined caps also includ e travel stops that limit motion of the mirror in the z-direction.
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公开(公告)号：AU4503500A
公开(公告)日：2000-10-04
申请号：AU4503500
申请日：2000-03-16
Applicant: INPUT/OUTPUT INC
Inventor： SELVAKUMAR ARJUN , GOLDBERG HOWARD D , YU DULI , IP MATTHEW , SCHMIDT MARTIN A , MARSH JAMES L , FUNG BING-FAI , SIMON PHILIP
IPC: G01P21/00 , G01D11/24 , G01D18/00 , G01H1/00 , G01L27/00 , G01N1/02 , G01P1/02 , G01P15/08 , G01P15/125 , G01P15/13 , G01V1/047 , G01V1/053 , G01V1/104 , G01V1/18 , G01V1/40 , H01L21/60 , H01L29/84 , H05K5/00
Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).
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公开(公告)号：CA2378736C
公开(公告)日：2010-03-23
申请号：CA2378736
申请日：2000-07-13
Applicant: INPUT OUTPUT INC
Inventor： YU DULI , YU LIANZHONG , GOLDBERG HOWARD D , SCHMIDT MARTIN A , RIED ROBERT P
Abstract: A micro machined mirror assembly is provided that includes a micro machined top cap (205), mirror (210), and bottom cap (215) mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the x-, y-, and z-directions. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.
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公开(公告)号：NO20025744L
公开(公告)日：2003-01-28
申请号：NO20025744
申请日：2002-11-29
Applicant: INPUT OUTPUT INC
Inventor： RIED ROBERT P , SELVAKUMAR ARJUN , GOLDBERG HOWARD D , SCHMIDT MARTIN A , YU LIANZHONG
IPC: G01P15/08 , G01P15/125 , G01V1/18 , A61B15/125
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公开(公告)号：NO20025744A
公开(公告)日：2003-01-28
申请号：NO20025744
申请日：2002-11-29
Applicant: INPUT OUTPUT INC
Inventor： RIED ROBERT P , SELVAKUMAR ARJUN , GOLDBERG HOWARD D , SCHMIDT MARTIN A , YU LIANZHONG
IPC: G01P15/08 , G01P15/125 , G01V1/18 , A61B15/125
CPC classification number: G01V1/181 , G01P15/0802 , G01P15/125
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Patent Agency Ranking
公开(公告)号：NO20020140A
公开(公告)日：2002-03-12
申请号：NO20020140
申请日：2002-01-11
Applicant: INPUT OUTPUT INC
Inventor： YU DULI , YU LIANZHONG , GOLDBERG HOWARD D , SCHMIDT MARTIN A , RIED ROBERT P
CPC classification number: G02B26/0841 , G02B7/1821
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公开(公告)号：NO20014464L
公开(公告)日：2001-11-16
申请号：NO20014464
申请日：2001-09-14
Applicant: INPUT OUTPUT INC
Inventor： SELVAKUMAR ARJUN , GOLDBERG HOWARD D , YU DULI , IP MATTHEW , SCHMIDT MARTIN A , MARSH JAMES L , FUNG BING-FAI , SIMON PHILIP
IPC: G01P21/00 , G01D11/24 , G01D18/00 , G01H1/00 , G01L27/00 , G01N1/02 , G01P1/02 , G01P15/08 , G01P15/125 , G01P15/13 , G01V1/047 , G01V1/053 , G01V1/104 , G01V1/18 , G01V1/40 , H01L21/60 , H01L29/84 , H05K5/00 , G01P
Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).
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公开(公告)号：EP1305639A4
公开(公告)日：2004-03-24
申请号：EP01939582
申请日：2001-05-29
Applicant: INPUT OUTPUT INC
Inventor： RIED ROBERT P , SELVAKUMAR ARJUN , GOLDBERG HOWARD D , SCHMIDT MARTIN A , YU LIANZHONG
IPC: G01P15/08 , G01P15/125 , G01V1/18 , G01P15/00 , G01P1/00
CPC classification number: G01V1/181 , G01P15/0802 , G01P15/125
Abstract: An accelerometer (305) which comprises a measurement mass assembly having top capacitor electrode (705), with one or more re-entrant openings or grooves (1405), a bottom capacitor electrode (805), with one or more re-entrant openings (1410), and/or a mass electrode pattern (910, 915), which also includes one or more re-entrant openings or grooves (1415, 1420). A re-entrant opening or groove is an opening or groove formed in an element whereby the opening or groove is larger toward the center of the element than at the surface of the element. Re-entrant openings or grooves (1405, 1410, 1415, 1420) reduce fluid damping thereby reducing the amount of thermo-mechanical noise and permit increased sealing pressure of the accelerometer (305) thereby lowering manufacturing costs and increasing production yields.
Abstract translation: 包括具有顶部电容器电极（705），一个或多个凹入开口或凹槽（1405），底部电容器电极（805）的测量质量组件的加速度计（305），具有一个或多个凹入开口 和/或质量电极图案（910,915），其还包括一个或多个凹入开口或凹槽（1415,1420）。 凹入开口或凹槽是在元件中形成的开口或凹槽，由此开口或凹槽朝向元件的中心比在元件的表面处更大。 凹入开口或凹槽（1405,1410,1415,1420）减少流体阻尼，从而减少热机械噪声的量并允许加速度计（305）的增加的密封压力，从而降低制造成本并提高产量。
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公开(公告)号：EP1208385A4
公开(公告)日：2002-11-27
申请号：EP00926518
申请日：2000-03-16
Applicant: INPUT OUTPUT INC
Inventor： SELVAKUMAR ARJUN , GOLDBERG HOWARD D , YU DULI , IP MATTHEW , SCHMIDT MARTIN A , MARSH JAMES L , FUNG BING-FAI , SIMON PHILIP
IPC: G01P21/00 , G01D11/24 , G01D18/00 , G01H1/00 , G01L27/00 , G01N1/02 , G01P1/02 , G01P15/08 , G01P15/125 , G01P15/13 , G01V1/047 , G01V1/053 , G01V1/104 , G01V1/18 , G01V1/40 , H01L21/60 , H01L29/84 , H05K5/00 , B81B3/00 , B81B7/00 , G01P1/00
CPC classification number: G01P1/023 , B81B3/001 , B81B3/0072 , B81B7/0016 , B81B2201/0235 , G01D11/245 , G01D18/008 , G01N2001/021 , G01P15/0802 , G01P15/13 , G01P21/00 , G01V1/047 , G01V1/053 , G01V1/104 , G01V1/181 , G01V1/186 , H01L2224/48472 , H01L2924/0002 , H01L2924/00
Abstract: A system for acquiring environnemental information measurements. The 5 system (100) utilizes a sensor, (205) a front-end circuit, (310) a loop filter (315), a switch controller (206), and a recuced-oder loop control circuit to provide reliable data measurements while providing robust system behavior. The system further includes a sensor simulator (330) for simulating the operation of the sensor (205) and testing the operation of the front-end circuit (310) nd the loop filter (315).
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公开(公告)号：EP1200865A4
公开(公告)日：2004-04-28
申请号：EP00947273
申请日：2000-07-13
Applicant: INPUT OUTPUT INC
Inventor： YU DULI , YU LIANZHONG , GOLDBERG HOWARD D , SCHMIDT MARTIN A , RIED ROBERT P
CPC classification number: G02B26/0841 , G02B7/1821
Abstract: A micro machined mirror assembly is provided that includes a micro machined top cap (205), mirror (210), and bottom cap (215) mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the x-, y-, and z-directions. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.
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